ArF Immersion

ArF Dry

Data Products

인터뷰

뉴스 릴리스

이벤트

표창


<p class="has-text-align-center">Evolutionary Immersion Lithography Lightsource Driving Lithography Performance</p>



<p>Oyama, Tochigi; March 27, 2024, <a href="https://gigaphoton.com/">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources for semiconductor lithography, announced that &#8220;GT80A&#8221;, that is Gigaphoton&#8217;s latest ArF Immersion lithography lightsource has been shipped.</p>


<div class="wp-block-image">
<figure class="aligncenter size-full"><img loading="lazy" decoding="async" width="472" height="383" src="https://webapi.gigaphoton.global/wp-content/uploads/2024/03/image-1.png" alt="" class="wp-image-8979" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2024/03/image-1.png 472w, https://webapi.gigaphoton.global/wp-content/uploads/2024/03/image-1-300x243.png 300w" sizes="auto, (max-width: 472px) 100vw, 472px" /></figure></div>


<p>In the manufacturing of state-of-the-art devices, high productivity is required along with the scaling. Said state-of-the-art devices must meet requirements for lithography patterns transferred to wafers, especially EPE (Edge Placement Error) and high productivity. As a lightsource, by reducing CD LER/LWR (Line Edge Roughness/Line Width Roughness), which directly affects EPE, the GT80A provides improved yield at mass production sites.</p>



<p>The new immersion lithography lightsource &#8220;GT80A&#8221; has successfully enhanced the repetition rate by 12.5% with newly developed modules. This leads to a 36% reduction in speckle contrast compared with GT65A and contributes to further reduction of LWR/CDU.&nbsp; These advancements enable further improvement on process yield and support high productivity in the production of leading-edge nodes.</p>



<p>Katsumi Uranaka, President and CEO of Gigaphoton said, &#8220;GT80A has been introduced to the semiconductor market with the goal of achieving stable and high-yield production for cutting-edge semiconductors in state-of-the-art process nodes. Gigaphoton will continue its efforts to drive innovation in semiconductor industry.&#8221;</p>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br><br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


Gigaphoton’s State-of-the-art ArF Immersion Lithography Lightsource “GT80A”


<p class="has-text-align-center">It will publish papers at the largest conference on semiconductor lithography technology</p>



<p>Oyama, Tochigi; February 15, 2024, <a href="https://gigaphoton.com/">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources for semiconductor lithography, participates in <a href="https://spie.org/conferences-and-exhibitions/advanced-lithography-and-patterning">SPIE Advanced Lithography + Patterning 2024</a>, held in San Jose, California from Sunday, February 25 through 29, 2024 PST.</p>



<p>Gigaphoton will discuss the state-of-the-art ArF immersion product the GT80A, Gigaphoton&#8217;s sustainability solution, and availability improvements with DUV lightsource technologies. In addition, Gigaphoton will present updates on EUV lightsource technology for inspections and DUV technology for advanced packaging solutions.</p>



<p><sub>* If you have any inquiries regarding the above presentation, please feel free to contact us.</sub></p>



<p>Oral Presentations:</p>



<figure class="wp-block-table"><table><tbody><tr><td>1) <strong>Improved ArFi scanner throughput and process yield through a next generation DUV light source featuring high-repetition rate and enhanced speckle contrast</strong> [Paper#: 12953-6]</td></tr><tr><td>2) <strong>Enhancing M2 beam quality factor of in high power KrF laser for glass micro-via fabrication in advanced packaging</strong> [Paper#: 12956-17]</td></tr></tbody></table></figure>



<p>Poster Presentations:</p>



<figure class="wp-block-table"><table><tbody><tr><td>3) <strong>EPE enhancement by implementing with E95% tuning functionality and resist optimization</strong> [Paper#: 12953-52]</td></tr><tr><td>4) <strong>Enhancing wafer productivity through increased repetition rate to 6.75khz with GT80A as ArF immersion light source </strong>[Paper#: 12953-54]</td></tr><tr><td>5) <strong>Maximizing availability by enhancing operational efficiency and implementing sophisticated maintenance strategies in complex ArFi light source</strong> [Paper#: 12953-55]</td></tr><tr><td>6) <strong>Development progress of Gigaphoton’s LPP EUV light source for inspection systems</strong> [Paper#: 12953-62]</td></tr></tbody></table></figure>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<p></p>



