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 KrF
Excimer Laser G20K/21K Series
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G20K Series
2-kHz KrF Excimer Laser for 0.18 µm Design Rule |
| The G20K features high energy stability (±0.4%) and
a narrow spectral bandwidth (FWHM) of 0.6 pm or less to allow
exposure of 0.18-µm geometries at high resolution.
G20K Main Features
- Repetition rate increased from 1000 Hz (G10K) to
2000 Hz to achieve higher throughput.
- Great enhancement
of laser emission stability and module durability
allows further reduction of the CoO
(running cost per pulse).
- Compact size that reduces
the floor footprint by 14% compared with the G10K.
- A
newly designed solid-state pulse power supply allows
a 20% reduction of power consumption.
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G21K Series
2-kHz KrF Excimer Laser for 0.13 µm Design Rule |
G21K Main Features
- Further enhancement of the field-proven energy stability
of the G20K.
- Ultra-narrow bandwidth of 0.5 pm (FWHM) achieved
by improvement of the line-narrowing module to allow
exposure
of 0.13 µm geometries.
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