* This is a product concept image and is subject to change without notice.
A cutting edge excimer laser combining the Gigaphoton GT Series and new technology
We are convinced that GIGANEX, newly created by consolidating the technology and know-how acquired by Gigaphoton from manufacturing excimer lasers as semiconductor lithography light sources, and combining that technology and know-how with the technology of its customers, can also generate new innovations in fields other than semiconductor lithography as a high performance DUV light source.
Expected Fields of Application
FPD manufacturing processes, and flexible device manufacturing processes, Semiconductor manufacturing processes
High Output Excimer Lasers for Laser Annealing
Because the GIGANEX Series was designed on Gigaphoton’s GT platform and devised for maximum universality, it can be expected to be highly reliable. Also, it has inherited the high output and high oscillating frequency that are the characteristics of the GT Series and can be expected to realize designs that are even more suitable for laser annealing.
■ High Repetition Type Excimer Lasers
| Major Specifications*1 | 450W Type | 600W Type | ||||
|---|---|---|---|---|---|---|
| Wavelength (nm) | 193 | 248 | 351 | 193 | 248 | 351 |
| Average Output (W) | 450 | 450 | 450 | 600 | 600 | 600 |
| Pulse Energy (mJ) | 75 | 75 | 75 | 100 | 100 | 100 |
| Repetition Frequency (Hz) | 6,000 | 6,000 | 6,000 | 6,000 | 6,000 | 6,000 |
| Pulse Width (ns) | 40 - 100 | 40 - 100 | 40 - 100 | 40 - 100 | 40 - 100 | 40 - 100 |
| Stability σ | < 2% | < 2% | < 2% | < 2% | < 2% | < 2% |
| Module Maintenance Period | 450W Type | 600W Type | ||||
|---|---|---|---|---|---|---|
| Laser Chamber Replacement (Bpls) | 60 | 60 | 60 | 60 | 60 | 60 |
| Mirror Replacement (Bpls) | 60 | 60 | 60 | 60 | 60 | 60 |
| Other | 450W Type | 600W Type | ||||
|---|---|---|---|---|---|---|
| Dimensions (mm) | 2,800 x 825 x 2,120 (WxDxH) | 2,800 x 825 x 2,120 (WxDxH) | ||||
| Weight (kg) | 3,410 | 3,410 | ||||
| Product Demo | in preparation*2 | 2017*3 | ||||
| Release Schedule | 2017*3 | 2018*3 | ||||
■ High Output-Low Repetition Type Lasers
| Major Specifications*1 | 600W Type | |||
|---|---|---|---|---|
| Wavelength (nm) | 193 | 248 | 308 | 351 |
| Average Output (W) | 600 | 600 | 600 | 600 |
| Pulse Energy (mJ) | 1000 | 1000 | 1000 | 1000 |
| Repetition Frequency (Hz) | 600 | 600 | 600 | 600 |
| Pulse Width (ns) | 15 - 20 | 15 - 20 | 15 - 20 | 15 - 20 |
| Stability σ | < 2% | < 2% | < 2% | < 2% |
| Module Maintenance Period | 600W Type | |||
|---|---|---|---|---|
| Laser Chamber Replacement (Bpls) | 6 | 6 | 6 | 6 |
| Mirror Replacement (Bpls) | 6 | 6 | 6 | 6 |
| Other | 600W Type | |||
|---|---|---|---|---|
| Dimensions (mm) | 2,800 x 825 x 2,120 (WxDxH) | |||
| Weight (kg) | 3,510 | |||
| Product Demo | TBA | |||
| Release Schedule | TBA | |||
- Please be aware that the main specifications may be changed without prior notice at the company’s discretion.
- If you are interested, please contact a representative of Gigaphoton.
- Please be aware that this may change due to market demand or at the company’s discretion.