Using New Route 4 (Route 4 Bypass) - From Tokyo/Fukushima direction
- Head towards Oyama City, Tochigi Prefecture. Turn west at the intersection onto New Route 50 (Odabayashi-nishi intersection).
- Continue straight for 1.6km, then turn south at the intersection with a sign of Komatsu and Gigaphoton.
Using Route 50 (Route 50 Bypass) - From Ibaraki direction
- After exiting the Kita-Kanto Expressway at 'Sakuragawa-Chikusei' interchange, head towards Oyama City, Tochigi Prefecture. Pass the intersection with New Route 4 and continue straight for about 1.6km.
- Turn south at the intersection with a sign of Komatsu and Gigaphoton.
Using Route 50 (Route 50 Bypass) - From Gunma/Nagano direction
- After exiting the Kita-Kanto Expressway at 'Sano-Fujioka' interchange, head towards Oyama City, Tochigi Prefecture. Continue to follow the overpass that goes over the Tohoku Shinkansen and Tohoku Main Line, then continue straight for about 2.1km.
- Turn south at the intersection with a sign of Komatsu and Gigaphoton.

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ArF Excimer Laser (193nm)