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<p class="has-text-align-center">It will publish papers at the largest conference on semiconductor lithography technology</p>



<p>Oyama, Tochigi; February 17, 2023, <a href="https://gigaphoton.com/">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources for semiconductor lithography, participates in <a href="https://spie.org/conferences-and-exhibitions/advanced-lithography-and-patterning">SPIE Advanced Lithography + Patterning 2023</a>, held in San Jose, California from Sunday, February 26 through Thursday, March 2, 2023 PST.</p>



<p>Gigaphoton will introduce the latest technology on yield improvement and sustainability solution with DUV lightsources technology. In addition, Gigaphoton will present the progress of research and development on EUV lightsources.</p>



<p>* If you wish to cite the papers in your materials, please contact us.</p>



<p>Oral Presentations:</p>



<figure class="wp-block-table"><table><tbody><tr><td>1) <strong>To enhance EPE and availability simultaneously by the leading-edge immersion light source</strong> [Paper#: 12494-44]</td></tr><tr><td>2) <strong>Plasma dynamics and future of LPP-EUV source for semiconductor manufacturing</strong> [Paper#: 12494-45]</td></tr></tbody></table></figure>



<p>Papers:</p>



<figure class="wp-block-table"><table><tbody><tr><td>3) <strong>Development progress of key components for LPP-EUV light sources</strong> [Paper#: 12494-51]</td></tr><tr><td>4) <strong>The development of a machine learning-based excimer laser performance simulator for engineering maintenance decisions </strong>[Paper#: 12496-101]</td></tr><tr><td>5) <strong>Contributing to sustainability delivers maximizing availability by the latest light source GT66A for the ArF immersion lithography</strong> [Paper#: 12494-60]</td></tr></tbody></table></figure>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br><br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


Gigaphoton unveils technology solutions at SPIE Advanced Lithography + Patterning 2023


<p class="has-text-align-center">Supporting increasing semiconductor lithography lightsources worldwide</p>



<p>Oyama, Tochigi; December 23, 2022, <a href="https://gigaphoton.com/" target="_blank" rel="noreferrer noopener">Gigaphoton Inc. </a>(Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources for semiconductor lithography, announced a policy to improve field support capability through its field services and supports for lithography lightsources worldwide by expanding training capability.</p>



<p>According to industry reports, the semiconductor market is expected to grow to $1 trillion by 2030. Gigaphoton, a manufacturer of lightsources for semiconductor lithography, is focusing on expanding its facilities and training field service engineers in order to provide better support systems customer and then support industry growth.</p>



<p>To expand the training capability of field support engineers throughout the Gigaphoton Group, the company added a training center in Tainan and Taichung, Taiwan. Training lasers are now installed at all four service locations in Taiwan. In addition, Gigaphoton has added training lasers in the U.S., Singapore, Changzhou, China, and expanded its training center.</p>



<p>Gigaphoton plans to expand its training facilities in each region continuously to double the number of training lasers and trainers worldwide in FY2025 (compared to FY2020).</p>



<p>Katsumi Uranaka, President &amp; CEO of Gigaphoton, said, &#8220;As demand for semiconductors is expected to grow toward 2030, our lightsources operating at customers are also increasing year by year. We are enhancing our capability of training field support engineers throughout the entire Gigaphoton to maximize our customers&#8217; availability. As a supplier of lithography lightsources are essential for semiconductor manufacturing, we will continue to enhance our field service to support our industry growth.&#8221;</p>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of light sources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a rel="noreferrer noopener" href="https://gigaphoton.com/" target="_blank">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Oishi<br><br>Email: <a rel="noreferrer noopener" href="mailto:web_info@gigaphoton.com" target="_blank">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>



<p></p>


Gigaphoton expands training capability to enhance its field services


<p class="has-text-align-center">Began contributing to local communities and reducing food loss and waste <br>by donating 2,750 food reserves</p>



<p>Oyama, Tochigi; December 13, 2022 &#8211; <a href="https://gigaphoton.com/en/">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources used in semiconductor lithography, has announced that it had donated 2,750 food reserves to facilities in Oyama City on November 29.</p>



