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<h5 class="wp-block-heading">Gigaphoton survey reveals important data that can unleash intelligence for the semiconductor industry</h5>



January 7, 2022



OYAMA, Japan – January 7, 2022 – Gigaphoton Inc., (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of light sources used in semiconductor lithography, today released the results of a survey that provides insights into the current state of the semiconductor manufacturing industry. The results reveal significant gaps in semiconductor manufacturing analytics capabilities that could help solve the semiconductor shortage and unleash intelligence for the global semiconductor industry.



The Gigaphoton survey reveals unmet analytics needs that offer a roadmap to what the semiconductor industry must do to meet growing demand and help solve the chip shortage. Shrinking chip sizes and advancing technology are challenging the ability of semiconductor manufacturers to sustain uptime and yield. At the same time, worldwide demand is increasing, and shortages throughout the supply chain have forced semiconductor manufacturers to focus their attention on using analytics to gain efficiencies with their equipment and processes.



“As semiconductor manufacturing processes have become more complex, we’ve seen an increase in customer requests for more advanced intelligence into our tools, and each customer needs something unique. Since COVID, we believe these requests will be compounded further as semiconductor manufacturers scale up their chip production,” said Yuji Minegishi, General Manager at Gigaphoton.



As manufacturing processes continue to require greater precision, it has been challenging for chip manufacturers to achieve the depth and breadth of intelligence they need to increase or even sustain uptime. Currently, intelligence is siloed among proprietary analytics solutions developed by tool manufacturers and third-party analytics platforms. This creates barriers to usability which are becoming more problematic as processes become more complex.



Gigaphoton conducted a survey with 276 responses from semiconductor manufacturing respondents in all aspects of the manufacturing process. The survey showed that 73% of chip manufacturers must piece together multiple equipment analytics solutions. Despite all the solutions they use and the large investments they make on software, most still don’t have the efficient advanced analytics capabilities they need to increase uptime and output.



“The survey results reveal a significant gap in semiconductor manufacturing analytics capabilities that can’t really be filled by a single software vendor. This is a global semiconductor industry problem that will need an industry-wide solution,” said Mario Faria, Vice President and Partner, Americas at the MAX Group.



“This study has helped us uncover the industry’s critical need for more advanced and intelligent analytics capabilities,” said Katsumi Uranaka, President and CEO of Gigaphoton. “We are committed to providing state of the art advanced platforms and solutions to help our customers increase productivity and output.”



Download the full report from <a href="https://fabscape.net/survey">https://fabscape.net/survey</a> to learn more.







<figure class="wp-block-table is-style-regular"><table><tbody><tr><td>About Gigaphoton Since it was founded in 2000, Gigaphoton has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of light sources and equipment analytics software. In every stage from R&amp;D to manufacture, sales, and maintenance services, Gigaphoton is committed to providing world-class support delivered from the perspective of everyday users. For more information about Gigaphoton, visit <a href="https://www.gigaphoton.com/">https://www.gigaphoton.com</a>. For information about Fabscape, a secure, open equipment monitoring and analytics platform developed by Gigaphoton, visit <a href="https://www.fabscape.net">https://www.fabscape.net</a>. Media Contact: Yuji Minegishi Gigaphoton Inc. <meta charset="utf-8">E-mail web_info@gigaphoton.com or visit <a href="https://fabscape.net/contact">https://fabscape.net/contact</a></td></tr></tbody></table></figure>

Semiconductor Manufacturing Survey Reveals Insights to End Chip Shortage

应对半导体急速增长需求的先端技术对产能提升



2021年10月26日



枥木县小山市：2021年10月26日，半导体光刻光源制造商<a href="https://www.gigaphoton.com/cs/">Gigaphoton株式会社</a>（总部：枥木县小山市取缔役社长：浦中克己）宣布，最先进的ArF浸液光刻光源“GT66A”在世界半导体制造商中正式投入量产出货。



