ArF Immersion

ArF Dry

Data Products

专访

事件

其他

奖项

新闻发布


<p>栃木县小山市；2025年3月7日，半导体光刻光源制造商<a href="https://www.gigaphoton.com/">Gigaphoton公司</a>（总部：栃木县小山市，董事长：榎波龙雄）参加于2025年3月26日（星期三）至3月28日（星期五）（当地时间）在中国上海市的上海新国际博览中心举办的“<a href="https://www.fpdchina.org/">FPD China 2025</a>”，该展会与SEMICON China 2025同期同地举行。</p>



<p>SEMICON China和FPD China是展示电子制造行业最新技术和解决方案的国际展览会。Gigaphoton将展示其半导体光刻用准分子激光机（DUV光源）。 我们期待您的光临。</p>



<figure class="wp-block-table"><table class="has-fixed-layout"><tbody><tr><td>展览会</td><td>FPD China 2025</td></tr><tr><td>网址</td><td><a href="https://www.fpdchina.org/">https://www.fpdchina.org/</a></td></tr><tr><td>举办时间</td><td>2025年3月26日至28日</td></tr><tr><td>地点</td><td>上海新国际博览中心</td></tr><tr><td>展位号</td><td>N1158</td></tr></tbody></table></figure>



<p>关于GIGAPHOTON</p>



<p>自2000年成立以来，GIGAPHOTON作为光源制造商，向全球半导体制造商提供有价值的解决方案。在研发、生产、销售和维护服务的各个阶段，GIGAPHOTON致力于从日常用户的角度提供世界一流的支持。如需更多信息，请访问&nbsp;<a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table class="has-fixed-layout"><tbody><tr><td>媒体联系窗口：<br>Gigaphoton公司<br>经营企划部<br>友永竹彦<br>电子邮件： <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


Gigaphoton将参加FPD China 2025展会


<p class="has-text-align-center">Presenting advanced Research at the premier conference on semiconductor technology</p>



<p>Oyama, Tochigi; February 13, 2025, <a href="https://gigaphoton.com/">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Tatsuo Enami), a manufacturer of lightsources for semiconductor lithography, will be participating in <a href="https://spie.org/conferences-and-exhibitions/advanced-lithography-and-patterning">SPIE Advanced Lithography + Patterning 2025</a>, which will take place in San Jose, California from Sunday, February 23 through 27, 2025 PST<a></a>.</p>



<p>Gigaphoton will present developments in next-generation ArF immersion lightsource driving yield improvements, Gigaphoton&#8217;s sustainability solution, and availability improvements with DUV lightsource technologies. In addition, Gigaphoton will provide updates on EUV lightsource technology for inspections and DUV technology for advanced packaging solutions.</p>



<p>* If you have any inquiries regarding the above presentation, please feel free to contact us.</p>



<p>Presentations:</p>



<figure class="wp-block-table"><table class="has-fixed-layout"><tbody><tr><td>1) <strong>Improved ArFi scanner throughput and process yield through a next generation DUV light source featuring high-repetition rate and enhanced speckle contrast</strong> [Paper#: 12953-6]</td></tr><tr><td>2) <strong>Enhancement on productivity and sustainability with the world’s first 6 kHz KrF lightsource G65K</strong> [Paper: 13424-61]</td></tr><tr><td>3) <strong>Improvement of LWR/LER in ArFi lithography by co-optimization of resist formulation and laser E95</strong> [Paper: 13424-79]</td></tr><tr><td>4) <strong>Challenges associated with increasing the excimer lightsource&#8217;s repetition rate above 7kHz to support scanner productivity </strong>[Paper: 13424-37]</td></tr><tr><td>5) <strong>Development of LPP-EUV light source for mask inspection systems</strong> [Paper: 13424-59]</td></tr><tr><td>6) <strong>Simultaneous multi-point glass processing using diffractive optical element and KrF excimer laser</strong> [Paper: 13424-55]</td></tr></tbody></table></figure>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table class="has-fixed-layout"><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Takehiko Tomonaga<br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>



<p></p>


Gigaphoton to Showcase Technology Solutions at SPIE Advanced Lithography + Patterning 2025