<p>Food drive in Oyama City is a program that collect food that cannot be consumed in the home and provides it to people and welfare facilities who are in need. Gigaphoton endorses the food drive program of Oyama City and strives to contribute to local communities and reduce food loss and waste by donating food reserves.</p>



<p>Efforts to reduce food loss and waste will also lead to the realization of carbon neutrality, and environmental benefits can also be expected. Gigaphoton aims to achieve carbon neutrality, virtually zero carbon emissions, by 2030.</p>



<p>In “Sustainability Policy”, which was formulated in December of last year, Gigaphoton is promoting sustainability based on the three axes; &#8220;With people,&#8221; &#8220;With the planet,&#8221; and &#8220;With business.&#8221; Prior to the formulation of this policy, Gigaphoton has been conducting activities to contribute to the prevention of community-wide infectious diseases, such as donating an alcohol sprayer for disinfectant to elementary and junior high schools in Oyama City in fiscal 2020 and 2021. Following the policy going forward based on &#8220;With business,&#8221; we plan and implement activities that can contribute to the community, and this year we will work through food donations.</p>



<p>Katsumi Uranaka, President &amp; CEO of Gigaphoton, said.”Oyama city addresses the 2 billion yen food loss and waste as important issue. This donation is based on Gigaphoton&#8217;s Sustainability Policy of minimizing environmental impact. As a member of the community, we will continue to promote sustainability activities and contribute to our local community.”</p>



<figure class="wp-block-table"><table><tbody><tr><td>Outline of food donation for stockpiling to Gigaphoton Inc. to Oyama City<br><br>1)Date: Tuesday, November 29, 2022<br>2)Content of donation: Total 2,750 meals (equivalent to 800 thousand yen)</td></tr></tbody></table></figure>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of light sources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table><tbody><tr><td>Media contact:<br>GIGAPHOTON Inc<br>Corporate Planning Division<br>Kenji Ohishi<br><br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>



<p></p>


Gigaphoton donates food to the food drive program in Oyama City


<p>Oyama, Tochigi; Dec 7, 2022 — Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources used in semiconductor lithography, has announced that the topping out ceremony of Gigaphoton’s new building was held on Octover 26 JST.</p>


<div class="wp-block-image">
<figure class="aligncenter size-full is-resized"><img loading="lazy" decoding="async" src="https://webapi.gigaphoton.global/wp-content/uploads/2022/12/800_1308_shrink.jpg" alt="" class="wp-image-8133" width="460" height="307" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2022/12/800_1308_shrink.jpg 920w, https://webapi.gigaphoton.global/wp-content/uploads/2022/12/800_1308_shrink-300x200.jpg 300w, https://webapi.gigaphoton.global/wp-content/uploads/2022/12/800_1308_shrink-768x513.jpg 768w" sizes="auto, (max-width: 460px) 100vw, 460px" /></figure></div>


<p>Gigaphoton has announced that it has invested about 5 billion yen in the construction of the new facility to increase its production capacity that has started from this July. This will increase its total production capacity by 2.5 times compared to that in FY2020. With this ceremony, the installation of steel frames was finished, and full-scale construction of the exterior and interior will be proceeded from now on, heading for completion in the second half of next year.</p>



<p>Katsumi Uranaka, President &amp; CEO of Gigaphoton said, “With demand for semiconductors on the rise around the world in the mid to long term perspective, we will do our utmost to meet the demand from our customers.<br>The construction of our new production building is well on our way to completion in the second half of next year. The operation of the building will establish a plenty production capacity that can handle future increases in not only the number of new lasers for future demand, but also the number of units under operation at customer fabs.<br>As a supplier of lithography lightsources which are essential for semiconductor manufacturing, we will continue to contribute to semiconductor industry by strengthening the supply and services of our products”.</p>



<p></p>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of light sources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table><tbody><tr><td>Media contact:<br>GIGAPHOTON Inc<br>Corporate Planning Division<br>Kenji Ohishi<br><br>E-mail: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


The Topping Out Ceremony of Gigaphoton’s New Production Building was held


<p class="has-text-align-center"><em>Expanding efforts with the goal of achieving net zero carbon dioxide emissions by 2030</em></p>



