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Achieved stable 15W EUV output on prototype system– marking another critical step forward toward achieving high power LPP light sources for EUV lithography OYAMA, JAPAN; September 30, 2013 — Gigaphoton, Inc. a major lithography light source manufacturer, announced today that the company has jointly developed a high power CO2 drive laser for Extreme Ultraviolet (EUV) [...]
President and CEO Hitoshi Tomaru [Q] How does Gigaphoton needs to evolve going forward? Until now we have been focused entirely on light sources for lithography systems. This is because the industry itself was also focused on these products and so the market dynamics were quite simple and easy to follow. The thing about semiconductor [...]
What is EcoPhoton
Gigaphoton has executed programs for reducing cost of operation (CoO) since 2007. Through the development of longer life consumables, gas modules with less refill requirements, and minimization of downtime, we have been able to reduce the overall cost of operation for our customers.