最近，数位设备和云设备在全球范围内迅速增多，用于这些设备的半导体需求也在急剧增加。并且，在企业端DX的渗透、碳中和的EV增产、可再生能源的转型等社会基础建设中半导体发挥着核心作用。特别是自动驾驶以及兼具高速运算·低功耗的高端设备的市场需求增加更加剧半导体的需求。



GT66A既可以对应此类高端设备所需5nm半导体制程，也可应对下世代的半导体制程生产。



另外，GT66A通过降低散斑对比度（30%），降低了布局与光阻曝光图像的EPE偏差，从而抑制与图像细微粗糙度相关的LER、以及由于粗糙度产生的图像宽度偏差相关的LWR，从而实现成品率的提高。另外，由于导入了高耐久零件设备的维护周期延长了30%，从而提高了设备的使用率以及提高生产效率。



GIGAPHOTON代表取缔役兼CEO浦中克己进行了如下阐述。为了实现先端半导体的稳定·高效率的生产、特别是最先端的生产制程的生产性能，GT66A应运而生。GIGAPHOTON会持续致力于半导体工厂的市场性能最大化，并持续不懈地努力。”



关于GIGAPHOTON GIGAPHOTON作为曝光领域的DUV光源研发与制造的领先企业，与制造，从公司成立开始持续向全球半导体制造商提供使用先端技术的诸多解决方案。并且也致力于EUV光源的研发。GIGAPHOTON不仅仅拥有强大的研究开发团队，在制造、销售、维护服务也拥有知识丰富的专业团队，我们会继续从客户视角出发，持续的提供行业最高水平的服务。 详情请浏览<a href="https://www.gigaphoton.com/cs/">https://www.gigaphoton.com/cs/</a>。



新闻媒体专用联系窗口： GIGAPHOTON株式会社 经营企划部 大石宪司 邮箱：<a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a>

最先端ArF浸液光刻光源“GT66A”正式量产出货

<h5 class="wp-block-heading">以两倍于先前的产能满足大幅增加的市场需求</h5>



2021年9月15日



栃木县小山市；2021年9月15日、半导体光刻光源制造商<a href="https://gigaphoton.com">Gigaphoton株式会社</a>（总部: 栃木县小山市、董事长兼总经理: 浦中克己)表示，2023年准分子激光光源的产能将提高两倍。



近年来，全球的半导体需求大幅增加，各国主要半导体制造商都在加快对半导体制造装置的投资。半导体光刻光源制造商Gigaphoton也认为市场需求在不断增加，预计未来需求也将继续稳定。



为了满足这种需求的增长，Gigaphoton将于2022年4月建造一座新的办公楼，以构建更稳定的供给体制，最大限度地提高生产设备的利用率、提升并优化生产工艺的效率，并将产能提高两倍。



Gigaphoton董事长兼总经理浦中克己表示：“随着全球对半导体需求的不断增长，本公司也将尽最大努力满足客户的需求。今年，我们将充分利用现有资源进行生产，同时优化生产计划和交货期。明年新办公楼即将落成，届时将形成更加稳定的供应体制。作为在半导体制造中不可或缺的光刻光源制造商，今后我们也将通过支持产品的供给及运营，继续负责任地为产业界做出贡献。”



GIGAPHOTON公司简介



GIGAPHOTON公司成立于2000年，作为一家半导体光刻光源的供应商，自成立以来一直为全球的半导体生产厂商提供有价值的解决方案。GIGAPHOTON时刻以客户为中心，从产品研发到生产、销售及维护，为用户提供业界最高水准的支持。更为详细的介绍请您访问：<a href="https://www.gigaphoton.com/cs/">https://www.gigaphoton.com/cs/</a>。







新闻媒体专用联系窗口： GIGAPHOTON株式会社 经营企划部 高久贤次 邮箱：<a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a>[:ct]

Gigaphoton增强准分子激光光源的生产能力

2021/8/19



On August 19, to avoid the spread of the new coronavirus throughout the country, the Japanese government has extended the declaration of a state of emergency to 13 prefectures (from August 20 to September 12), including Tochigi Prefecture, where Gigaphoton&#8217;s headquarters are located.



