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<p class="has-text-align-center">It will publish papers at the largest conference on semiconductor lithography technology</p>



<p>Oyama, Tochigi; February 17, 2023, <a href="https://gigaphoton.com/">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources for semiconductor lithography, participates in <a href="https://spie.org/conferences-and-exhibitions/advanced-lithography-and-patterning">SPIE Advanced Lithography + Patterning 2023</a>, held in San Jose, California from Sunday, February 26 through Thursday, March 2, 2023 PST.</p>



<p>Gigaphoton will introduce the latest technology on yield improvement and sustainability solution with DUV lightsources technology. In addition, Gigaphoton will present the progress of research and development on EUV lightsources.</p>



<p>* If you wish to cite the papers in your materials, please contact us.</p>



<p>Oral Presentations:</p>



<figure class="wp-block-table"><table><tbody><tr><td>1) <strong>To enhance EPE and availability simultaneously by the leading-edge immersion light source</strong> [Paper#: 12494-44]</td></tr><tr><td>2) <strong>Plasma dynamics and future of LPP-EUV source for semiconductor manufacturing</strong> [Paper#: 12494-45]</td></tr></tbody></table></figure>



<p>Papers:</p>



<figure class="wp-block-table"><table><tbody><tr><td>3) <strong>Development progress of key components for LPP-EUV light sources</strong> [Paper#: 12494-51]</td></tr><tr><td>4) <strong>The development of a machine learning-based excimer laser performance simulator for engineering maintenance decisions </strong>[Paper#: 12496-101]</td></tr><tr><td>5) <strong>Contributing to sustainability delivers maximizing availability by the latest light source GT66A for the ArF immersion lithography</strong> [Paper#: 12494-60]</td></tr></tbody></table></figure>



<p>About GIGAPHOTON</p>



<p>Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://gigaphoton.com/">https://gigaphoton.com/</a></p>



<figure class="wp-block-table"><table><tbody><tr><td>Media Contact:<br>GIGAPHOTON Inc.<br>Corporate Planning Department<br>Kenji Ohishi<br>TEL: +81-285-37-6931<br>Email: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a></td></tr></tbody></table></figure>


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Gigaphoton unveils technology solutions at SPIE Advanced Lithography + Patterning 2023