It will publish papers at the largest conference on semiconductor lithography technology

Oyama, Tochigi; February 15, 2024, Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources for semiconductor lithography, participates in SPIE Advanced Lithography + Patterning 2024, held in San Jose, California from Sunday, February 25 through 29, 2024 PST.

Gigaphoton will discuss the state-of-the-art ArF immersion product the GT80A, Gigaphoton’s sustainability solution, and availability improvements with DUV lightsource technologies. In addition, Gigaphoton will present updates on EUV lightsource technology for inspections and DUV technology for advanced packaging solutions.

* If you have any inquiries regarding the above presentation, please feel free to contact us.

Oral Presentations:

1) Improved ArFi scanner throughput and process yield through a next generation DUV light source featuring high-repetition rate and enhanced speckle contrast [Paper#: 12953-6]
2) Enhancing M2 beam quality factor of in high power KrF laser for glass micro-via fabrication in advanced packaging [Paper#: 12956-17]

Poster Presentations:

3) EPE enhancement by implementing with E95% tuning functionality and resist optimization [Paper#: 12953-52]
4) Enhancing wafer productivity through increased repetition rate to 6.75khz with GT80A as ArF immersion light source [Paper#: 12953-54]
5) Maximizing availability by enhancing operational efficiency and implementing sophisticated maintenance strategies in complex ArFi light source [Paper#: 12953-55]
6) Development progress of Gigaphoton’s LPP EUV light source for inspection systems [Paper#: 12953-62]


Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit

Media Contact:
Corporate Planning Department
Kenji Ohishi
TEL: +81-285-37-6931