4-kHz ArF Excimer Laser for Design Rules of up to 0.10 µm


Main Features

  • Mounted with a newly designed solid-state pulse power supply that allows a repetition rate of 4000 Hz so as to achieve high throughput
  • High-reliability design inherited from our field-proven KrF excimer laser G10K/20K series

Major Specifications*

Wavelength 193 nm
Average Output 20 W
Pulse Energy 5.0 mj
Repetition Rate 4,000 Hz
Bandwidth (FWHM) 0.35 pm
Bandwidth (E95) 0.85 pm
(*) Each of the above specification values represents a typical value