G20K Series
2-kHz KrF Excimer Laser for 0.18 µm Design Rule

The G20K features high energy stability (±0.4%) and a narrow spectral bandwidth (FWHM) of 0.6 pm or less to allow exposure of 0.18-µm geometries at high resolution.

G20K Main Features

• Repetition rate increased from 1000 Hz (G10K) to 2000 Hz to achieve higher throughput.
• Great enhancement of laser emission stability and module durability allows further reduction of the CoO (running cost per pulse).
• Compact size that reduces the floor footprint by 14% compared with the G10K.
• A newly designed solid-state pulse power supply allows a 20% reduction of power consumption.

G21K Series
2-kHz KrF Excimer Laser for 0.13 µm Design Rule

G21K Main Features

• Further enhancement of the field-proven energy stability of the G20K.
• Ultra-narrow bandwidth of 0.5 pm (FWHM) achieved by improvement of the line-narrowing module to allow exposure of 0.13 µm geometries.

Major Specification (*)
	G20K	G21K
Wavelength (nm)	248	248
Power (W)	20	20
Pulse Energy (mJ)	10	10
Max Repetition Rate (Hz)	2000	2000
Bandwidth (FWHM, pm)	0.6	0.5
Bandwidth (E95, pm)	2.0	1.4
Energy Stability (DOSE, %)	0.4	0.35
Each of the above specification values is a typical value.
Durability (Expected Life)
Module Replacement Interval	G20K	G21K
Laser Chamber (Bpls)	12	12
Line-Narrowing Module (Bpls)	15	15
Monitor Module (Bpls)	15	15
Front Mirror (BPls)	15	15