<p>Oyama, Tochigi; August 25, 2022 &#8212; <a href="https://gigaphoton.com">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources used in semiconductor lithography, has announced that it has signed a purchase agreement for the purchase of &#8220;J-Credit&#8221; certification on August 24 JST.</p>



<p>Amid various weather-related disasters in recent years, more than 120 countries and regions have set &#8220;carbon neutrality by 2050&#8221; as a goal under the Science Based Target (SBT) derived from the Paris Agreement adopted in 2015. In addition, the semiconductor industry is also aiming to achieve the goal even earlier.</p>



<p>Gigaphoton has set a goal of virtually eliminating its own carbon dioxide emissions (SCOPE 1 and SCOPE 2 under the “GHG Protocol”) by 2030, and is taking various steps to achieve it.</p>



<p>As part of Gigaphoton&#8217;s efforts to reduce emissions and offset emissions, Gigaphoton has concluded an agreement to purchase certificates under the J-Credit System, which certifies the amount of carbon dioxide emission reductions and carbon dioxide absorption through appropriate forest management. </p>



<p>Katsumi Uranaka, President &amp; CEO of Gigaphoton said, “As efforts to become carbon neutral are accelerating around the world, Gigaphoton is committed to taking the lead in addressing environmental issues. The conclusion of this purchase agreement is one of the initiatives we are taking to achieve the goal of virtually zero emissions under SCOPE 1 and SCOPE 2 by the year 2030. At the same time, we are working to reduce carbon dioxide emissions from the Gigaphoton lightsources used in our customers&#8217; factories by improving each module, extending its life, and developing power-saving lasers. As a supplier of lithography lightsources which are essential for semiconductor manufacturing, we take environmental issues seriously and contribute to the global environment through various initiatives”.</p>



<p></p>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of light sources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com">https://gigaphoton.com</a></p>



<figure class="wp-block-table"><table><tbody><tr><td>Media contact:<br>GIGAPHOTON Inc<br>Corporate Planning Division<br>Kenji Ohishi<br><br>E-mail: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


Gigaphoton Signs J-Credit Purchase Agreement  to Accelerate Decarbonization


<p class="has-text-align-center">Production Capacity to 2.5 times to Respond to a Significant Increase in Market Demand</p>



<p class="has-black-color has-text-color">Oyama, Tochigi; July 29, 2022 &#8212; <a href="https://gigaphoton.com" target="_blank" rel="noreferrer noopener">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), <a>a manufacturer of lightsources</a> used in semiconductor lithography, has announced that it will increase its production capacity by 2.5 times through the construction of the new building.</p>


<div class="wp-block-image">
<figure class="aligncenter size-large is-resized"><img loading="lazy" decoding="async" src="/wp-content/uploads/2022/07/ギガフォトンP4棟_外観パース-1-1024x588.jpg" alt="" class="wp-image-8072" width="768" height="441" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2022/07/ギガフォトンP4棟_外観パース-1-1024x588.jpg 1024w, https://webapi.gigaphoton.global/wp-content/uploads/2022/07/ギガフォトンP4棟_外観パース-1-300x172.jpg 300w, https://webapi.gigaphoton.global/wp-content/uploads/2022/07/ギガフォトンP4棟_外観パース-1-768x441.jpg 768w, https://webapi.gigaphoton.global/wp-content/uploads/2022/07/ギガフォトンP4棟_外観パース-1-1536x883.jpg 1536w, https://webapi.gigaphoton.global/wp-content/uploads/2022/07/ギガフォトンP4棟_外観パース-1-2048x1177.jpg 2048w" sizes="auto, (max-width: 768px) 100vw, 768px" /></figure></div>


<p class="has-text-align-center">perspective drawing of new building</p>



<p></p>



<p>In recent years, demand for semiconductors has increased significantly, and as major semiconductor customers in various countries are strengthening their supply chains, investment in the semiconductor industry is further accelerated.</p>