We request our customers and suppliers to refrain from visiting our company’s headquarters as much as possible. If a visit is unavoidable, please make an appointment with our contact person and note that you will be asked to fill out a &#8220;Prior Confirmation&#8221; form.



For information about visiting our offices outside of Japan, please contact our overseas offices listed at the end.



＜Our countermeasures against new coronavirus infection&gt;



<ol class="wp-block-list"><li>Mandatory handwashing and mask wearing</li><li>Employee temperature check every morning</li><li>Distribution of the New Coronavirus Infection Response and Employee Behavior Manual</li><li>Prohibition of unnecessary business trips, both domestic and overseas, except for service support.</li><li>Telecommuting for all employees who can work from remote locations</li><li>Recommendation of online meetings with customers and suppliers.</li></ol>



*If you have any questions, please contact us at the contact information below.



We offer our deepest condolences to those who have died due to the Coronavirus (COVID-19) and wish a speedy recovery of infected people and sincerely hope that the infection will be contained soon



GIGAPHOTON INC. President and CEO Katsumi Uranaka



<figure class="wp-block-table is-style-regular"><table><tbody><tr><td>Media inquiries Corporate Planning Department Kenji Takahisa:&nbsp;web_info@gigaphoton.com For inquiries regarding supply chain Purchasing Section, Production Department Hidenobu Kameda:&nbsp;hidenobu_kameda@gigaphoton.com Rika Shimizu:&nbsp;rika_shimizu@gigaphoton.com For inquiries regarding service support and distribution Customer Support Department (Japan) Takayuki Mizokami:&nbsp;takayuki_mizokami@gigaphoton.com (Overseas) Kenny Oka:&nbsp;kenji_oka@gigaphoton.com For inquiries regarding business discussions Sales Department Kiyotaka Uchida:&nbsp;kiyotaka_uchida@gigapoton.com For other inquiries Administration Department Mayumi Nakamura Overseas Offices Contact InformationGigaphoton Korea 史承學 (Seung Hak, Sa): sh_sa@gigaphoton.com Gigaphoton Taiwan Eiji Miyamoto: eiji_miyamoto@gigaphoton.com Limei Cheng: limei_cheng@gigaphoton.com Gigaphoton China Tetsuya Ogawa: tetsuya_ogawa@komatsu.com.cn 何胜杰:&nbsp;heshengjie@komatsu.com.cn Singapore Branch Jason Lim:&nbsp;Jason_lim@gigaphoton.com Gigaphoton USA Dennis Smith:&nbsp;dennis.s@gigaphotonusa.com James Graves:&nbsp;james.g@gigaphotonusa.com Gigaphoton Europe Erik de Bekker: GPE_inquiry@gigaphoton.com</td></tr></tbody></table></figure>

The Impact of the Japanese Government’s Declaration of a State of Emergency (7th Report)

Gigaphoton has been selected by the Ministry of Economy, Trade and Industry (METI) as as one of the assignee for the project &#8220;Research and Development of Enhanced Infrastructures for Post 5G Information and Communications Systems&#8221; and was introduced on the Ministry&#8217;s website.
Please take a look.
Gigaphoton&#8217;s development themes are listed in the following ” 3. Adoption results “
(two PDF files).
<a href="https://www.meti.go.jp/english/press/2021/0616_001.html">Click here for the link.</a>

Gigaphoton has been selected by METI asone of the assignee for the project “Research and Development of Enhanced Infrastructures for Post 5G Information and Communications Systems”.

Gigaphoton has won The Best Supplier in WFE Subsystems Award from VLSI Research, Inc. and has been introduced on their website.
Please take a look.
<a href="https://www.vlsiresearch.com/gigaphoton-honored-with-first-the-best-award-PFEL1SE1000WJOJ#page1">Click here for the link.</a>

Gigaphoton has won The Best Supplier in WFE Subsystems Award from VLSI Research, Inc.

