Achieved stable 15W EUV output on prototype system– marking another critical step forward toward achieving high power LPP light sources for EUV lithography
OYAMA, JAPAN; September 30, 2013 — Gigaphoton, Inc. a major lithography light source manufacturer, announced today that the company has jointly developed a high power CO2 drive laser for Extreme Ultraviolet (EUV) light sources with Mitsubishi Electric Corporation, a leading manufacturer of electric and electric equipment. Likewise, an average output level of 15W was achieved on a development EUV system – representing another step forward in realizing production level EUV light sources.
The 15W EUV light output was confirmed on a prototype EUV light source. Furthermore, initial experiments conducted on the jointly developed CO2 drive laser has produced output power of over 20kW, signifying that a key piece of technology necessary for producing EUV output levels of 250W which is necessary for high volume manufacturing (HVM) is has been realized.
Gigaphoton has focused on developing high output, stable, and economical LPP light sources since 2002. During that time, Gigaphoton has introduced several unique technologies that have received industry-wide attention. The recent achievements can be attributed to Gigaphoton’s highly advanced technical capabilities, bringing the company one step closer to achieving mass production of LPP light sources.
“I am very pleased that the CO2 driver laser jointly developed with Mitsubishi Electric Corporation has demonstrated sufficient output levels necessary for production and that our unique LPP light source technology is showing firm progress towards high volume production level output” said Hitoshi Tomaru, President and CEO of Gigaphoton. “This also demonstrates progress towards realizing our vision for a Green, environmentally friendly LPP light source. Our efforts will help to bring the industry closer to realizing EUV lithography scanners for high volume manufacturing.”
Gigaphoton is striving to offer the most environmentally friendly, cost effective, and powerful EUV light source possible through unique technologies such as double pulse laser produced plasma (LPP) and debris mitigation using superconducting magnets.
Tin (Sn) droplets are irradiated using a high energy pulse driver laser to create Tin plasma which is used to generate the EUV light. Improving the conversion efficiency of the EUV light generation and achieving efficient and effective mitigation of debris from the collector mirror are key issues that must be resolved for production level EUV light sources.
Highly efficient EUV output is possible through Gigaphoton’s unique technology based on the optimized use of a short wavelength solid-state pre-pulse laser in conjunction with a CO2 main pulse laser. Efficient and effective debris mitigation is also possible through Gigaphoton’s unique method of utilizing a superconducting magnet to generate a powerful magnetic field that guide the unwanted debris resulting from the thermal expansion of the Tin droplets towards the Tin catcher. This results in further reduction of cost and downtime.
Gigaphoton will continue to pursue breakthrough achievements in technology to bring the industry closer to realizing EUV lithography tools for high volume manufacturing.
Since its founding in 2000, Gigaphoton has developed and delivered user-friendly, high-performance DUV laser light sources used by major semi-conductor chipmakers in the Pan-Asian, US and European regions.
Gigaphoton's patented, innovative LPP EUV technology solutions lead the way to cost-effective, highly productive lithography sources for high-volume production. With a global business outlook, Gigaphoton strives to be the world’s number-one lithography light source provider, focusing on end-user needs in every phase of its business, from research and development to manufacturing to best-in-class reliability and world-class customer support. For more information please visit www.gigaphoton.com
Corporate Planning Division