Gigaphoton Research Department Technical Advisor Dr. Akiyoshi Suzuki Receives the “SPIE Frits Zernike Award” and CTO Dr. Hakaru Mizoguchi is Elected as Fellow

February 6, 2019

Outstanding achievements in the industry and significant contributions to the Society are recognized

Oyama, Tochigi; February 6, 2019 -- GIGAPHOTON Inc. (Head Office: Oyama, Tochigi; President & CEO: Katsumi Uranaka), a manufacturer of light sources used in semiconductor lithography, announced that the International Society for Optics and Photonics (SPIE) has awarded Dr. Akiyoshi Suzuki, Technical Advisor to the Gigaphoton Research Department, the “SPIE Frits Zernike Award in Microlithography”, and elected Dr. Hakaru Mizoguchi, CTO and Vice President, as SPIE Fellow.

The Frits Zernike Award, founded in 2002 by SPIE (a major academic society for lithography technology), is a prestigious award, often spoken of as the "Nobel prize of the lithography world", and named in honor of Dr. Zernike, who received the Nobel Prize for Physics in 1953 with the phase-contrast microscope, and who has had a major influence on lithography technology. The award is presented only to those who have demonstrated particularly outstanding achievements in the industry, and while there have now been 14 recipients, Dr. Suzuki is the first Japanese winner. The award for Dr. Suzuki honors his achievements over a career of more than 40 years, with contributions made to all manner of technological innovations in optical lithography equipment, including contact exposure machines, 1: 1 scanners, g-line, i-line, KrF steppers, KrF / ArF / immersion scanners, EUV exposure machines, and NIL, and extending from the dawn of the era up to the present day.
Dr. Suzuki offered the following comments: “I think the fact that a person from industry has received an award from the academic association, SPIE, is proof that the lithography technology that we research and develop has a strongly scientific dimension, and that it plays a major role in our challenging high-tech industry. I would like to express my gratitude to all those with whom I have worked. ”

In addition, Gigaphoton Vice President and CTO, Dr. Hakaru Mizoguchi, was elected as a SPIE Fellow - an honor given to persons who have contributed to lithography technology over many years. The title was awarded in acknowledgment of Dr. Mizoguchi's approximately 30 year record of developing advanced products, ranging from DUV lasers (KrF / ArF / F2) to EUV light sources, and his contribution of over 100 manuscripts supporting this. The election of a Fellow as a light source engineer also represents a world first. Furthermore, with the election of Dr. Mizoguchi, and the inclusion of alumnus, Shinji Okazaki, three of the six Japanese Fellows of the Society involved with lithography now have links to Gigaphoton.
Dr. Mizoguchi commented, “I take my election as Fellow to be an acknowledgement, not simply of my contributions through manuscripts, but of the efforts made by all staff and associates of Gigaphoton in transforming those written ideas into actual products. I would like to share my gratitude with everyone here and thank you once again. I hope to devote myself both to advancing technological development and nurturing the next generation, so as not to discredit the title of Fellow.”


*February 25 - The award ceremony for Dr. Suzuki and Dr. Mizoguchi will take place at “SPIE Welcome and Plenary Presentations”.
*February 28 - Dr. Suzuki and Dr. Mizoguchi will deliver lectures at the “GIGAPHOTON-SPIE Lunch Session”.


 <Dr. Akiyoshi Suzuki>                     <Dr. Hakaru Mizoguchi>



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