Gigaphoton will present the following papers at the &#8220;<a href="https://spie.org/search?term=gigaphoton&amp;pageSize=25&amp;pagesVisited=1&amp;sortBy=Relevance&amp;eventName=Advanced_Lithography">SPIE Advanced Lithography 2021</a>&#8221; digital forum, to be held on February 22 (Sun.) through 26 (Thu.) 2021.
This conference is one of the largest event of advanced lithography for semiconductor manufacturing.
Gigaphoton presents following 8 papers discussing advanced lightsource technology which improves yield and availability for semiconductor manufacturing.
 
<ul>
<li>Oral Presentation</li>
</ul>
February 25, 2021 • 10:50 AM PST | Session 11: EUV Source [Extreme Ultraviolet (EUV) Lithography XII] 
Update of &gt;300W High Power LPP-EUV Source Challenge III for Semiconductor HVM                 
Author: Hakaru Mizoguchi; Gigaphoton Inc. (Japan) 
[Paper#: 11609-48]
February 24, 2021 • 9:40 AM PST | Session 4: Lithography Equipment and New Applications [Optical Lithography XXXIV] 
Latest ArF light source with speckle reduction technology for immersion lithography improving chip yield               
Author: Hirotaka Miyamoto; Gigaphoton Inc. (Japan) 
[Paper#: 11613-11]
February 25, 2021 • 8:50 AM PST | Session 8: Novel Optical and ebeam/ion [Novel Patterning Technologies 2021] 
Processability of organic material for semiconductor packaging by 248 nm excimer laser               
Author: Akira Suwa; Gigaphoton Inc. (Japan) 
[Paper#: 11610-27]
<ul>
<li>Poster Presentation</li>
</ul>
February 24, 2021 • 5:30 PM PST | Poster Session [Optical Lithography XXXIV] 
ArF lightsource “GT66A” for next-generation immersion lithography enhancing EPE and CD performance                
Author: Tommy Oga; Gigaphoton Inc. (Japan) 
[Paper#: 11613-30]
February 24, 2021 • 5:30 PM PST | Poster Session [Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV] 
Study of further CD and OL performance improvement by introducing new E95% spectral bandwidth and Wavelength functionality for ArFi lithography lightsource              
Author: Tommy Oga; Gigaphoton Inc. (Japan) 
[Paper#: 11611-92]
February 24, 2021 • 5:30 PM PST | Poster Session [Optical Lithography XXXIV] 
Advanced spectral engineering: A new way of process aware laser spectra optimization for optical lithography   
Author: Koichi Fujii; Gigaphoton Inc. (Japan) 
[Paper#: 11613-33]
February 24, 2021 • 5:30 PM PST | Poster Session [Optical Lithography XXXIV] 
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi Light source         
Author: Takehiko Tomonaga; Gigaphoton Inc. (Japan) 
[Paper#: 11613-29]
February 24, 2021 • 5:30 PM PST | Poster Session [Extreme Ultraviolet (EUV) Lithography XII] 
The development progress of the High Power LPP-EUV light source using a magnetic field 
Author: Hirokazu Hosoda; Gigaphoton Inc. (Japan) 
[Paper#: 11609-52]

