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<p>Oyama, Tochigi; September 29, 2023, Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources for semiconductor lithography, exhibits to APCS (Advanced Packaging and Chiplet Summit) 2023, held in Tokyo Big Sight, Tokyo, Japan from Wednesday, December 13 through Friday, December 15, 2023 JST.</p>



<p>Gigaphoton will introduce its advanced ablation processing products, including the latest test results.</p>



<p>We would like to welcome your visit.</p>



<figure class="wp-block-table"><table><tbody><tr><td>Exhibition</td><td>Advanced Packaging and Chiplet Summit 2023</td></tr><tr><td>HP Address</td><td><a href="https://www.semiconjapan.org/en/apcs">https://www.semiconjapan.org/en/apcs</a></td></tr><tr><td>Holding Period</td><td>from December 13 through 15</td></tr><tr><td>Place</td><td>Tokyo Big Sight</td></tr><tr><td>Booth No.</td><td>2748</td></tr></tbody></table></figure>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br><br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


Gigaphoton exhibits to Advanced Packaging and Chiplet Summit 2023


<p class="has-text-align-center">It will publish papers at the largest conference on semiconductor lithography technology</p>



<p>Oyama, Tochigi; February 17, 2023, <a href="https://gigaphoton.com/">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources for semiconductor lithography, participates in <a href="https://spie.org/conferences-and-exhibitions/advanced-lithography-and-patterning">SPIE Advanced Lithography + Patterning 2023</a>, held in San Jose, California from Sunday, February 26 through Thursday, March 2, 2023 PST.</p>



<p>Gigaphoton will introduce the latest technology on yield improvement and sustainability solution with DUV lightsources technology. In addition, Gigaphoton will present the progress of research and development on EUV lightsources.</p>



<p>* If you wish to cite the papers in your materials, please contact us.</p>



<p>Oral Presentations:</p>



<figure class="wp-block-table"><table><tbody><tr><td>1) <strong>To enhance EPE and availability simultaneously by the leading-edge immersion light source</strong> [Paper#: 12494-44]</td></tr><tr><td>2) <strong>Plasma dynamics and future of LPP-EUV source for semiconductor manufacturing</strong> [Paper#: 12494-45]</td></tr></tbody></table></figure>



<p>Papers:</p>



<figure class="wp-block-table"><table><tbody><tr><td>3) <strong>Development progress of key components for LPP-EUV light sources</strong> [Paper#: 12494-51]</td></tr><tr><td>4) <strong>The development of a machine learning-based excimer laser performance simulator for engineering maintenance decisions </strong>[Paper#: 12496-101]</td></tr><tr><td>5) <strong>Contributing to sustainability delivers maximizing availability by the latest light source GT66A for the ArF immersion lithography</strong> [Paper#: 12494-60]</td></tr></tbody></table></figure>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br><br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


NewsNews

Gigaphoton exhibits to Advanced Packaging and Chiplet Summit 2023

Gigaphoton unveils technology solutions at SPIE Advanced Lithography + Patterning 2023