GIGANEX Series

GIGANEX-LOGO (Photo)
GIGANEX-RED (Photo)

* This is a product concept image and is subject to change without notice.

A cutting edge excimer laser combining the Gigaphoton GT Series and new technology

We are convinced that GIGANEX, newly created by consolidating the technology and know-how acquired by Gigaphoton from manufacturing excimer lasers as semiconductor lithography light sources, and combining that technology and know-how with the technology of its customers, can also generate new innovations in fields other than semiconductor lithography as a high performance DUV light source.

Expected Fields of Application
FPD manufacturing processes, and flexible device manufacturing processes, Semiconductor manufacturing processes

High Output Excimer Lasers for Laser Annealing

Because the GIGANEX Series was designed on Gigaphoton’s GT platform and devised for maximum universality, it can be expected to be highly reliable. Also, it has inherited the high output and high oscillating frequency that are the characteristics of the GT Series and can be expected to realize designs that are even more suitable for laser annealing.

 

High Repetition Type Excimer Lasers

Main Specifications*1 450W Type 600W Type
Wavelength (nm) 193 248 351 193 248 351
Average Output (W) 450 450 450 600 600 600
Pulse Energy (mJ) 75 75 75 100 100 100
Repetition Frequency (Hz) 6,000 6,000 6,000 6,000 6,000 6,000
Pulse Width (ns) 40 – 100 40 – 100 40 – 100 40 – 100 40 – 100 40 – 100
Stability σ < 2% < 2% < 2% < 2% < 2% < 2%
Module Maintenance Period 450W Type 600W Type
Laser Chamber Replacement (Bpls) 60 60 60 60 60 60
Mirror Replacement (Bpls) 60 60 60 60 60 60
Other 450W Type 600W Type
Dimensions (mm) 2,800 x 825 x 2,120 (WxDxH) 2,800 x 825 x 2,120 (WxDxH)
Weight (kg) 3,410 3,410
Product Demo in preparation*2 2017*3
Release Schedule 2017*3 2018*3

 

High Output-Low Repetition Type Lasers

Main Specifications*1 600W Type
Wavelength (nm) 193 248 308 351
Average Output (W) 600 600 600 600
Pulse Energy (mJ) 1000 1000 1000 1000
Repetition Frequency (Hz) 600 600 600 600
Pulse Width (ns) 15 – 20 15 – 20 15 – 20 15 – 20
Stability σ < 2% < 2% < 2% < 2%
Module Maintenance Period 600W Type
Laser Chamber Replacement (Bpls) 6 6 6 6
Mirror Replacement (Bpls) 6 6 6 6
Other 600W Type
Dimensions (mm) 2,800 x 825 x 2,120 (WxDxH)
Weight (kg) 3,510
Product Demo TBA
Release Schedule TBA

 


  1. Please be aware that the main specifications may be changed without prior notice at the company’s discretion.
  2. If you are interested, please contact a representative of Gigaphoton.
  3. Please be aware that this may change due to market demand or at the company’s discretion.