Technical Papers in SPIE Advanced Lithography 2021

On January 13, in order to avoid the spread of the new coronavirus throughout the country, the Japanese government has extended the declaration of a state of emergency to seven prefectures (from 14 January to 7 February), including Tochigi Prefecture, where Gigaphoton&#8217;s headquarters are located.
We will continue to produce, supply equipment and parts to the customers, and provide service and support to the semiconductor fabs, as we are required by the authority to continue business even under the declared emergency situation. We will also continue to carefully check the production and supply capacity of our suppliers.
＜Our countermeasures against new coronavirus infection&gt;
<ol>
<li>Mandatory hand-washing and mask wearing</li>
<li>Employee temperature check every morning</li>
<li>Distribution of the New Coronavirus Infection Response and Employee Behavior Manual</li>
<li>Prohibition of unnecessary  business trips, both domestic and overseas, except for service support.</li>
<li>Telecommuting for all employees who are able to work from remote locations</li>
<li>Recommendation of online meetings with customers and suppliers.</li>
</ol>
*If you have any questions, please contact us at the contact information below.
We offer our deepest condolences to those who have died due to the Coronavirus (COVID-19) and wish a speedy recovery of infected people and sincerely hope that the infection will be contained soon
GIGAPHOTON INC. 
President and CEO
Katsumi Uranaka
<table width="662">
<tbody>
<tr>
<td width="662">Media inquiries 
Corporate Planning Department 
Kenji Takahisa: web_info@gigaphoton.com
For inquiries regarding supply chain 
Purchasing Section 
Production Department 
Hidenobu Kameda: hidenobu_kameda@gigaphoton.com 
Rika Shimizu: rika_shimizu@gigaphoton.com
For inquiries regarding service support and distribution 
Customer Support Department 
(Japan) Takayuki Mizokami: takayuki_mizokami@gigaphoton.com 
(Overseas) Kenny Oka: kenji_oka@gigaphoton.com
For inquiries regarding business discussions 
Sales Department 
Kiyotaka Uchida: kiyotaka_uchida@gigapoton.com
For other inquiries 
Administration Department 
Mayumi Nakamura
Overseas Offices Contact Information
Gigaphoton Korea 
史承學 (Seung Hak, Sa): sh_sa@gigaphoton.com
Gigaphoton Taiwan 
Eiji Miyamoto:  eiji_miyamoto@gigaphoton.com 
呉健賢: ken_wu@gigaphoton.com
Gigaphoton China 
Daisuke Satou: daisuke_satou@komatsu.com.cn 
何胜杰: heshengjie@komatsu.com.cn
Singapore Branch 
Jason Lim: Jason_lim@gigaphoton.com
Gigaphoton USA 
Dennis Smith  dennis.s@gigaphotonusa.com 
James Graves james.g@gigaphotonusa.com
Gigaphoton Europe 
Erik de Bekker  GPE_inquiry@gigaphoton.com</td>
</tr>
</tbody>
</table>

The Impact of the Japanese Government’s Declaration of a State of Emergency (6th Report)

<h2 class="has-text-align-center wp-block-heading" id="director-senior-executive-officertatsuo-enami">Director Senior Executive Officer Tatsuo Enami</h2>



Since being appointed as the director in June 2017, Dr. Enami has been the head of the corporate planning department with the responsibility of production, sales, customer support and the Singapore business. He also manages the Gigaphoton business and has been exploring the future of Gigaphoton continuously. We extensively interviewed Dr. Enami on the semiconductor industry, how an organization should be, and his dreams.



Dr. Enami, you have a long experience as the head of the sales department. Did your perspective change after becoming the director and head of the corporate planning department?


<div class="wp-block-image">
<figure class="alignleft size-full is-resized"><img decoding="async" src="/wp-content/uploads/2019/09/Enami_1-e1568958100881.jpg" alt="" class="wp-image-5786" width="400" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Enami_1-e1568958100881.jpg 600w, https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Enami_1-e1568958100881-300x200.jpg 300w" sizes="(max-width: 600px) 100vw, 600px" /></figure></div>


Yes, I think it changed. Earlier, my biggest concern was the expansion of the current business. I had focused on how to sell lasers and how to expand the maintenance business associated with it. I used to think that we have to make all possible efforts to bring sales and profit for the company, and this has not changed even now, but after becoming the director, I have started thinking &#8216;How to make this sustainable?&#8217;. Now, while focusing on the development of conventional lithography light sources and &#8220;expansion&#8221; of the sales business, we are also thinking about &#8220;growth&#8221; based on the development and sales of new products that are different from current products. I once again realized that safety and compliance should be our top priority to achieve this goal. The expansion and growth of an organization can only be achieved with a solid foundation, and even if a great product was developed, it may be short-lived with one mistake. I realized that this is the most important factor if Gigaphoton has to progress further.



