2 kHz KrF Excimer Laser for 0.13 µm Design Rule


Main Features

  • Further enhancement of the field-proven energy stability of the G20K
  • Ultra-narrow bandwidth of 0.5 pm (FWHM) achieved by improvement of the line-narrowing module to allow exposure of 0.13 µm geometries

Main Specification*

Wavelength 248 nm
Average Output 20 W
Pulse Energy 10.0 mj
Repetition Rate 2,000 Hz
Bandwidth (FWHM) 0.6 pm
Bandwidth (E95) 1.4 pm
Energy Dose Stability 0.35 %
(*) Each of the above specification values represents a typical value