Gigaphoton Seminar

We will hold a private seminar on "Challenges in High-End Lithography and Solutions from the Light Source" at SEMICON Japan 2011. Leading engineer from the world's major semiconductor device manufacturer will make a presentation on the leading edge of lithography technologies as well as the Gigaphoton's solutions in technologies and products.

When: 15:00 - 17:15, December 9 (Fri.), 2011 (followed by a dinner party)
Where: “Makuhari Hall”, Tokyo Bay Makuhari
Seminar: “Challenges in High-End Lithography and Solutions from the Light Source”


Agenda (simultaneous interpretation will be provided)
15:00-15:15 “Opening Remarks” by Dr. Yuji Watanabe, President and CEO, Gigaphoton Inc.
15:15-15:45 Updates of Lithography Technologies
Dr. Tatsuhiko Higashiki
Senior Manager
Advanced Lithography Process Technology Dpt.
Device Process Development Center
Corporate Research & Development Center
Toshiba Corporation
15:45-16:15 Current Status for NXE EUV Scanners and Expectation to Source Suppliers
Mr. Kenji Morisaki
Director, Technical Marketing
ASML Japan Co., Ltd.
16:15-16:45 EUV Lithography Development Status
Mr. YoonSuk Hyun
Senior Engineer, Research & Development Division
DRAM Process AP Team
HYNIX Semiconductor Inc.
16:45-17:15 Gigaphoton: Update and Roadmap of LPP EUV Light Source Development
Dr. Akira Sumitani
Deputy General Manager, Business Promotion Division
Gigaphoton Inc.
17:15 - Dinner Party

Seminar Contact
Masahiko Hasegawa, Sales Division, Gigaphoton Inc.
TEL: +81-285-28-8415, FAX: +81-285-28-8439