<p>Oyama, Tochigi; December 4, 2024, Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Tatsuo Enami), a manufacturer of lightsources for semiconductor lithography, announced that a press release in collaboration with NEDO (New Energy and Industrial Technology Development Organization) has been published on NEDO&#8217;s website.</p>



<p>Gigaphoton has participated in NEDO&#8217;s project, “Research and Development Project of the Enhanced Infrastructures for Post-5G Information and Communication Systems,&#8221; and the results of this collaboration have now been announced in a press release from NEDO.</p>



<p>The release is available on NEDO&#8217;s website. Please read it via the link below.<br><br><a href="https://www.nedo.go.jp/news/press/AA5_101796.html">https://www.nedo.go.jp/news/press/AA5_101796.html</a></p>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table class="has-fixed-layout"><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


NEDO Announced the Results of Its Post-5G Systems R&D Project, in Collaboration with Gigaphoton


<p>Oyama, Tochigi; November 8, 2024, Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Tatsuo Enami), a manufacturer of lightsources for semiconductor lithography, announced that the &#8220;G300K&#8221; micro via processing lightsource has been delivered to a Japanese equipment manufacturer, specialized in backend equipment manufacturing and the integrated system has been successfully installed at the facility of a company in the United States.</p>


<div class="wp-block-image">
<figure class="aligncenter size-large is-resized"><img loading="lazy" decoding="async" width="1024" height="576" src="https://webapi.gigaphoton.global/wp-content/uploads/2024/11/G300K-1-1024x576.jpg" alt="G300K, a KrF excimer laser for ultra-fine ablation processing" class="wp-image-9222" style="width:594px;height:auto" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2024/11/G300K-1-1024x576.jpg 1024w, https://webapi.gigaphoton.global/wp-content/uploads/2024/11/G300K-1-300x169.jpg 300w, https://webapi.gigaphoton.global/wp-content/uploads/2024/11/G300K-1-768x432.jpg 768w, https://webapi.gigaphoton.global/wp-content/uploads/2024/11/G300K-1-1536x864.jpg 1536w, https://webapi.gigaphoton.global/wp-content/uploads/2024/11/G300K-1.jpg 1986w" sizes="auto, (max-width: 1024px) 100vw, 1024px" /></figure></div>


<p class="has-text-align-center">G300K, a KrF excimer laser for ultra-fine ablation processing</p>



<p>Gigaphoton has applied its expertise in semiconductor lithography lightsources to develop a lightsource for ultra-fine ablation processing for advanced packaging processes.</p>



<p>The G300K, is an excimer laser based on KrF (248nm) wavelength, which is integrated into the processing equipment for semiconductor package substrates. It provides high power, high repetition rate, high reliability with long life modules. The excimer laser is primarily used in the process of creating micro-via holes with a diameter of 10μm or less, as well as trench patterns. It is expected to be adopted for the manufacturing of 2.5D/3D packages utilizing chiplets, which are projected to increase primarily used for AI chipsets.</p>



<p>Tatsuo Enami, President and CEO of Gigaphoton said, &#8220;In Gigaphoton, alongside our research and development of lightsources for semiconductor lithography, we have also been exploring various possibilities for the application of excimer lasers in other fields.<br>We will continue to accelerate our research and development efforts to expand into new areas.<br>As a critical lightsource manufacturer in the semiconductor manufacturing industry, we will continue to contribute to the industry through continuous research and development on new processes to facilitate the further implementation of excimer lasers.&#8221;</p>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table class="has-fixed-layout"><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br><br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


Gigaphoton Delivers Excimer Laser to the United States for Micro Via Processing


<p>Oyama, Tochigi; September 30, 2024, <a href="https://www.gigaphoton.com/" data-type="link" data-id="https://www.gigaphoton.com/">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Tatsuo Enami), a manufacturer of lightsources for semiconductor lithography, exhibits to <a href="https://www.semiconjapan.org/jp/apcs" data-type="link" data-id="https://www.semiconjapan.org/jp/apcs">APCS (Advanced Packaging and Chiplet Summit) 2024</a>, held in Tokyo Big Sight, Tokyo, Japan from Wednesday, December 11 through Friday, December 13, 2024 JST.</p>



<p>Gigaphoton will introduce its advanced ablation processing products, including the latest test results.</p>