<figure class="wp-block-table"><table><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br><br>Email: <a href="mailto:web_info@gigaphoton.com" target="_blank" rel="noreferrer noopener">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


Gigaphoton unveils technology solutions at SPIE Advanced Lithography + Patterning 2024


<p class="has-text-align-center">Gigaphoton has achieved consecutive victories since 2017</p>



<p>Oyama, Tochigi; February 8, 2024, <a href="https://gigaphoton.com/">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources for semiconductor lithography, dispatched  two representatives to participate <a href="https://www.javada.or.jp/jigyou/gino/zenkoku/">in the 61st National Skills Competition</a>, which took place between November 17th and 21st, 2023, and both of them achieved awards.</p>


<div class="wp-block-image">
<figure class="aligncenter size-full"><img loading="lazy" decoding="async" width="472" height="354" src="https://webapi.gigaphoton.global/wp-content/uploads/2024/02/image-1.png" alt="" class="wp-image-8932" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2024/02/image-1.png 472w, https://webapi.gigaphoton.global/wp-content/uploads/2024/02/image-1-300x225.png 300w" sizes="auto, (max-width: 472px) 100vw, 472px" /></figure></div>


<p>From Gigaphoton, two representatives, Asahi Saito and Hyuga Shibazaki, competed in the &#8220;Industrial Control&#8221; category at the tournament and accomplished commendable results. Saito won the bronze medal, while Shibazaki received the Fighting Spirit Award.</p>



<p>Gigaphoton has achieved consecutive victories since 2017 at this event, with the bronze medal being their first in four years.</p>



<p>Gigaphoton will continue to uphold a strong commitment to skill development, maintaining a sincere attitude, and making valuable contribution to the industry.</p>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br><br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


Gigaphoton’s Two Representatives Achieved Awards in the 61st National Skills Competition


<p>We would like to express our heartfelt sympathy to the affected people due to the earthquake that occurred on January 1st at Noto Peninsula, Ishikawa, Japan.</p>



<p>Following the earthquake, Gigaphoton has been prioritizing the safety of our employees and carrying out activities such as employee safety confirmation, information gathering regarding factory buildings, and collaborating with partner companies. Through these efforts, we have confirmed that all employees are safe and our factory operations and customer support can continue as usual.</p>



<p>Our situation is as follows:</p>



<ul class="wp-block-list">
<li>We have confirmed the safety of all our employees.</li>



<li>No damage has been reported at our production facilities, as Oyama City, Tochigi Prefecture, experienced an earthquake with a seismic intensity of 3(which is significantly smaller compared to a seismic intensity of 7).<br>As scheduled, we started production activities on January 8th.</li>



<li>Our customer support operations are unaffected, as there are no issues with the stored inventory of completed systems and parts in our warehouse and we have spare inventory at support bases nationwide.</li>



<li>We are currently investigating the impact on our supply chain.</li>
</ul>



<figure class="wp-block-table"><table><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br><br>Email: web_info@gigaphoton.com</td></tr></tbody></table></figure>


Impact of the Noto Peninsula Earthquake in 2024 upon GIGAPHOTON’s Business


<p class="has-text-align-center">Adopted for Manufacturing of 2.5D/3D Semiconductor Package Processing</p>



<p>Oyama, Tochigi; December 8, 2023, <a href="https://gigaphoton.com/">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources for semiconductor lithography, announced that it has  installed the <a href="https://www.gigaphoton.com/products/7670">&#8220;G300K&#8221;</a> ultra-fine ablation processing lightsources at a package substrate manufacturer.<a href="http://gigaphoton.com/"></a></p>


<div class="wp-block-image">
<figure class="aligncenter size-full"><img loading="lazy" decoding="async" width="255" height="255" src="https://webapi.gigaphoton.global/wp-content/uploads/2023/12/image-1.png" alt="" class="wp-image-8871" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2023/12/image-1.png 255w, https://webapi.gigaphoton.global/wp-content/uploads/2023/12/image-1-150x150.png 150w" sizes="auto, (max-width: 255px) 100vw, 255px" /></figure></div>


<p class="has-text-align-center">G300K, a KrF excimer laser for ultra-fine ablation processing</p>



<p>Gigaphoton has applied its expertise in semiconductor lithography lightsources to develop a lightsource for ultra-fine ablation processing for advanced packaging processes.</p>



