In simple terms "kaizen" in Japanese means improvement and refinement. At Gigaphoton, our relentless pursuit of kaizen is at the heart of our ability to deliver unparalleled quality precision products.
All of our light source products are manufactured at our headquarters within the 146 acre Komatsu Oyama Plant. The Production Division at Gigaphoton has combined leading-edge information technology with the most advanced production technology, while carrying on the Komatsu Way tradition, promoting aggressive "Kaizen" quality control initiatives in all aspects of our operation. The result is high productivity of the most advanced light source products.
Our excimer laser light sources are manufactured at a dedicated cleanroom factory consisting cleanrooms of Class 5 through Class 8 (ISO 14644-1 cleanroom standards)/ Class 100 through Class 100,000 (US FED STD 209E cleanroom standards). The work flow of the Production Division encompasses sections devoted to Parts Management, Assembly, and Inspection.
At the Assembly Section, we use the proper cell production method 1) and line production method 2) corresponding to the characteristics of each module. The line production method is used for assembling ArF and KrF laser frames. Chambers are assembled in a booth of high cleanliness within a cleanroom. All assembly work is performed by experienced professionals in accordance with precise electronic manuals to ensure high quality. All critical management indices are recorded in the Quality Management System.
Post-assembly inspection is conducted by the cell production method, with a single staff member in charge of multiple cells. The use of automated inspection equipment allows automatic inspection on a 7x24 basis, thus shortening the manufacturing lead-time and enhancing productivity.