We will hold a private seminar on “Challenges in High-End Lithography and Solutions from the Light Source” along with our exhibit at Semicon Japan 2007. Leading engineer from the world's major semiconductor device manufacturer will make a presentation on the leading edge of lithography technologies as well as the Gigaphoton’s solutions in technologies and products.

When:	15:00 - 17:00, December 7 (Fri.), 2007 (followed by a dinner party)
Where:	“Makuhari Hall”, Tokyo Bay Makuhari
Seminar:	“Challenges in High-End Lithography and Solutions from the Light Source”

 

Agenda (simultaneous interpretation will be provided)
15:00-15:15	“Opening Remarks” by Dr. Yuji Watanabe, Representative Director and President, Gigaphoton Inc.
15:15-15:45	Toshiba’s Lithography Strategy and its Requirements for Light Source Dr. Tatsuhiko Higashiki Senior Manager Advance ULSI Process Engineering Dept. II Process & Manufacturing Engineering Center Toshiba Corporation Semiconductor Company
15:45-16:15	Current Status of EUV Lithography Dr Goo, Doohoon Senior Engineer, Semiconductor Business Samsung Electronics Co., Ltd
16:15-16:40	EUV Light Source Development with focus on LPP Dr. Akira Sumitani General Research Manager Light Source Laboratory EUVA
16:40-17:00	Gigaphoton DUV Laser Roadmap Hirotoshi Inoue Marketing Division Gigaphoton Inc.
17:00 -	Dinner Party

Seminar Contact
Yutatsu Matsui, Sales Division, Gigaphoton Inc.,
TEL: +81-285-28-8415, FAX: +81-285-28-8439