<p>The latest addition to its lineup, the G300K, is an excimer laser based on KrF (248nm) wavelength, which is connected to the processing equipment for semiconductor package substrates. It achieves high power, high repetition rate, high uptime, and long lifespan.&nbsp;&nbsp; The excimer laser is primarily used in the process of creating small holes with a diameter of 10μm or less, as well as trenches. It is expected to be adopted for the manufacturing of 2.5D/3D packages utilizing chiplets, which are projected to increase primarily for server applications.</p>



<p>Katsumi Uranaka, President and CEO of Gigaphoton said, &#8220;In Gigaphoton, alongside our research and development of lightsources for semiconductor lithography, we have also been exploring various possibilities for the application of excimer lasers in other fields. Through this journey, our product, the G300K, has been integrated into ORC MANUFACTURING&#8217;s equipment and installed for the first time in the semiconductor package substrate industry. We have faced numerous challenges along the way, but we are delighted with this installation. As a critical lightsource manufacturer in the semiconductor manufacturing industry, we will continue to contribute to the industry through continuous research and development on new processes to facilitate the further implementation of excimer lasers.</p>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br><br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


Gigaphoton Deploys Excimer Laser for Ultra-Fine Ablation Processing


<p class="has-text-align-center">To respond to a significant increase in market demand</p>



<p>Oyama, Tochigi; October 6, 2023, <a href="https://gigaphoton.com/">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources for semiconductor lithography, announced that it held the grand completion of our cutting-edge production facility , which has been under construction since July 2022. This achievement represents a significant step in taking innovation to the next level and our production capacity.<a href="http://gigaphoton.com/"></a></p>


<div class="wp-block-image">
<figure class="aligncenter size-full is-resized"><img loading="lazy" decoding="async" src="https://webapi.gigaphoton.global/wp-content/uploads/2023/10/image.png" alt="" class="wp-image-8387" width="296" height="198" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2023/10/image.png 591w, https://webapi.gigaphoton.global/wp-content/uploads/2023/10/image-300x201.png 300w" sizes="auto, (max-width: 296px) 100vw, 296px" /></figure></div>


<p class="has-text-align-center">The appearance of the new production building</p>



<p>The newly completed production building, which was invested with 5 billion yen, is Gigaphoton&#8217;s first dedicated building for production. In addition to improving production efficiency, the new facility aims to enhance employee welfare and has plans to increase the workforce in the production department by 2.4 times compared to 2020.</p>



<p>Since 2020, Gigaphoton has been gradually implementing measures to improve productivity and to expand production capacity through facility enhancements. With the operation of the new production building, Gigaphoton will be able to achieve its goal of increasing production capacity by 2.5 times compared to 2020.</p>



<p>Katsumi Uranaka, President and CEO of Gigaphoton said, &#8221; It is predicted that the semiconductor market will grow to a trillion-dollar scale by 2030, and the demand for lithography will also increase. Gigaphoton is committed to meeting customer demands by strategically expanding its production capacity.</p>



<p>Employee satisfaction is an essential factor in increasing production capacity. We have established a working environment that allows for diverse work styles through the implementation of multipurpose spaces and facilities that cater to diversity, based on ideas proposed by our employees.</p>



<p>As a supplier of lithography lightsources which are essential for semiconductor manufacturing, we will continue to contribute to the semiconductor industry by strengthening the supply and service of our products. “</p>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of light sources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/" target="_blank" rel="noreferrer noopener">https://gigaphoton.com/</a></p>



<p><strong>Overview of the new production building:</strong></p>



<figure class="wp-block-table"><table><tbody><tr><td>Location</td><td>400, Yokokura-shinden, Oyama, Tochigi, Japan<br>(In the same place of Gigaphoton Headquarter)</td></tr><tr><td>Structure / Size</td><td>Steel-frame Construction, 3-story building with a rooftop floor</td></tr><tr><td>Total Floor Area</td><td>81,130 square feets (7,537.23 square meters)</td></tr><tr><td>Investment Amount</td><td>5 billion yen</td></tr></tbody></table></figure>



<figure class="wp-block-table"><table><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br><br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


Gigaphoton has unveiled a new production building that expands its capacity to remarkable heights 2.5 times


<p>Oyama, Tochigi; September 29, 2023, Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources for semiconductor lithography, exhibits to APCS (Advanced Packaging and Chiplet Summit) 2023, held in Tokyo Big Sight, Tokyo, Japan from Wednesday, December 13 through Friday, December 15, 2023 JST.</p>



