"REDeeM (Remote Equipment Data Management)" is a system that remotely monitors excimer laser units via the Internet. This tool allows inexpensive (low introduction and operating costs), easy (user-friendly), and safe (ensured security) sharing of information on the laser running status within each customer site, thus enabling us to better support laser maintenance management.

Conventionally, semiconductor device manufacturers use a closed management system that stores information (such as equipment data) within their site. REDeeM is a unique open monitoring system that manages such information through an off-site server (via the Internet).

How Users Can Benefit by Introducing REDeeM

For users who have adopted the REDeeM system, service response times have been dramatically reduced because information is shared in real time among the semiconductor manufacturer, lithography tool manufacturer, and field service and development engineers at Gigaphoton. In addition, for users who have a number of units installed, REDeeM reduces the equipment management burden upon their engineers by enabling easy and optimum management of the operation of multiple laser units, thus contributing to substantial cost reduction cost.

Three Benefits of REDeeM

Low Operating Cost

Since REDeeM uses the Internet, the cost of for communication is lower than for systems that use a leased line or VPN. Every laser unit of Gigaphoton is provided with an Internet connection as a standard feature, so no special hardware is required. (To install the REDeeM system, the user needs only a PC connected to the user LAN and a LAN cable/hub for connecting the PC and the laser unit.) In addition, REDeeM can be operated with a Web browser; no dedicated client software is required. Therefore, it can be easily upgraded or maintained.

Simple Operation

Since all reports are distributed over the Internet in HTML format, any PC connected to the Internet can be used to access these reports from anywhere via a Web browser.

Complete Security

HTTPS communication protocol is used, allowing encryption of the communication paths while at the same time eliminating security holes in the server unit. Because no server that permits access from the outside is installed on the laser unit side, introduction of the REDeeM system does not compromise the security level of the production line.

The REDeeM system consists of three units: a server unit that has central control over equipment data and applications, a laser unit that delivers equipment data to the server, and a client unit that monitors the equipment status.

Each of these three units is connected via the Internet. Use of the HTTPS communication protocol allows encryption of the communication paths and ensures data security.

< < REDeeM Portal Site > >

Note: To link to the REDeeM portal site, the user must conclude an agreement for use of REDeeM with Gigaphoton; an ID code will be issued to the user by Gigaphoton. For details, contact our Sales Division at +81-285-28-8420, or use the "Contact Us" form.