<p>We would like to welcome your visit.</p>



<figure class="wp-block-table"><table class="has-fixed-layout"><tbody><tr><td>Exhibition</td><td>Advanced Packaging and Chiplet Summit 2024</td></tr><tr><td>HP Address</td><td><a href="https://www.semiconjapan.org/en/apcs">https://www.semiconjapan.org/en/apcs</a></td></tr><tr><td>Holding Period</td><td>from December 11 through 13</td></tr><tr><td>Place</td><td>Tokyo Big Sight</td></tr><tr><td>Booth No.</td><td>2555</td></tr></tbody></table></figure>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table class="has-fixed-layout"><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br><br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>



<p></p>


Gigaphoton exhibits to Advanced Packaging and Chiplet Summit 2024


<p class="has-text-align-center">Kyushu office expansion to further strengthen its customer support</p>



<p>Oyama, Tochigi; July 3, 2024, <a href="https://gigaphoton.com/">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Tatsuo Enami), a manufacturer of lightsources for semiconductor lithography, announced that it has decided to relocate their Kyushu office to enhance its support capacity. Today, a groundbreaking ceremony was held.</p>


<div class="wp-block-image">
<figure class="aligncenter size-full"><img loading="lazy" decoding="async" width="680" height="326" src="https://webapi.gigaphoton.global/wp-content/uploads/2024/06/image-3.png" alt="" class="wp-image-9123" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2024/06/image-3.png 680w, https://webapi.gigaphoton.global/wp-content/uploads/2024/06/image-3-300x144.png 300w" sizes="auto, (max-width: 680px) 100vw, 680px" /></figure></div>


<p class="has-text-align-center">mage of new Kyusyu office</p>



<p>Gigaphoton has been providing support to customers in Kyushu area since opening a support office in 2000. In response to the growing investments in the semiconductor industry in Kyushu area, Gigaphoton has decided to expand its Kyushu office to ensure even more reliable support.</p>



<p>Upon completion of this new office, the support capacity in the area will expand to approximately three times its current capacity. The new Kyushu office will be a two-story building with a total floor area of 1,112.66 square meters and is scheduled to be completed in June 2025.</p>



<p>Tatsuo Enami, President and CEO of Gigaphoton said, &#8220;Gigaphoton is committed to establishing a more prompt and accurate support system for our customers as the semiconductor industry continues to grow. This year, we have opened offices in several areas such as the U.S. (Arizona) and China (Qingdao) to enhance our support system in anticipation of increased operational demands. Gigaphoton will continue to contribute to the growth of the semiconductor industry by providing highly reliable field services.&#8221;</p>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br><br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


Gigaphoton Triples its Customer Support Capacity in Kyushu


<p class="has-text-align-center">Certified to the highest rank with a score of 200.0</p>



<p>Oyama, Tochigi; June 17, 2024, <a href="https://gigaphoton.com/">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Tatsuo Enami), a manufacturer of lightsources for semiconductor lithography, announced that Gigaphoton completed the RBA* Validated Assessment Program, achieving PLATINUM Status.</p>


<div class="wp-block-image">
<figure class="aligncenter size-full"><img loading="lazy" decoding="async" width="531" height="396" src="https://webapi.gigaphoton.global/wp-content/uploads/2024/06/image-1.png" alt="" class="wp-image-9084" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2024/06/image-1.png 531w, https://webapi.gigaphoton.global/wp-content/uploads/2024/06/image-1-300x224.png 300w" sizes="auto, (max-width: 531px) 100vw, 531px" /></figure></div>


<p><a href="https://www.responsiblebusiness.org/vap/about-vap/">The RBA Validated Assessment Program (VAP)</a> is the leading standard for onsite compliance verification and effective, shareable assessments conducted by independent, third-party firms.</p>



<p>Gigaphoton completed the RBA VAP, achieving PLATINUM Status closing all Priority, Major and minor findings, earning a score of 200.0. This result objectively demonstrates that Gigaphoton meets higher standards in terms of labor, safety and health, environment, ethics, and management systems.</p>



<p>Tatsuo Enami, President and CEO of Gigaphoton said, &#8220;We are proud to have achieved PLATINUM Status in the RBA VAP. Gigaphoton will continue to ensure its supply responsibility to the semiconductor industry by promoting ESG management throughout the entire supply chain and strengthening our corporate structure.&#8221;</p>