<p>Gigaphoton will introduce its advanced ablation processing products, including the latest test results.</p>



<p>We would like to welcome your visit.</p>



<figure class="wp-block-table"><table><tbody><tr><td>Exhibition</td><td>Advanced Packaging and Chiplet Summit 2023</td></tr><tr><td>HP Address</td><td><a href="https://www.semiconjapan.org/en/apcs">https://www.semiconjapan.org/en/apcs</a></td></tr><tr><td>Holding Period</td><td>from December 13 through 15</td></tr><tr><td>Place</td><td>Tokyo Big Sight</td></tr><tr><td>Booth No.</td><td>2748</td></tr></tbody></table></figure>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br><br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


Gigaphoton exhibits to Advanced Packaging and Chiplet Summit 2023


<p>Gigaphoton is proud to announce that we have earned the Intel EPIC Valued Supplier Award for Cost. We are one of just 8 companies in all of Intel’s global supply chain to win an EPIC Valued Award for 2023. #IntelEPIC</p>


Intel EPIC Valued Supplier Award Winner 2023 for Cost


<p>Oyama, Tochigi; June 26, 2023, Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources for semiconductor lithography, participates in Semicon China 2023, held in Pudong, Shanghai from Tuesday, June 29 through Saturday, July 1, 2023 CST.</p>



<p>We would like to welcome your visit.</p>



<figure class="wp-block-table"><table><tbody><tr><td>Exhibition</td><td>SEMICON CHINA 2023</td></tr><tr><td>HP address</td><td><a href="http://www.semiconchina.org/">http://www.semiconchina.org/</a></td></tr><tr><td>Holding period</td><td>from June 29 through July 1</td></tr><tr><td>Place</td><td>Shanghai new International Expo Centre</td></tr><tr><td>Booth No.</td><td>E1 &#8211; E1549</td></tr></tbody></table></figure>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<p></p>



<figure class="wp-block-table"><table><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br><br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


Gigaphoton exhibits to Semicon China 2023


<p class="has-text-align-center"><em>Strengthen communication functions and enhance employee benefits in line with business expansion</em></p>


<div class="wp-block-image">
<figure class="aligncenter size-full is-resized"><img loading="lazy" decoding="async" src="https://webapi.gigaphoton.global/wp-content/uploads/2023/03/image.png" alt="" class="wp-image-8268" width="389" height="190" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2023/03/image.png 778w, https://webapi.gigaphoton.global/wp-content/uploads/2023/03/image-300x147.png 300w, https://webapi.gigaphoton.global/wp-content/uploads/2023/03/image-768x375.png 768w" sizes="auto, (max-width: 389px) 100vw, 389px" /></figure></div>


<p>Oyama, Tochigi; March 30, 2023, <a href="https://gigaphoton.com/">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources for semiconductor lithography, announced that it will start using the new cafeteria building completed in the Komatsu Oyama Site, on April 3.<a href="http://gigaphoton.com/"></a></p>



<p>The semiconductor market is expected to grow in the medium to long term, and the production of Gigaphoton is also increasing year by year. Gigaphoton Headquarter in Oyama, which is responsible for technological development and production, is also increasing its staff, and it was necessary to expand cafeteria capacity to accommodate further employee increases in the future.</p>



<p>The new cafeteria building has two stories which contains 473 seats. It also works as a hub that connects employees of different buildings in Oyama Site. There is a multi-purpose room (meeting room) with 255 square meters, where employees in different divisions interact with each other, including technical development, production, customer support, and other areas.</p>



<p>The interior design of the new cafeteria building reflects the opinions of project members who participated from Gigaphoton employees. They are also engaged in part of the painting work to use there with attachment.</p>



<p>Katsumi Uranaka, President and CEO of Gigaphoton said, &#8220;As the production of Gigaphoton grows over the medium to long term, we treat our human resources the most important asset. We are actively investing in people and striving to create an environment where people can want to work in Gigaphoton. The new cafeteria building has become a building that further improves the quality of communication, which is a strong point of our company not only for employee welfare.<br>As a supplier of lithography lightsources essential for semiconductor manufacturing, we will work to further enhance the workplace environment and promote diversity and inclusion from the perspective of sustainability. “</p>



<figure class="wp-block-table"><table><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br><br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


NewsNews