Featuring advanced research at the premier conference on semiconductor technology
Oyama, Tochigi; February 12, 2026, Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Tatsuo Enami), a manufacturer of lightsources for semiconductor lithography, will be participating in SPIE Advanced Lithography + Patterning 2025, which will take place in San Jose, California from Sunday, February 22 through 26, 2026 PST.
Gigaphoton will present cutting-edge technologies related to DUV lightsources for lithography, including gas consumption reduction, GHG reduction, minimization of LER/LWR through spectral width and resist optimization, and further process window optimization.
In addition, Gigaphoton will provide updates on EUV lightsource technology for inspections and DUV technology for advanced packaging solutions.
If you have any inquiries regarding the presentations , please feel free to contact us.
Presentations:
| 1) Innovations in lightsource technology: Gas reduction and process enhancement [Paper#: 13979-20] |
| 2) Excimer laser gas usage reduction technology for semiconductor manufacturing [Paper: 13979-58] |
| 3) Reducing power consumption of excimer lasers to cut greenhouse gas emissions in lithography processes [Paper: 13979-59] |
| 4) Reduction of LER/LWR through resist optimization and widening of laser spectral width: Process window acquisition [Paper: 13979-56] |
| 5) High-brightness and compact LPP-EUV light source for inspection systems [Paper: 13979-62] |
| 6) High aspect ratio processing of high CTE glass using KrF excimer laser [Paper: 13982-64] |
About GIGAPHOTON
Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit https://gigaphoton.com/
| Media Contact: GIGAPHOTON Inc. Corporate Planning Department Email: web_info@gigaphoton.com |