<p>Gigaphoton, a leading manufacturer of lightsources used in semiconductor lithography, is also seeing increased market demand. To meet this increase in demand, Gigaphoton has invested about 5 billion yen in the construction of the new facility to increase its production capacity. Construction began in July of this year, with completion expected in June 2023. This will increase our total production capacity by 2.5 times compared to FY2020.</p>



<p>Katsumi Uranaka, President &amp; CEO of Gigaphoton said, “With demand for semiconductors on the rise around the world, we will do our utmost to meet the demand from our customers. This past fiscal year, we have already completed a new building thereby doubling our production capacity, and we will further strengthen our production by 2.5x through this newly announced additional investment. Furthermore, we have confirmed that there is an area for additional expansion of production facilities just east of our buildings. As a supplier of lithography lightsources which are essential for semiconductor manufacturing, we will continue to contribute to semiconductor industry by strengthen the supply and service of our products”.</p>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of light sources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a rel="noreferrer noopener" href="https://gigaphoton.com" target="_blank">https://gigaphoton.com</a></p>



<figure class="wp-block-table"><table><tbody><tr><td>Media contact:<br>GIGAPHOTON Inc<br>Corporate Planning Division<br>Kenji Ohishi<br><br>E-mail: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


Gigaphoton Increases Production Capacity for Excimer Laser Light Sources with Construction of New Building


<p><em>We do not observe any damage or impact on employees’ lives, buildings, production facilities, customer support, etc. due to the Earthquake off the coast of Fukushima on March 16th.</em></p>



<p>I would like to express my heartfelt sympathy to the affected people due to the earthquake that occurred at 23:36 JPT on March 16th off the coast of Fukushima as an epicenter.</p>



<p>As of today, we have confirmed that all Gigaphoton employees and facilities in Oyama, Hiratsuka, and other locations in Japan are unharmed. And we have also confirmed that it has not affected on our production facilities..</p>



<ol class="wp-block-list"><li>Overview<br>We had started checking the safety of our buildings and facilities since the morning of the 17th, and we have confirmed that there is no damage that would affect our business activities.</li><li>Details<br>・No damage has been observed on our production facilities. We resumed production activities&nbsp; &nbsp; &nbsp;since 9:00 JPT on March 17th.<br>・Our customer support capabilities are unaffected.<br>・We are currently investigating the impact on our supply chain.</li></ol>



<p class="has-text-align-right">GIGAPHOTON Inc<br>President<br>Katsumi Uranaka</p>



<figure class="wp-block-table"><table><tbody><tr><td>Media contact:<br>GIGAPHOTON Inc<br>Corporate Planning Division<br>Kenji Ohishi<br><br>E-mail: web_info@gigaphoton.com</td></tr></tbody></table></figure>


Impact of the Earthquakes off the coast of Fukushima upon GIGAPHOTON’s Business


<p class="has-text-align-center">在IC封裝技術研究上，採用提供加工用途的準分子雷射裝置「G300K」</p>


<div class="wp-block-image">
<figure class="aligncenter size-large is-resized"><img loading="lazy" decoding="async" src="https://webapi.gigaphoton.global/wp-content/uploads/2022/04/20220210-01-1024x768.jpg" alt="" class="wp-image-7952" width="512" height="384" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2022/04/20220210-01-1024x768.jpg 1024w, https://webapi.gigaphoton.global/wp-content/uploads/2022/04/20220210-01-300x225.jpg 300w, https://webapi.gigaphoton.global/wp-content/uploads/2022/04/20220210-01-768x576.jpg 768w, https://webapi.gigaphoton.global/wp-content/uploads/2022/04/20220210-01-1536x1152.jpg 1536w, https://webapi.gigaphoton.global/wp-content/uploads/2022/04/20220210-01-2048x1536.jpg 2048w" sizes="auto, (max-width: 512px) 100vw, 512px" /></figure></div>


<p>栃木縣小山市；2022年2月16日，半導體微影光源製造商<a href="https://www.gigaphoton.com/ct/">Gigaphoton株式會社（</a>總公司：栃木縣小山市；總裁：浦中克己）宣布，專為加工用途的KrF準分子雷射裝置「G300K」，已獲得台灣國家實驗研究院專案所採用，並已於12/27完成機台導入國立成功大學的作業。</p>



