We will hold a private seminar on “Challenges in High-End Lithography and Solutions from the Light Source” along with our exhibit at Semicon Japan 2007. Leading engineer from the world's major semiconductor device manufacturer will make a presentation on the leading edge of lithography technologies as well as the Gigaphoton’s solutions in technologies and products.
When: | 15:00 - 17:00, December 7 (Fri.), 2007 (followed by a dinner party) |
Where: | “Makuhari Hall”, Tokyo Bay Makuhari |
Seminar: | “Challenges in High-End Lithography and Solutions from the Light Source” |
Agenda (simultaneous interpretation will be provided) | |
15:00-15:15 | “Opening Remarks” by Dr. Yuji Watanabe, Representative Director and President, Gigaphoton Inc. |
15:15-15:45 | Toshiba’s Lithography Strategy and its Requirements for Light Source Dr. Tatsuhiko Higashiki Senior Manager Advance ULSI Process Engineering Dept. II Process & Manufacturing Engineering Center Toshiba Corporation Semiconductor Company |
15:45-16:15 | Current Status of EUV Lithography Dr Goo, Doohoon Senior Engineer, Semiconductor Business Samsung Electronics Co., Ltd |
16:15-16:40 | EUV Light Source Development with focus on LPP Dr. Akira Sumitani General Research Manager Light Source Laboratory EUVA |
16:40-17:00 | Gigaphoton DUV Laser Roadmap Hirotoshi Inoue Marketing Division Gigaphoton Inc. |
17:00 - | Dinner Party |
Seminar Contact
Yutatsu Matsui, Sales Division, Gigaphoton Inc.,
TEL: +81-285-28-8415, FAX: +81-285-28-8439