In the semiconductor industry, price competition has become more intense than ever. The reduction of the equipment running cost, therefore, is a critical challenge for our customers. We at Gigaphoton have been promoting a variety of activities to reduce the laser running cost, or the cost of operation (CoO), so that we can make a great contribution to enhancing the productivity of their fabs.

1. CoO Reduction Activities

1-1.　Classification of CoO
For effective reduction of the CoO, it needs to be quantified. At Gigaphoton, we have classified the CoO into the two categories: the cost generated by replacement of consumable parts (Cost of Consumables = CoC) and the cost caused by the downtime of a laser unit (Cost of Downtime = CoD).

Cost of Consumables = CoC
CoC is the cost generated at the replacement of consumable parts or components of the laser. Parts that are consumed as the laser continues to operate need to be replaced when they come to the end of their life; otherwise, the laser performance will deteriorate. Typical consumable components are the laser chamber and modules that incorporate optics.

Cost of Downtime = CoD
CoD is the cost indirectly generated by downtime of the laser that disables the scanner to process wafers. Formerly, the CoO of the laser was considered to be the CoC only. However, Gigaphoton has considered the CoD as a kind of CoO since its early days, and has tried to reduce the CoD through various approaches.

1-2.　Simulator for Estimating CoO
We at Gigaphoton have made a simulator that can estimate the laser running cost, or CoO (CoC + CoD). By entering the number of years subject to the estimate, laser usage, and laser parameters into the simulator, an estimate of the detailed CoO of the laser can be obtained. The simulator outputs the result that estimates the laser running cost, as shown in figure 1. The left side of the chart indicates the CoC; it projects the cost generated by replacement of the consumables of the laser by modules. The right side of the chart indicates the CoD; it projects the cost arising from downtime of the laser, by items. The cost including shown on the CoD side indicates the cost caused by downtime generated at the periodic replacement of each module.

Figure 1: CoO (CoC + CoD) Estimated by Simulator

1-3.　CoO（CoC + CoD）Reduction Roadmap
A better understanding of the detailed laser running cost, as output by the simulator, allows you to clearly identify which cost items should be targeted for effective cost reduction. We at Gigaphoton have created a CoO reduction roadmap that aims at 50% reduction of the CoO within 3 years, from 2007 to 2009, and have promoted CoO reduction activities according to this roadmap. Figure 2 shows the CoO reduction roadmap.

Reduction of both the CoC and CoD will result in 50% reduction of the CoO.

Figure 2: CoO Reduction Roadmap

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