

Injection-Lock ArF Excimer Laser GT62A Honored as “Excellent Product” at First Annual Laser Industry Award
Award Confirms that Gigaphoton is World No. 1 Supplier of Excimer Laser Light Sources for Semiconductor Industry
OYAMA, JAPAN, April 22, 2009 — Gigaphoton Inc., a major lithography light source manufacturer for the global semiconductor industry, today announced that Gigaphoton’s injection-lock ArF excimer laser was honored as an “Excellent Product” in the System & Equipment Division of the First Annual Laser Industry Award* at LASER EXPO 2009, held in the Pacifico Yokohama on April 22 through 24.
The ArF excimer laser is indispensable to the photolithography process for manufacturing semiconductor devices as a light source of lithography tools. Gigaphoton has been developing and marketing innovative and reliable laser excimer laser light sources for a long period of time. Today, Gigaphoton’s light sources are installed and running at the most advanced semiconductor fabs around the world. This “Excellent Product” award confirms that Gigaphoton is the world No. 1 supplier of excimer laser light sources, with its continuous R&D efforts and rich field experience.
“Semiconductor manufacturing technologies have progressed toward the next generation. We at Gigaphoton will keep on challenging as the world No. 1 supplier, based on our global seamless strategy in all product phases including R&D, manufacturing, marketing, and technical support, and will continue to focus on the market needs at the highest priority” said Dr. Hakaru Mizoguchi, director and chief technology officer (CTO) leading product development at Gigaphoton.
For the list of award winners (in Japanese), see the website of the Laser Society of Japan (http://wwwsoc.nii.ac.jp/lsj/).

Representatives of 6 Winners of the First Annual Laser Industry Award
(Dr. Yuji Watanabe, President, Gigaphoton, far right in first row)
* The Laser Industry Award, sponsored and selected by the Laser Society of Japan, aims at making a contribution to fostering, developing, and marketing new laser technologies. This award program acknowledges the products and applications recognized as greatly contributing to the development of the laser-related industries.

About Gigaphoton
Gigaphoton Inc. was founded in 2000 as a joint venture of Komatsu Ltd., the world’s No. 2 construction machinery manufacturer, and Ushio Inc., the world’s No. 1 lithography lamp manufacturer. Since then, Gigaphoton has been developing and marketing user-friendly, highly innovative laser light sources that make a great contribution to lithography technology so as to meet the stringent requirements of the ultra-fine circuit patterns of the gigabit era, and is delivering them to major lithography tool suppliers in the global semiconductor industry. As a world top-rated excimer laser light source manufacturer, Gigaphoton holds a strong position in Asian market, including Japan, while also continuing to enjoy rapid growth in the U.S. and European markets. More information about Gigaphoton can be found on the company’s website at http://www.gigaphoton.com.
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