Gigaphoton inc./Products/G41A

ArF Excimer Laser G41A/42A Series

The ArF excimer laser G41A/42A series allows exposure of geometries of 0.10 µm or below at lower running cost.

G41A Series
4-kHz ArF Excimer Laser for Design Rule of 0.10 µm or below

G41A Main Features

Mounted with a newly designed solid-state pulse power supply that allows a repetition rate of 4000 Hz so as to achieve high throughput.
High-reliability design inherited from our field-proven KrF excimer laser G10K/20K series.

G42A Series
4-kHz ArF Excimer Laser for 80-nm Technology Node

G42A Main Features

Spectral bandwidth (FWHM) improved from 0.35 pm (G41A) to 0.3 pm to allow exposure of 80-nm geometries based on the G41A.
Use of highly durable parts for each module to prolong the optical module life and further reduce the CoO (running cost per pulse):
Laser chamber: Use of highly durable parts for the electrodes.
Line-narrowing module, monitor module, etc.: Use of highly durable materials for the optics

Major Specification (*)
	G41A	G42A
Wavelength (nm)	193	193
Power (W)	20	20
Pulse Energy (mJ)	5	5
Max Repetition Rate(Hz)	4000	4000
Bandwidth(FWHM, pm)	0.35	0.3
Bandwidth§iE95, pm)	0.85	0.75
Energy Stability (DOSE, %)	0.3	0.3
Each of the above specification values is a typical value.
Durability (Expected Life)
	G41A	G42A
Laser Chamber (Bpls)	5	8
Line-Narrowing Module (Bpls)	6	8
Monitor Module(Bpls)	7	10
Front Mirror (BPls)	7	10