<p><sub>*RBA &#8211; The Responsible Business Alliance (RBA) is the world’s largest industry coalition dedicated to responsible business conduct in global supply chains</sub></p>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br><br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


Gigaphoton achieves PLATINUM Status of RBA VAP


<p>We extend our deepest condolences for the loss of lives caused by the earthquake that occurred at the east coast of Taiwan on April 3<sup>rd</sup>, 2024. We also express our heartfelt sympathies to all those who have been affected by this disaster. We pray for a swift recovery and reconstruction.</p>



<p>Regarding the impact on Gigaphoton Taiwan Inc., a subsidiary of Gigaphoton Inc, headquartered in Hsinchu, Taiwan, at all our four operating sites, we have confirmed that employees and customer service have not been affected.</p>



<p>The status of our company is as follows;</p>



<ol class="wp-block-list">
<li>Employee Status<br>We have confirmed the safety of all Gigaphoton group employees working in Taiwan.</li>



<li>Operating Building and Facilities<br>We have confirmed that all four operating sites in Taiwan can continue to operate as usual.</li>



<li>Service Operations<br>The service operation has not been affected and can operate as usual.</li>



<li>Spare Parts Inventory<br>The inventory of spare parts stored in warehouses at the four local sites is not affected, and there is no impact on customer support.</li>



<li>Logistics<br>Currently, there are no issues with the logistics for the supply of our parts.</li>



<li>Supply Chain<br>We have confirmed that there is no impact on our supply chain.</li>
</ol>



<figure class="wp-block-table"><table><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br><br>Email: <a href="mailto:web_info@gigaphoton.com" target="_blank" rel="noreferrer noopener">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


Impact of the Earthquake at Taiwan’s East Coast in 2024 upon GIGAPHOTON’s Business


<p class="has-text-align-center">Gigaphoton is one of only 29 Distinguished Award recipients across Intel’s global supply chain</p>



<p>Oyama, Tochigi; March 29, 2024, <a href="https://gigaphoton.com/">Gigaphoton Inc.</a> is proud to announce that it has earned Intel’s EPIC Distinguished Supplier Award. Through its dedication to Excellence, Partnership, Inclusion, and Continuous (EPIC) quality improvement, Gigaphoton has achieved a level of performance that consistently exceeds Intel’s expectations.</p>


<div class="wp-block-image">
<figure data-wp-context="{&quot;imageId&quot;:&quot;6830a0852e837&quot;}" data-wp-interactive="core/image" class="aligncenter size-full wp-lightbox-container"><img loading="lazy" decoding="async" width="684" height="383" data-wp-class--hide="state.isContentHidden" data-wp-class--show="state.isContentVisible" data-wp-init="callbacks.setButtonStyles" data-wp-on-async--click="actions.showLightbox" data-wp-on-async--load="callbacks.setButtonStyles" data-wp-on-async-window--resize="callbacks.setButtonStyles" src="https://webapi.gigaphoton.global/wp-content/uploads/2024/03/image-2.png" alt="" class="wp-image-9006" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2024/03/image-2.png 684w, https://webapi.gigaphoton.global/wp-content/uploads/2024/03/image-2-300x168.png 300w" sizes="auto, (max-width: 684px) 100vw, 684px" /><button
			class="lightbox-trigger"
			type="button"
			aria-haspopup="dialog"
			aria-label="Enlarge image"
			data-wp-init="callbacks.initTriggerButton"
			data-wp-on-async--click="actions.showLightbox"
			data-wp-style--right="state.imageButtonRight"
			data-wp-style--top="state.imageButtonTop"
		>
			<svg xmlns="http://www.w3.org/2000/svg" width="12" height="12" fill="none" viewBox="0 0 12 12">
				<path fill="#fff" d="M2 0a2 2 0 0 0-2 2v2h1.5V2a.5.5 0 0 1 .5-.5h2V0H2Zm2 10.5H2a.5.5 0 0 1-.5-.5V8H0v2a2 2 0 0 0 2 2h2v-1.5ZM8 12v-1.5h2a.5.5 0 0 0 .5-.5V8H12v2a2 2 0 0 1-2 2H8Zm2-12a2 2 0 0 1 2 2v2h-1.5V2a.5.5 0 0 0-.5-.5H8V0h2Z" />
			</svg>
		</button></figure></div>