What do you think is the future of the semiconductor industry? Also, what are your suggestions to realize that future?


<div class="wp-block-image">
<figure class="alignright size-full"><img loading="lazy" decoding="async" width="272" height="380" src="/wp-content/uploads/2022/04/Enami_2-e1568958041874.jpg" alt="" class="wp-image-7947" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2022/04/Enami_2-e1568958041874.jpg 272w, https://webapi.gigaphoton.global/wp-content/uploads/2022/04/Enami_2-e1568958041874-215x300.jpg 215w" sizes="auto, (max-width: 272px) 100vw, 272px" /></figure></div>


Since 2000, electronic devices such as PCs and mobile phones have been the driving force behind semiconductors, and it had been considered that the semiconductor business would reach its peak once the market for such devices is saturated. However, with the advent of concepts like IoT, the semiconductor business has recently started to grow. In IoT, semiconductors are used as sensors rather than as large electronic devices such as smartphones and PCs. The concept is to use sensors in all objects that exist in this world. In other words, applications that are entirely different from the large electronic devices, have emerged. ICT (Information and Communication Technology) has further accelerated and the application scope has expanded infinitely. &nbsp; What do you think about EUV* that is under development?



As there are no light sources with a shorter wavelength than EUV, it is a matter of time before EUV will become the standard light source. However, Gigaphoton has not decided on the timing to start EUV as a business. In any case, since we must contribute to the semiconductor industry through EUV, we will continue to focus on the development without giving up.



How do you think Gigaphoton will progress in the future?



There are two things that Gigaphoton can do. First is to strengthen the existing business of lithography light sources. We have formulated a specific roadmap that includes innovation through hybridization of the gas laser and solid-state laser, enhancing user support through data products and realization of EUV. The second is to utilize our excimer laser technology, which is Gigaphoton’s core competence in other fields. Starting with the development of light sources for annealing and small diameter processing, we have a long-term plan to develop an in-house system.



What do you think is essential for the company to make further progress in the future?



I would like to seek diversification. I want our company to become a group with people from various countries, whose thinking processes are different. So far, we had only Japanese people and were &#8216;happy with the status quo&#8217;, but now, nearly 90% of our customers are from overseas. In that sense, I would like to strengthen our product development and business by incorporating the opinions of people from other countries. Since the product has been globalized and can be used anywhere in the world, what Japanese people think holds good to a certain extent. However, in the case of support, it is a little different. This is because what customers expect differs depending on the country, such as whether the importance is given to &#8220;operation ratio&#8221; or &#8220;performance&#8221;. In that sense, ONE GIGAPHOTON system that started several years back, where field service engineers (FSE) of each country visits other countries, is excellent, as the FSE can experience in person what customers look for depending on the country. I think that in the future, the key will be support and development in anticipation of not only the differences in the workplace but also legal differences, etc.



Please tell us your thoughts on legal compliance and internal control, etc., as a director in charge of compliance.



In the last couple of years, compliance cases, which include internal reporting have increased throughout the Gigaphoton Group. Although this is partly due to the increase in the number of employees, I take a positive view that this is because of the increased awareness about compliance among the employees. However, if a person who has been nurtured through years of training and experience, resigns due to problems with compliance, then the company will lose a significant asset, which is very unfortunate. Therefore, the essential point is to ensure that compliance problems do not occur, for which it is necessary to have methods and mechanisms in place. I think that education is the important key to be able to keep up. We are conducting compliance workshops and plan to promote them in the future as well.



Finally, please tell us about your future dreams.


