Gigaphoton Seminar

We will hold a private seminar on “Challenges in High-End Lithography and Solutions from the Light Source” along with our exhibit at Semicon Japan 2005. Leading engineers from the world’s major semiconductor device manufacturers will make presentations on the leading edge of lithography technologies.

 

When: 15:00 – 17:00, December 8 (Thu.), 2005 (followed by a dinner party)
Where: “Prince Hall 2F”, Makuhari Prince Hotel
Seminar: “Challenges in High-End Lithography and Solutions from the Light Source”

 

Agenda (simultaneous interpretation will be provided)
15:00-15:20 “Opening Remarks” by Dr. Yuji Watanabe, Representative Director and President, Gigaphoton Inc.
15:20-15:50 “Hurdles in Low K Mass Production” by a guest speaker.
15:50-16:20 “Challenges toward 45 nm Lithography” by a guest speaker.
16:20-16:50 “Future of the High-Power & -Frequency ArF Laser and EUV Light Source” by Dr. Hakaru Mizoguchi, Director, Gigaphoton Inc.
17:00 - Dinner Party

Seminar Contact
Yutatsu Matsui, Sales Division I, Sales Division, Gigaphoton Inc.,
TEL: 0285-28-8415, FAX: 0285-28-8439