4. Common Platform for Twin-Chamber System (GigaTwin Common Platform)
The platform for Gigaphoton's twin-chamber system is common to its four generations. From the first generation of twin-chamber system, the GT40A
(4 kHz/45 W/0.5 pm), through the fourth generation, the GT62A (6 kHz/90 W/0.35 pm), the required performance can be obtained simply by upgrading their major modules. Formerly, the platform of the excimer laser system had to be changed every time the repetition rate changed. This imposed a heavy burden on excimer laser manufacturers in terms of cost, time, and manpower for development. Users, meanwhile, needed to re-check reliability every time a new model was released and sometimes suffered initial failures associated with a new model. A twin-chamber system with a common platform, on the other hand, has several advantages: (1) only the major modules need to be developed for every new model, thus allowing timely and speedy new model releases; (2) the reliability achieved by the current model is inherited by the next-generation model; and (3) new technologies developed for the next-generation model can be smoothly introduced backwards into the current model. These advantages, specific to our twin-chamber system, are detailed as follows:
Figure 1. GTA Common Platform Configuration
Development of Major Modules
Module development is outlined as follows, identifying the new technologies introduced for each model:GT40A
Figure 2. Technologies Newly Developed for GT60A
Figure 3. Spectral Bandwidth Improvement by Introducing High-Resolution LNM
Figure 4. Durability of New Optics Checked by Accelerated Test
Two hundred ninety-eight units of the twin-chamber system (GT40A/GT60A) were operating in the field as of the 1st quarter of 2012. At present, the average uptime of these units is 99.7%, and they have made a great contribution to stabilized mass production. This high reliability is inherited by our latest models, GT61A and GT62A (90 W), so that they can be smoothly introduced to a mass-production environment immediately after installation.
Introduction of New Technologies to Current Models
The technologies developed for new models (to increase the life of each module and reduce down time) can be introduced to the current models. Therefore, even users of the current models are able to leverage these advantages.