<p>“As one of the 29 Distinguished Supplier Award recipients in 2024, Gigaphoton stands out among suppliers in Intel’s trusted supply chain,” said Keyvan Esfarjani, chief global operations officer at Intel. “Through their relentless drive to improve, they have achieved a level of performance that consistently exceeds Intel’s expectations and serves as a benchmark across the ecosystem.”</p>



<p>The Intel EPIC Distinguished Supplier Award recognizes a consistent level of strong performance across all performance criteria. Of the thousands of Intel suppliers around the world, only a few hundred qualify to participate in the EPIC Supplier Program. The EPIC Distinguished Award is the second-highest honor a supplier can achieve. In 2024, only 29 suppliers in the Intel supply chain network earned this award.</p>



<p>To qualify for an Intel EPIC Distinguished Supplier Award, suppliers must exceed expectations, meet aggressive performance goals, and score 80 percent or higher in performance assessments throughout the year. Suppliers must also meet 80 percent or more of their improvement plan deliverables and demonstrate formidable quality and business systems.</p>



<p><strong>Get more information about the Intel EPIC Supplier Awards</strong></p>



<p>Find the latest at the Intel Newsroom<br>&lt;LINK TO: <a href="https://www.intel.com/content/www/us/en/newsroom/news/intel-announces-2024-epic-supplier-program-award-recipients.html" target="_blank" rel="noreferrer noopener">https://www.intel.com/content/www/us/en/newsroom/news/intel-announces-2024-epic-supplier-program-award-recipients.html</a>&gt;</p>



<p>Visit the Intel EPIC Supplier Awards page<br>&lt;LINK TO: <a href="https://www.intel.com/content/www/us/en/supplier/governance/quality/epic.html">https://www.intel.com/content/www/us/en/supplier/governance/quality/epic.html</a>&gt;</p>



<p><strong>About GIGAPHOTON</strong></p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br><br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


Gigaphoton Earns Intel’s 2024 EPIC Distinguished Supplier Award


<p class="has-text-align-center">Evolutionary Immersion Lithography Lightsource Driving Lithography Performance</p>



<p>Oyama, Tochigi; March 27, 2024, <a href="https://gigaphoton.com/">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources for semiconductor lithography, announced that &#8220;GT80A&#8221;, that is Gigaphoton&#8217;s latest ArF Immersion lithography lightsource has been shipped.</p>


<div class="wp-block-image">
<figure class="aligncenter size-full"><img loading="lazy" decoding="async" width="472" height="383" src="https://webapi.gigaphoton.global/wp-content/uploads/2024/03/image-1.png" alt="" class="wp-image-8979" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2024/03/image-1.png 472w, https://webapi.gigaphoton.global/wp-content/uploads/2024/03/image-1-300x243.png 300w" sizes="auto, (max-width: 472px) 100vw, 472px" /></figure></div>


<p>In the manufacturing of state-of-the-art devices, high productivity is required along with the scaling. Said state-of-the-art devices must meet requirements for lithography patterns transferred to wafers, especially EPE (Edge Placement Error) and high productivity. As a lightsource, by reducing CD LER/LWR (Line Edge Roughness/Line Width Roughness), which directly affects EPE, the GT80A provides improved yield at mass production sites.</p>



<p>The new immersion lithography lightsource &#8220;GT80A&#8221; has successfully enhanced the repetition rate by 12.5% with newly developed modules. This leads to a 36% reduction in speckle contrast compared with GT65A and contributes to further reduction of LWR/CDU.&nbsp; These advancements enable further improvement on process yield and support high productivity in the production of leading-edge nodes.</p>



<p>Katsumi Uranaka, President and CEO of Gigaphoton said, &#8220;GT80A has been introduced to the semiconductor market with the goal of achieving stable and high-yield production for cutting-edge semiconductors in state-of-the-art process nodes. Gigaphoton will continue its efforts to drive innovation in semiconductor industry.&#8221;</p>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br><br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


NewsNews