GT40A Main Features
1. An injection-locking laser
The GT40A is the industry’s first mass-production model to
use injection-locking technology*. This ensures highly stable emission
of a DUV beam with high output of 45 W and a spectral bandwidth
of 0.2 picometer (pm) for FWHM and 0.5 picometer for E95 — the
highest bandwidth level in the industry. It also provides lower
peak-pulse energy that reduces damages to the lithography tool
optics.
* Injection-locking technology injects a low-output laser beam
(master), which is emitted after bring tuned to an extremely narrow
spectral bandwidth, into a laser resonator (amplifier) that amplifies
it with laser resonation. This technology allows simultaneous maintenance
of a narrower spectral bandwidth and higher output, a combination
that is difficult to achieve with conventional technologies.
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2. The industry's lowest running cost
The injection-locking technology allows greater reduction of the
load upon the laser optics. Furthermore, the system configuration
has been refined to significantly reduce both the number of consumables
(modules) and their replacement frequency. As a result, the GT40A
can achieve the lowest running cost in the industry.
3. A highly reliable/operable design
The high reliability and high uptime essential to semiconductor
factories are achieved by introduction of a newly developed self-diagnosis
function and great improvement in the ease of module replacement
and serviceability. |
4-kHz
ArF Excimer Laser GT40A Series