Oyama, Tochigi; August 28, 2026, Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Tatsuo Enami), a manufacturer of lightsources for semiconductor lithography, announced that it will participate in SPIE Photomask Technology + EUV Lithography, which will be held at Monterey Conference Center, California, the United States on September 8.
SPIE Photomask Technology + EUV Lithography is one of the semiconductor mask industry’s leading international technical conferences, bringing together experts in photomask technology, EUV lithography, patterning, metrology, inspection, and process control.
At the conference, Gigaphoton will present its latest research and development results for new features of a high-brightness, compact LPP-EUV lightsource for actinic inspection. During this presentation, Gigaphoton will showcase its technologies and initiatives in the field of EUV mask inspection.
We look forward to welcoming you to Gigaphoton’s presentation.
Overview
| Conference | SPIE Photomask Technology + EUV Lithography 2026 |
| Official Website | https://spie.org/conferences-and-exhibitions/photomask-technology-and-extreme-ultraviolet-lithography |
| Holding Period | September 8 (Tue.) – September 11(Fri.), 2026 |
| Place | Monterey Conference Center One Portola Plaza, Monterey, CA 93940, United States |
| Poster Sessions (18:00-19:30, September 8, 2026) High-brightness and compact LPP-EUV light source for inspection systems（14273-64） Mamoru Sato, Takashi Suganuma, Fumio Iwamoto, Shinji Nagai, Kenichi Miyao, Takuya Ishii, Hideyuki Hayashi, Yoshifumi Ueno, Tamotsu Abe, and Hiroaki Nakarai (Gigaphoton Inc.) |
About GIGAPHOTON
Established in 2000, GIGAPHOTON is a leading provider of KrF and ArF excimer laser lightsources for semiconductor lithography.
GIGAPHOTON enables semiconductor manufacturers worldwide to achieve higher productivity, superior quality, and more sustainable manufacturing through its advanced laser technologies.
Its global service network delivers customer-focused support, dedicated to maximizing availability and stable production operations for semiconductor manufacturers around the world.
Leveraging its expertise in laser and lithography technologies, GIGAPHOTON is expanding its capabilities beyond semiconductor lithography into new fields, including EUV lightsources, excimer lasers for advanced packaging and advanced material processing applications..
For more information, please visit https://www.gigaphoton.com
| Media Contact: GIGAPHOTON Inc. Corporate Planning Department Email: web_info@gigaphoton.com |