Oyama, Tochigi; June 26, 2026, Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Tatsuo Enami), a manufacturer of lightsources for semiconductor lithography, announced that it will participate in NGL Workshop 2026, which will held at Institute of Science Tokyo, Japan on July 2 and 3.
We look forward to welcoming you to Gigaphoton’s presentations.
Overview
| Conference | NGL Workshop 2026 |
| Official Website | https://annex.jsap.or.jp/NGL/ |
| Holding Period | July 2(Tue.) – July 3(Fri.), 2026 |
| Place | Ookayama Campus, Institute of Science Tokyo 2-12-1, Ookayama, Meguro-ku, Tokyo, Japan |
| Paper Title Presenters | Oral Presentations 14:20-, July 2, 2026 Process Window Optimization in ArFi Lithography Considering EPE and Laser Spectrum, and Gigaphoton’s Rare Gas Solutions Takamitsu Komaki (Gigaphoton) 14:45-, July 2, 2026 Processing for Advanced Packaging using KrF Excimer Laser Akira Suwa, Daisuke Momiyama, Kanta Wataji, Tomonari Tanaka, Michiaki Nemoto, Yasufumi Kawasuji（Gigaphoton） Poster Sessions (17:25-18:25, July 2, 2026) P1 Reduction of LER/LWR through Resist Optimization and Widening of Laser Spectral Width: Process Window Acquisition T. Kobayashi1, K. Fujii1, T. Komaki1, T. Kumazaki1, K. Kakizaki1, H. Chiu2, R. Yasue2, Y. Mukai2, Y. Suzuki2 (1. Gigaphoton Inc., 2. Sumitomo Chemical Co., Ltd.) P2 Reducing Power Consumption of Excimer Lasers to Cut Greenhouse Gas Emissions in Lithography Processes Takuya Ogawa, Youichi Yamanouchi, Youichi Sasaki, Makoto Tanaka, Tsukasa Hori, Kouji Kakizaki (Gigaphoton Inc.) P3 Excimer laser gas usage reduction technology for semiconductor manufacturing Ryouta Kujira, Takeru Niinuma, Masanori Yashiro, Hiroyuki Nogawa, Hiroshi Umeda, Katsuhiko Wakana, Satoshi Tanaka and Hiroaki Nakarai.(Gigaphoton.Inc) P28 High-brightness and compact LPP-EUV light source for inspection systems Chiharu Suzuki, Kotaro Miyashita, Takashi Suganuma, Fumio Iwamoto, Shinji Nagai, Kenichi Miyao, Hideyuki Hayashi, Takuya Ishii, Yoshifumi Ueno, Tamotsu Abe, and Hiroaki Nakarai (Gigaphoton) |
| Media Contact: GIGAPHOTON Inc. Corporate Planning Department Email: web_info@gigaphoton.com |