Gigaphoton Seminar

We will hold a private seminar on “Challenges in High-End Lithography and Solutions from the Light Source” along with our exhibit at Semicon Japan 2007. Leading engineer from the world's major semiconductor device manufacturer will make a presentation on the leading edge of lithography technologies as well as the Gigaphoton’s solutions in technologies and products.

When: 15:00 - 17:00, December 7 (Fri.), 2007 (followed by a dinner party)
Where: “Makuhari Hall”, Tokyo Bay Makuhari
Seminar: “Challenges in High-End Lithography and Solutions from the Light Source”


Agenda (simultaneous interpretation will be provided)
15:00-15:15 “Opening Remarks” by Dr. Yuji Watanabe, Representative Director and President, Gigaphoton Inc.
15:15-15:45 Toshiba’s Lithography Strategy and its Requirements for Light Source
Dr. Tatsuhiko Higashiki
Senior Manager
Advance ULSI Process Engineering Dept. II
Process & Manufacturing Engineering Center
Toshiba Corporation Semiconductor Company
15:45-16:15 Current Status of EUV Lithography
Dr Goo, Doohoon
Senior Engineer, Semiconductor Business
Samsung Electronics Co., Ltd
16:15-16:40 EUV Light Source Development with focus on LPP
Dr. Akira Sumitani
General Research Manager
Light Source Laboratory
16:40-17:00 Gigaphoton DUV Laser Roadmap
Hirotoshi Inoue
Marketing Division
Gigaphoton Inc.
17:00 - Dinner Party

Seminar Contact
Yutatsu Matsui, Sales Division, Gigaphoton Inc.,
TEL: +81-285-28-8415, FAX: +81-285-28-8439