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December 13, 2018
Recognition of accomplishments for new technology and a pioneering role in the optoelectronics industry
On February 7, 2018, Kenjiro Sakurai Memorial Award was awarded to Hakaru Mizoguchi, Vice President & CTO, Junichi Fujimoto, Executive Officer and Deputy General Manager of Research, and Koji Kakizaki, Research Department Manager from Gigaphoton, together with Shuntaro Watanabe, emeritus professor of the University of Tokyo, for the theme of Research, Development and Implementation of a High-Output ArF Excimer Laser for Semiconductor Lithography.
Sponsored by the Optoelectronics Industry and Technology Development Association and in memory of (the late) Kenjiro Sakurai, a trustee of the association who played a pioneering role for optical technology research, leadership and propagation and made great contributions to the development of optoelectronics industry technology, the award is given to the persons whose research and development of new technology contributed to new developments in optoelectronics industry and who played pioneering roles contributing to such developments. This year, 2 groups out of 14 groups, including members of our company, were awarded the prize for contributions since 2007.
CTO Hakaru Mizoguchi gave an award reception commemorative speech on November 2 at the Photonic Network Technologies Study Group, which was organized by the association and held at the Tokyo Institute of Technology. Mizoguchi made the following comments. “ArF excimer lasers have become essential light sources for the semiconductor industry, which is now said to be a 40 trillion yen industry. We could not be more grateful to receive this prize and be rewarded for contributing to the society through the ArF excimer laser for semiconductor lithography we developed and implemented that plays a pioneering role in the industry. During the development, we were greatly assisted by Dr. Shuntaro Watanabe, who is an emeritus professor of the University of Tokyo, and we are extremely happy that he is able to receive the prize with us as a member of our group. I would like to express my gratitude once again. We look forward to continue the research and development of unique, ground-breaking technology around excimer lasers, in order to contribute to the development of global industry.”
From left to right: Mr. Fujimoto, Mr. Mizoguchi, Mr. Watanabe, and Mr. Kakizaki
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2018年12月13日
光産業の新技術、先駆的役割を果たしたことが認められて
2018年2月7日「半導体リソグラフィ用高出力ArFエキシマレーザの研究開発とその実用化」をテーマに、ギガフォトンから、代表取締役副社長兼CTO溝口計、執行役員研究部副部長藤本准一、研究部担当部長柿崎弘司が、東京大学名誉教授渡部俊太郎氏と連名で、「櫻井健二郎氏記念賞」を受賞しました。
同賞は一般財団法人光産業技術振興協会が主催するもので、光技術の研究と指導、および普及活動において先駆的役割を果たし、光産業技術の発展に多大な貢献をされた同協会の理事（故）櫻井健二郎氏にちなみ、光産業の新展開に貢献する新技術の研究開発、および先駆的役割を果たした者にあたえられます。今年度は2007年以降の業績を対象に、14グループの中から、当社メンバーを含む2グループが受賞となりました。
また、11月2日には東京工業大学内で開催された、同協会主催の「光ネットワーク産業・技術研究会」において、CTO溝口計が受賞記念講演を行いました。溝口はこうコメントしています。「ArFエキシマレーザは、今や40兆円の規模といわれる半導体業界において、必要不可欠な光源となっています。この度の受賞にて、我々が研究・実用化した半導体リソグラフィ用ArFエキシマレーザが産業界にて先駆的役割を果たし、世の中に貢献したことを顕彰して頂き、感謝に堪えません。また開発当時大変ご助力頂いた東京大学名誉教授の渡部俊太郎様におかれましても、今回我々のグループのメンバーとして共に受賞できましたことを大変嬉しく思い、また改めて感謝申し上げたいと思います。我々は今後もエキシマレーザを軸に、ユニークで画期的な技術を研究・開発し、世界の産業の発展に貢献していきたいと思います。」
左から藤本氏、溝口氏、渡部氏、柿崎氏
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