Gigaphoton Seminar

We will hold a private seminar on “Challenges in High-End Lithography and Solutions from the Light Source” along with our exhibit at Semicon Japan 2006. Leading engineer from the world's major semiconductor device manufacturer will make a presentation on the leading edge of lithography technologies as well as the Gigaphoton’s solutions in technologies and products.


When: 15:00 - 17:00, December 8 (Thu.), 2006 (followed by a dinner party)
Where: “Makuhari Hall”, Tokyo Bay Makuhari
Seminar: “Challenges in High-End Lithography and Solutions from the Light Source”


Agenda (simultaneous interpretation will be provided)
15:00-15:20 “Opening Remarks” by Dr. Yuji Watanabe, Representative Director and President, Gigaphoton Inc.
15:20-15:50 “View Towards 32-nm Lithography” by Dr. SHIN JAN GHO, Senior Engineer, Memory Division Fab Process Development Team, Semiconductor Business, Samsung Electronics Co., Ltd.
15:50-16:15 “Latest ArF Laser Technology and Product Roadmap” by Dr. Hakaru Mizoguchi, Director, Gigaphoton Inc.
16:15-16:40 “Present Status of EUV Light Sources” by Akira Sumitani, Head of EUVA Light Source Laboratory
16:40-16:55 “Laser Downtime Reduction For More Fab Output” by Kenji Takahisa, Marketing Division, Gigaphoton Inc.
17:00 - Dinner Party

Seminar Contact
Yutatsu Matsui, Sales Division, Gigaphoton Inc.,
TEL: +81-285-28-8415, FAX: +81-285-28-8439