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2021/8/19



On August 19, to avoid the spread of the new coronavirus throughout the country, the Japanese government has extended the declaration of a state of emergency to 13 prefectures (from August 20 to September 12), including Tochigi Prefecture, where Gigaphoton&#8217;s headquarters are located.



We request our customers and suppliers to refrain from visiting our company’s headquarters as much as possible. If a visit is unavoidable, please make an appointment with our contact person and note that you will be asked to fill out a &#8220;Prior Confirmation&#8221; form.



For information about visiting our offices outside of Japan, please contact our overseas offices listed at the end.



＜Our countermeasures against new coronavirus infection&gt;



<ol class="wp-block-list"><li>Mandatory handwashing and mask wearing</li><li>Employee temperature check every morning</li><li>Distribution of the New Coronavirus Infection Response and Employee Behavior Manual</li><li>Prohibition of unnecessary business trips, both domestic and overseas, except for service support.</li><li>Telecommuting for all employees who can work from remote locations</li><li>Recommendation of online meetings with customers and suppliers.</li></ol>



*If you have any questions, please contact us at the contact information below.



We offer our deepest condolences to those who have died due to the Coronavirus (COVID-19) and wish a speedy recovery of infected people and sincerely hope that the infection will be contained soon



GIGAPHOTON INC. President and CEO Katsumi Uranaka



<figure class="wp-block-table is-style-regular"><table><tbody><tr><td>Media inquiries Corporate Planning Department Kenji Takahisa:&nbsp;web_info@gigaphoton.com For inquiries regarding supply chain Purchasing Section, Production Department Hidenobu Kameda:&nbsp;hidenobu_kameda@gigaphoton.com Rika Shimizu:&nbsp;rika_shimizu@gigaphoton.com For inquiries regarding service support and distribution Customer Support Department (Japan) Takayuki Mizokami:&nbsp;takayuki_mizokami@gigaphoton.com (Overseas) Kenny Oka:&nbsp;kenji_oka@gigaphoton.com For inquiries regarding business discussions Sales Department Kiyotaka Uchida:&nbsp;kiyotaka_uchida@gigapoton.com For other inquiries Administration Department Mayumi Nakamura Overseas Offices Contact InformationGigaphoton Korea 史承學 (Seung Hak, Sa): sh_sa@gigaphoton.com Gigaphoton Taiwan Eiji Miyamoto: eiji_miyamoto@gigaphoton.com Limei Cheng: limei_cheng@gigaphoton.com Gigaphoton China Tetsuya Ogawa: tetsuya_ogawa@komatsu.com.cn 何胜杰:&nbsp;heshengjie@komatsu.com.cn Singapore Branch Jason Lim:&nbsp;Jason_lim@gigaphoton.com Gigaphoton USA Dennis Smith:&nbsp;dennis.s@gigaphotonusa.com James Graves:&nbsp;james.g@gigaphotonusa.com Gigaphoton Europe Erik de Bekker: GPE_inquiry@gigaphoton.com</td></tr></tbody></table></figure>

The Impact of the Japanese Government’s Declaration of a State of Emergency (7th Report)

Gigaphoton has been selected by the Ministry of Economy, Trade and Industry (METI) as as one of the assignee for the project &#8220;Research and Development of Enhanced Infrastructures for Post 5G Information and Communications Systems&#8221; and was introduced on the Ministry&#8217;s website.
Please take a look.
Gigaphoton&#8217;s development themes are listed in the following ” 3. Adoption results “
(two PDF files).
<a href="https://www.meti.go.jp/english/press/2021/0616_001.html">Click here for the link.</a>

Gigaphoton has been selected by METI asone of the assignee for the project “Research and Development of Enhanced Infrastructures for Post 5G Information and Communications Systems”.

Gigaphoton has won The Best Supplier in WFE Subsystems Award from VLSI Research, Inc. and has been introduced on their website.
Please take a look.
<a href="https://www.vlsiresearch.com/gigaphoton-honored-with-first-the-best-award-PFEL1SE1000WJOJ#page1">Click here for the link.</a>

Gigaphoton has won The Best Supplier in WFE Subsystems Award from VLSI Research, Inc.

Gigaphoton will present the following papers at the &#8220;<a href="https://spie.org/search?term=gigaphoton&amp;pageSize=25&amp;pagesVisited=1&amp;sortBy=Relevance&amp;eventName=Advanced_Lithography">SPIE Advanced Lithography 2021</a>&#8221; digital forum, to be held on February 22 (Sun.) through 26 (Thu.) 2021.
This conference is one of the largest event of advanced lithography for semiconductor manufacturing.
Gigaphoton presents following 8 papers discussing advanced lightsource technology which improves yield and availability for semiconductor manufacturing.
 