<div class="wp-block-image">
<figure class="alignleft size-medium"><img loading="lazy" decoding="async" width="300" height="214" src="/wp-content/uploads/2022/01/image-3-300x214.png" alt="" class="wp-image-7693" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2022/01/image-3-300x214.png 300w, https://webapi.gigaphoton.global/wp-content/uploads/2022/01/image-3.png 460w" sizes="auto, (max-width: 300px) 100vw, 300px" /></figure></div>


Regarding work, as I have mentioned so far, my dream is to achieve stable growth of the company. This is because I want Gigaphoton to grow up to be a company that will be around for 50 to 100 years. I want to continue my studies in business administration, which I have been studying for many years, and publish a few papers. In our business field of lithography equipment, we have manufactured the most precise device ever made in the world, and it is said that there is no other better device. As a person involved with the device, I want to leave the legacy of this device and matters that decide the outcome of business in proper order. In my personal life, my hobbies include appreciation of paintings, and I hope to restart revisiting overseas art galleries. Earlier I used to visit them often, but now I do not have much time. I would especially like to visit the Hermitage Museum in Russia as I have never been there.



*EUV &#8211; Stands for Extreme Ultraviolet which is a lithography technology that uses light sources that emit extremely short wavelength (13.5 nm) light to achieve finer-scale processing.

Leader Interview

<h2 class="has-text-align-center wp-block-heading" id="董事-常务执行董事takashi-saito">董事　常务执行董事 Takashi Saito</h2>



斋藤董事于2017年6月就任董事。2000年，Gigaphoton与优志旺电机开始创办合资企业（2011年解散），斋藤从优志旺电机调往Gigaphoton后转为Gigaphoton的正式员工。曾任开发部副部长、客户支持（CS）部部长，现任EUV开发部部长，同时担任分管激光开发、品质保证的负责人。本次，我们采访了本公司技术开发的关键人物斋藤先生。



斋藤先生担任董事已经一年半了，您认为现在公司面临怎样的课题呢？



<div class="wp-block-image"><figure class="alignleft size-full"><img loading="lazy" decoding="async" width="400" height="267" src="https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Saito_1-e1567582429186.jpg" alt="" class="wp-image-5781" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Saito_1-e1567582429186.jpg 400w, https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Saito_1-e1567582429186-300x200.jpg 300w" sizes="auto, (max-width: 400px) 100vw, 400px" /></figure></div>



<img decoding="async" src="http://localhost:8081/wp-content/uploads/2019/09/Saito_3-e1567582613214.jpg" alt="">进入经营决策层，对公司课题的认识比以前更加明确了。短期课题是强化光刻准分子激光(DUV)的竞争力。重点是零部件的长寿命化、能量和波长的稳定性。另外，当务之急是培养能够很好地与现场服务工程师（FSE）和当地法人进行沟通的全球化人才。长期课题是接下来的新业务开展和EUV*的开发。现有的DUV业务很顺利，我想这段时间是个很好的机会。当前需要开发面向平板显示器(FPD)的激光退火业务，并向其它领域发起挑战。不仅仅是光源业务，另外也播下了像FABSCAPE那样的分析用软件的种子，希望它能够早点成为支柱业务之一。关键是能够坚持不懈地做好EUV业务。希望能够充分发挥Gigafton的优势，尽快将其做成商务。



作为EUV开发部长，请斋藤先生谈谈您对EUV的想法。



在光刻行业，新一代光源毫无疑问是EUV，如果没有EUV，对于光源制造厂来说就不能算是最尖端企业。估计在数年后，当DUV实现商品化，全世界都是EUV而自己却没有时，那就失去了在光刻行业生存下去的内在动力。为了避免这一点，我呼吁充分运用本公司的碎片缓解技术，尽快打开局面。



从开始EUV开发算起，已超过15年了吧。



<div class="wp-block-image"><figure class="alignright size-medium"><img loading="lazy" decoding="async" width="258" height="300" src="https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Saito_3-e1567582613214-258x300.jpg" alt="" class="wp-image-5780" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Saito_3-e1567582613214-258x300.jpg 258w, https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Saito_3-e1567582613214.jpg 274w" sizes="auto, (max-width: 258px) 100vw, 258px" /></figure></div>



