We will hold a private seminar on "Challenges in High-End Lithography and Solutions from the Light Source" at SEMICON Japan 2011. Leading engineer from the world's major semiconductor device manufacturer will make a presentation on the leading edge of lithography technologies as well as the Gigaphoton's solutions in technologies and products.

When:	15:00 - 17:15, December 9 (Fri.), 2011 (followed by a dinner party)
Where:	“Makuhari Hall”, Tokyo Bay Makuhari
Seminar:	“Challenges in High-End Lithography and Solutions from the Light Source”

 

Agenda (simultaneous interpretation will be provided)
15:00-15:15	“Opening Remarks” by Dr. Yuji Watanabe, President and CEO, Gigaphoton Inc.
15:15-15:45	Updates of Lithography Technologies Dr. Tatsuhiko Higashiki Senior Manager Advanced Lithography Process Technology Dpt. Device Process Development Center Corporate Research & Development Center Toshiba Corporation
15:45-16:15	Current Status for NXE EUV Scanners and Expectation to Source Suppliers Mr. Kenji Morisaki Director, Technical Marketing ASML Japan Co., Ltd.
16:15-16:45	EUV Lithography Development Status Mr. YoonSuk Hyun Senior Engineer, Research & Development Division DRAM Process AP Team HYNIX Semiconductor Inc.
16:45-17:15	Gigaphoton: Update and Roadmap of LPP EUV Light Source Development Dr. Akira Sumitani Deputy General Manager, Business Promotion Division Gigaphoton Inc.
17:15 -	Dinner Party

Seminar Contact
Masahiko Hasegawa, Sales Division, Gigaphoton Inc.
TEL: +81-285-28-8415, FAX: +81-285-28-8439
E-mail:masahiko_hasegawa@gigaphoton.com