SPIE Advanced Lithography 2020でランチセッションの開催と論文発表

ギガフォトンは、SPIE Advanced Lithography 2020においてプライベートランチセミナーを開催致します。(日程:2月27日(木)、場所:米サンノゼ・ヒルトンホテル)


 


    

 

尚、2月23日(日)~2月27日(木)に開催されるSPIE Advanced Lithography 2020(会場: 米サンノゼ・コンベンションセンター)で次の論文発表を行います:)

 

  • プレゼンテーション発表 2月26日(水)

Time Schedule: 10:50 – 11:10 AM (Conference 11323, Session 8)
Challenge of >300W high power LPP-EUV source with long collector mirror lifetime for semiconductor HVM
Author: Hakaru Mizoguchi*, Tatsuya Yanagida, Hiroaki Nakarai, Gouta Niimi, Takashi Saitou, Tsuyoshi Yamada, Yasutsugu Usami, Toshihiro Oga; Gigaphoton Inc. (Japan)
[Paper#: 11323-30]

Time Schedule: 9:40 – 10:00 AM (Conference 11327, Session 4)
Next generation ArF Laser technologies for multiple-patterning immersion lithography supporting leading edge processes
Author(s): Toshihiro Oga*, Taku Yamazaki, Hiroaki Tsushima, Takeshi Ohta, Satoru Bushida; Gigaphoton Inc. (Japan)
[Paper#: 11327-18]

 

  • ポスター発表 2月26日(水) 5:30 PM – 7:30 PM

Update of development progress of the High Power LPP-EUV light source using a magnetic field
Author(s): Gouta Niimi*, Shinji Nagai, Tsukasa Hori, Yoshifumi Ueno, Tatsuya Yanagida, Kenichi Miyao, Hideyuki Hayashi, Yukio Watanabe, Tamotsu Abe, Hiroaki Nakarai, Takashi Saito and Hakaru Mizoguchi; Gigaphoton Inc. (Japan)
[Paper#: 11323-75]

Advanced E95 spectral engineering: performance of high repetition excimer laser measured with high accurate spectrometer
Author(s): Koichi Fujii*, Takahito Kumazaki, Masakazu Hattori, Yosuke Fujimaki, Toshihiro Oga, Junichi Fujimoto, Hakaru Mizoguchi; Gigaphoton Inc. (Japan)
[Paper#: 11327-34]

Approach for lightsource utilization improvement by extending Preventive Maintenance (PM) cycle along with performance monitoring feature
Author(s): Futoshi Sato*, Taku Yamazaki, Toshihiro Oga, Sophia Hu; Gigaphoton Inc. (Japan)
[Paper#: 11327-35]

Imaging performance enhancement by improvements of spectral performance stability and controllability on the cutting-edge “GT66A” ArF-i lightsource
Author(s): Miwa Igarashi*, Hirotaka Miyamoto, Masahide Katou, Hiroaki Tsushima, Masato Moriya, Akihiko Kurosu, Hiroshi Tanaka, Satoshi Tanaka, Takeshi Ohta, Satoru Bushida, Takashi Saitou, Hakaru Mizoguchi; Gigaphoton Inc. (Japan)
[Paper#: 11327-39]