是啊。就算是DUV，如果象现在一样能够见到效益，大概也需要花费30年左右的时间。小松从2003年左右就开始了EUV研究，而我们公司着手进行研究和开发是在2011年解除了与优志旺的合资之后。虽然历史悠久，但从真正开始开发这层意义上来说，还是最近的事情。在我看来，与DUV相比，EUV在费用方面大不相同，对于本公司的规模来说，这是一项大生意，利用有限的研究经费把这项工作做到现在，我们的精英们做得很好。



您认为Gigaphoton的强项是什么？



我们是一家成立不到20年的公司，刚成立时的成员依然还在，我觉得这是件好事。作为公司的财产，如何把这些人留下的大多数成果进一步发扬光大，我认为这也是一个重要的课题。另外，随着公司的迅速发展，从其他公司也来了很多人，其中有几个人还是目前Gigaphoton的核心人物。这样，在公司的成长过程中，能够很好地吸取外来的血液，这也可以说是我们的一大优势吧。公司高层和负责人员之间没有隔阂，公司充满着自由的风气。另有光刻行业的著名传奇人物担任本公司顾问，我认为这也是一件很好的事情。从这些人那里能够学到很多东西，特别是从事研究开发的人员，我希望他们能向这些顾问们多多学习。



到现在为止，您对自己所经历的事情印象最深的是什么？



首先是2001年我担任开发工作的产品经理时，为现在的业界最大公司OEM开发出了单室方式的ArF准分子激光器。遗憾的是这款产品并不畅销，但是我认为那时候构筑起来的关系与后来双室激光器的销售紧密相连，并且打下了与客户建立良好关系的坚实基础。另外，从2007年开始的5年时间里，我先后担任了CS部的副部长、部长。之前我都是专心从事开发工作，担任领导工作后，刚开始有好多事情都不明白。现在无法想象的是，刚调到CS部的时候有零部件的盘点，那时候，由于一部分业务程序并不完善，出现了很大的差异。尽管如此，当时我心想：“盘点就是这样的吧？”，还是接受了那个盘点报告。当我得知这是异常情况后，我马上将其恢复到正常状态。调动当初完全没有库存管理的感觉，在一瞬间对那种异常没有实际感觉。多亏有了CS部的工作经验，让我学到了销售、服务、库存管理、出口管理、公司的经营体制等知识，觉得非常好。



最后，请齐藤先生谈谈您的梦想。



<div class="wp-block-image"><figure class="alignleft size-medium"><img loading="lazy" decoding="async" width="300" height="200" src="https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Saito_2-e1567582361196-300x200.jpg" alt="" class="wp-image-5779" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Saito_2-e1567582361196-300x200.jpg 300w, https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Saito_2-e1567582361196.jpg 600w" sizes="auto, (max-width: 300px) 100vw, 300px" /></figure></div>



<img decoding="async" src="http://localhost:8081/wp-content/uploads/2019/09/Saito_1-e1567582429186.jpg" alt="">首先，在工作方面，希望Gigaphoton将来能够成为销售额达到1000亿日元的企业。我想其中的关键还是EUV。如果EUV也能做到像现在的DUV一样，就能够实现这一目标。个人生活方面，每年都与家人和朋友去露营，已经持续了大约20年，不过，最近孩子长大了，各种准备工作几乎都是他们完成的。因此，我打算接下来体验一下夫妻二人的野营车旅行。然后乘坐各地的豪华列车旅行也不错。如果能够拥有闲暇时光，那我刚才说的目标就能够实现。



＊EUV）是一种采用被称为极端紫外线(EUV)的、波长非常短(13.5 nm)的光的光刻度技术，通过使用EUV光源，能够进行更微细的加工。

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