<ul>
<li>Oral Presentation</li>
</ul>
February 25, 2021 • 10:50 AM PST | Session 11: EUV Source [Extreme Ultraviolet (EUV) Lithography XII] 
Update of &gt;300W High Power LPP-EUV Source Challenge III for Semiconductor HVM                 
Author: Hakaru Mizoguchi; Gigaphoton Inc. (Japan) 
[Paper#: 11609-48]
February 24, 2021 • 9:40 AM PST | Session 4: Lithography Equipment and New Applications [Optical Lithography XXXIV] 
Latest ArF light source with speckle reduction technology for immersion lithography improving chip yield               
Author: Hirotaka Miyamoto; Gigaphoton Inc. (Japan) 
[Paper#: 11613-11]
February 25, 2021 • 8:50 AM PST | Session 8: Novel Optical and ebeam/ion [Novel Patterning Technologies 2021] 
Processability of organic material for semiconductor packaging by 248 nm excimer laser               
Author: Akira Suwa; Gigaphoton Inc. (Japan) 
[Paper#: 11610-27]
<ul>
<li>Poster Presentation</li>
</ul>
February 24, 2021 • 5:30 PM PST | Poster Session [Optical Lithography XXXIV] 
ArF lightsource “GT66A” for next-generation immersion lithography enhancing EPE and CD performance                
Author: Tommy Oga; Gigaphoton Inc. (Japan) 
[Paper#: 11613-30]
February 24, 2021 • 5:30 PM PST | Poster Session [Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV] 
Study of further CD and OL performance improvement by introducing new E95% spectral bandwidth and Wavelength functionality for ArFi lithography lightsource              
Author: Tommy Oga; Gigaphoton Inc. (Japan) 
[Paper#: 11611-92]
February 24, 2021 • 5:30 PM PST | Poster Session [Optical Lithography XXXIV] 
Advanced spectral engineering: A new way of process aware laser spectra optimization for optical lithography   
Author: Koichi Fujii; Gigaphoton Inc. (Japan) 
[Paper#: 11613-33]
February 24, 2021 • 5:30 PM PST | Poster Session [Optical Lithography XXXIV] 
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi Light source         
Author: Takehiko Tomonaga; Gigaphoton Inc. (Japan) 
[Paper#: 11613-29]
February 24, 2021 • 5:30 PM PST | Poster Session [Extreme Ultraviolet (EUV) Lithography XII] 
The development progress of the High Power LPP-EUV light source using a magnetic field 
Author: Hirokazu Hosoda; Gigaphoton Inc. (Japan) 
[Paper#: 11609-52]

Technical Papers in SPIE Advanced Lithography 2021

On January 13, in order to avoid the spread of the new coronavirus throughout the country, the Japanese government has extended the declaration of a state of emergency to seven prefectures (from 14 January to 7 February), including Tochigi Prefecture, where Gigaphoton&#8217;s headquarters are located.
We will continue to produce, supply equipment and parts to the customers, and provide service and support to the semiconductor fabs, as we are required by the authority to continue business even under the declared emergency situation. We will also continue to carefully check the production and supply capacity of our suppliers.
＜Our countermeasures against new coronavirus infection&gt;
<ol>
<li>Mandatory hand-washing and mask wearing</li>
<li>Employee temperature check every morning</li>
<li>Distribution of the New Coronavirus Infection Response and Employee Behavior Manual</li>
<li>Prohibition of unnecessary  business trips, both domestic and overseas, except for service support.</li>
<li>Telecommuting for all employees who are able to work from remote locations</li>
<li>Recommendation of online meetings with customers and suppliers.</li>
</ol>
*If you have any questions, please contact us at the contact information below.
We offer our deepest condolences to those who have died due to the Coronavirus (COVID-19) and wish a speedy recovery of infected people and sincerely hope that the infection will be contained soon
GIGAPHOTON INC. 
President and CEO
Katsumi Uranaka
<table width="662">
<tbody>
<tr>
<td width="662">Media inquiries 
Corporate Planning Department 
Kenji Takahisa: web_info@gigaphoton.com
For inquiries regarding supply chain 
Purchasing Section 
Production Department 
Hidenobu Kameda: hidenobu_kameda@gigaphoton.com 
Rika Shimizu: rika_shimizu@gigaphoton.com
For inquiries regarding service support and distribution 
Customer Support Department 
(Japan) Takayuki Mizokami: takayuki_mizokami@gigaphoton.com 
(Overseas) Kenny Oka: kenji_oka@gigaphoton.com
For inquiries regarding business discussions 
Sales Department 
Kiyotaka Uchida: kiyotaka_uchida@gigapoton.com
For other inquiries 
Administration Department 
Mayumi Nakamura
Overseas Offices Contact Information
Gigaphoton Korea 
史承學 (Seung Hak, Sa): sh_sa@gigaphoton.com
Gigaphoton Taiwan 
Eiji Miyamoto:  eiji_miyamoto@gigaphoton.com 
呉健賢: ken_wu@gigaphoton.com
Gigaphoton China 
Daisuke Satou: daisuke_satou@komatsu.com.cn 
何胜杰: heshengjie@komatsu.com.cn
Singapore Branch 
Jason Lim: Jason_lim@gigaphoton.com
Gigaphoton USA 
Dennis Smith  dennis.s@gigaphotonusa.com 
James Graves james.g@gigaphotonusa.com
Gigaphoton Europe 
Erik de Bekker  GPE_inquiry@gigaphoton.com</td>
</tr>
</tbody>
</table>

NewsNews

The Impact of the Japanese Government’s Declaration of a State of Emergency (7th Report)

Gigaphoton has been selected by METI asone of the assignee for the project “Research and Development of Enhanced Infrastructures for Post 5G Information and Communications Systems”.

Gigaphoton has won The Best Supplier in WFE Subsystems Award from VLSI Research, Inc.

Technical Papers in SPIE Advanced Lithography 2021

The Impact of the Japanese Government’s Declaration of a State of Emergency (6th Report)