<p>台灣國家實驗研究院 (NARLabos) 籌劃機構之國立成功大學正投入運用準分子雷射裝置，研究IC封裝技術的相關專案。以精細燒蝕加工為首的「優化加工」概念所開發的Gigaphoton KrF雷射光源裝置「G300K」，評估最適合這項研究，因而獲得本專案採用。</p>



<p>Gigaphoton總裁兼CEO浦中克己表示：「在半導體微影以外領域上發展的GIGANEX系列G300K，是以實現Gigaphoton長年培育的99％以上高運轉率、高輸出的微影光源技術為基礎下所開發而成，因此確信可為本次的專案做出貢獻。可為廣泛領域的客戶提供解決方案的GIGANEX系列，今後可望將運用於全新應用領域，為次世代的產業界發展做出貢獻。」</p>



<p><a href="/products/7677" target="_blank" rel="noreferrer noopener">產品 G300K</a></p>



<p>Gigaphoton公司簡介<br>Gigaphoton作為開發和生產半導體微影DUV光源先驅企業，從成立初期便對全球半導體製造商，提供運用最尖端技術的多項解決方案。此外，也積極投入開發EUV光源及微影以外領域的DUV光源。Gigaphoton從產品研發到生產、銷售及維護始終站在用戶立場，以具備豐富知識與經驗的專業集團之姿，為用戶提供業界最高水準的支援。<br>詳細資訊請參閱網站<a href="https://www.gigaphoton.com/ct/">www.gigaphoton.com</a></p>



<figure class="wp-block-table"><table><tbody><tr><td>新聞公關聯絡窗口:<br>GIGAPHOTON<br>經營企畫部<br>大石憲司<br><br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


Gigaphoton向台灣國立研究機構交付KrF準分子雷射裝置


<h5 class="wp-block-heading">Gigaphoton survey reveals important data that can unleash intelligence for the semiconductor industry</h5>



<p class="has-text-align-right">January 7, 2022</p>



<p><strong>OYAMA, </strong>Japan – January 7, 2022 – Gigaphoton Inc., (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of light sources used in semiconductor lithography, today released the results of a survey that provides insights into the current state of the semiconductor manufacturing industry. The results reveal significant gaps in semiconductor manufacturing analytics capabilities that could help solve the semiconductor shortage and unleash intelligence for the global semiconductor industry.</p>



<p>The Gigaphoton survey reveals unmet analytics needs that offer a roadmap to what the semiconductor industry must do to meet growing demand and help solve the chip shortage. Shrinking chip sizes and advancing technology are challenging the ability of semiconductor manufacturers to sustain uptime and yield. At the same time, worldwide demand is increasing, and shortages throughout the supply chain have forced semiconductor manufacturers to focus their attention on using analytics to gain efficiencies with their equipment and processes.</p>



<p>“As semiconductor manufacturing processes have become more complex, we’ve seen an increase in customer requests for more advanced intelligence into our tools, and each customer needs something unique. Since COVID, we believe these requests will be compounded further as semiconductor manufacturers scale up their chip production,” said Yuji Minegishi, General Manager at Gigaphoton.</p>



<p>As manufacturing processes continue to require greater precision, it has been challenging for chip manufacturers to achieve the depth and breadth of intelligence they need to increase or even sustain uptime. Currently, intelligence is siloed among proprietary analytics solutions developed by tool manufacturers and third-party analytics platforms. This creates barriers to usability which are becoming more problematic as processes become more complex.</p>



<p>Gigaphoton conducted a survey with 276 responses from semiconductor manufacturing respondents in all aspects of the manufacturing process. The survey showed that 73% of chip manufacturers must piece together multiple equipment analytics solutions. Despite all the solutions they use and the large investments they make on software, most still don’t have the efficient advanced analytics capabilities they need to increase uptime and output.</p>



<p>“The survey results reveal a significant gap in semiconductor manufacturing analytics capabilities that can’t really be filled by a single software vendor. This is a global semiconductor industry problem that will need an industry-wide solution,” said Mario Faria, Vice President and Partner, Americas at the MAX Group.</p>



