We will hold a private seminar on "Challenges in High-End Lithography and Solutions from the Light Source" at SEMICON Japan 2011. Leading engineer from the world's major semiconductor device manufacturer will make a presentation on the leading edge of lithography technologies as well as the Gigaphoton's solutions in technologies and products.
When: | 15:00 - 17:15, December 9 (Fri.), 2011 (followed by a dinner party) |
Where: | “Makuhari Hall”, Tokyo Bay Makuhari |
Seminar: | “Challenges in High-End Lithography and Solutions from the Light Source” |
Agenda (simultaneous interpretation will be provided) | ||
15:00-15:15 | “Opening Remarks” by Dr. Yuji Watanabe, President and CEO, Gigaphoton Inc. | |
15:15-15:45 | Updates of Lithography Technologies Dr. Tatsuhiko Higashiki Senior Manager Advanced Lithography Process Technology Dpt. Device Process Development Center Corporate Research & Development Center Toshiba Corporation |
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15:45-16:15 | Current Status for NXE EUV Scanners and Expectation to Source Suppliers Mr. Kenji Morisaki Director, Technical Marketing ASML Japan Co., Ltd. |
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16:15-16:45 | EUV Lithography Development Status Mr. YoonSuk Hyun Senior Engineer, Research & Development Division DRAM Process AP Team HYNIX Semiconductor Inc. |
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16:45-17:15 | Gigaphoton: Update and Roadmap of LPP EUV Light Source Development Dr. Akira Sumitani Deputy General Manager, Business Promotion Division Gigaphoton Inc. |
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17:15 - | Dinner Party |
Seminar Contact
Masahiko Hasegawa, Sales Division, Gigaphoton Inc.
TEL: +81-285-28-8415, FAX: +81-285-28-8439
E-mail:masahiko_hasegawa@gigaphoton.com