G41K-H
4-kHz KrF Excimer Laser for 130-nm or below Technology Node

As the upgrade version of the second-generation model of 4-kHz excimer laser G41K, G41K-1H is mounted with a magnetic-levitation laser chamber and highly efficient line-narrowing and monitor modules on the G41K platform as standard features to achieve a high output of 40 W, one class higher than any other product. The G41K-1H has prolonged the life of each optical module to 30 billion pulses (50% longer than the G41K).
The G41K can be upgraded to the G41K-1H in the field by replacing the modules.

Main Features

• Higher output of 40 W/ultra-low CoO by further enhancing the emission efficiency of the G41K.
• On-site upgrade from the G41K is possible.
• Higher reliability proven by hundreds of laser units running in the field

Major Specification (*)
	G41K-1H
Wavelength (nm)	248
Power (W)	40
Pulse Energy (mJ)	10
Max Repetition Rate (Hz)	4000
Bandwidth (FWHM, pm)	0.5
Bandwidth (E95, pm)	1.4
Each of the above specification values is a typical value.
Durability (Expected Life) Module replacement interval
	G41K-1H
Laser Chamber (Bpls)	20
Line-Narrowing Module (Bpls)	30
Monitor Module(Bpls)	30
Front Mirror (BPls)	30