<p>“This study has helped us uncover the industry’s critical need for more advanced and intelligent analytics capabilities,” said Katsumi Uranaka, President and CEO of Gigaphoton. “We are committed to providing state of the art advanced platforms and solutions to help our customers increase productivity and output.”</p>



<p><strong>Download the full report from </strong><a href="https://fabscape.net/survey"><strong>https://fabscape.net/survey</strong></a> <strong>to learn more.</strong></p>



<p></p>



<figure class="wp-block-table is-style-regular"><table><tbody><tr><td><strong>About Gigaphoton</strong><br>Since it was founded in 2000, Gigaphoton has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of light sources and equipment analytics software. In every stage from R&amp;D to manufacture, sales, and maintenance services, Gigaphoton is committed to providing world-class support delivered from the perspective of everyday users. For more information about Gigaphoton, visit <a href="https://www.gigaphoton.com/">https://www.gigaphoton.com</a>.<br><br>For information about Fabscape, a secure, open equipment monitoring and analytics platform developed by Gigaphoton, visit <a href="https://www.fabscape.net">https://www.fabscape.net</a>.<br><br><strong>Media Contact:</strong><br>Yuji Minegishi<br>Gigaphoton Inc.<br><meta charset="utf-8">E-mail web_info@gigaphoton.com or visit <a href="https://fabscape.net/contact">https://fabscape.net/contact</a></td></tr></tbody></table></figure>


Semiconductor Manufacturing Survey Reveals Insights to End Chip Shortage


<p><strong>透過支援半導體需求驟增的最新技術提升產能</strong></p>



<p>2021年10月26日</p>



<p>栃木縣小山市：2021年10月26日，半導體微影光源製造商<a href="https://www.gigaphoton.com/ct/">Gigaphoton株式會社</a>（總公司：栃木縣小山市；總裁：浦中克己）宣布，最尖端的ArF濕浸式微影光源「GT66A」已在世界半導體廠正式運作中。</p>



<p>近年來，全球急速增加的電子產品和雲端設備需求趨勢下，用於這些產品和設備的半導體需求也在激增。再者，由於DX逐步深入到企業，以及為了邁向碳中和社會的EV增產和轉換為可再生能源等，半導體在社會基礎設施中扮演樞紐的角色，因此更進一步帶動半導體的需求。特別是自動駕駛和高性能伺服器 ，這種同時具備高速運算和低耗電的高端設備需求的成長，更加速了半導體的需求。</p>



<p>GT66A是支援這種高端設備專用半導體所需5nm節點，以及生產新世代節點的機種。</p>



<p>此外，GT66A透過降低 (30%) 光斑對比值，以減少佈線和光阻劑曝光圖樣偏離的 EPE。可望藉此抑制顯示壁面微細圖樣凹凸尺寸的LER，以及顯示因凹凸產生圖樣寬幅偏差的LWR，以提升成品率 (yield)。再加上導入高耐久性零組件，將維修週期延長30%，以提升裝置可用性，並可實現超高產能。</p>



<p>Gigaphoton總裁兼CEO浦中克己表示：「GT66A以穩定生產最尖端半導體及高成品率為指標，特別鎖定提升最尖端製程節點產能之下投入市場。Gigaphoton往後也將繼續透過活動，以利求整體半導體廠的產能最大化。」</p>



<p>Gigaphoton公司簡介<br>作為開發和生產微影DUV光源先驅企業的Gigaphoton，從成立初期便對全球半導體製造商，提供運用最尖端技術的多項解決方案。此外，也積極投入於開發EUV光源。作為具備豐富知識的專業集團，始終站在用戶立場的Gigaphoton，將繼續從產品研發到生產、銷售及維護，為用戶提供業界最高水準的支援。<br>更多詳細介紹請參閱<a href="https://www.gigaphoton.com/ct/">https://www.gigaphoton.com/ct/</a></p>



<p>新聞公關聯絡窗口:<br>GIGAPHOTON<br>經營企畫部<br>大石憲司<br><br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></p>


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