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Gigaphoton will present the following papers at the &#8220;<a href="https://spie.org/search?term=gigaphoton&amp;pageSize=25&amp;pagesVisited=1&amp;sortBy=Relevance&amp;eventName=Advanced_Lithography">SPIE Advanced Lithography 2021</a>&#8221; digital forum, to be held on February 22 (Sun.) through 26 (Thu.) 2021.
This conference is one of the largest event of advanced lithography for semiconductor manufacturing.
Gigaphoton presents following 8 papers discussing advanced lightsource technology which improves yield and availability for semiconductor manufacturing.
 
<ul>
<li>Oral Presentation</li>
</ul>
February 25, 2021 • 10:50 AM PST | Session 11: EUV Source [Extreme Ultraviolet (EUV) Lithography XII] 
Update of &gt;300W High Power LPP-EUV Source Challenge III for Semiconductor HVM                 
Author: Hakaru Mizoguchi; Gigaphoton Inc. (Japan) 
[Paper#: 11609-48]
February 24, 2021 • 9:40 AM PST | Session 4: Lithography Equipment and New Applications [Optical Lithography XXXIV] 
Latest ArF light source with speckle reduction technology for immersion lithography improving chip yield               
Author: Hirotaka Miyamoto; Gigaphoton Inc. (Japan) 
[Paper#: 11613-11]
February 25, 2021 • 8:50 AM PST | Session 8: Novel Optical and ebeam/ion [Novel Patterning Technologies 2021] 
Processability of organic material for semiconductor packaging by 248 nm excimer laser               
Author: Akira Suwa; Gigaphoton Inc. (Japan) 
[Paper#: 11610-27]
<ul>
<li>Poster Presentation</li>
</ul>
February 24, 2021 • 5:30 PM PST | Poster Session [Optical Lithography XXXIV] 
ArF lightsource “GT66A” for next-generation immersion lithography enhancing EPE and CD performance                
Author: Tommy Oga; Gigaphoton Inc. (Japan) 
[Paper#: 11613-30]
February 24, 2021 • 5:30 PM PST | Poster Session [Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV] 
Study of further CD and OL performance improvement by introducing new E95% spectral bandwidth and Wavelength functionality for ArFi lithography lightsource              
Author: Tommy Oga; Gigaphoton Inc. (Japan) 
[Paper#: 11611-92]
February 24, 2021 • 5:30 PM PST | Poster Session [Optical Lithography XXXIV] 
Advanced spectral engineering: A new way of process aware laser spectra optimization for optical lithography   
Author: Koichi Fujii; Gigaphoton Inc. (Japan) 
[Paper#: 11613-33]
February 24, 2021 • 5:30 PM PST | Poster Session [Optical Lithography XXXIV] 
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi Light source         
Author: Takehiko Tomonaga; Gigaphoton Inc. (Japan) 
[Paper#: 11613-29]
February 24, 2021 • 5:30 PM PST | Poster Session [Extreme Ultraviolet (EUV) Lithography XII] 
The development progress of the High Power LPP-EUV light source using a magnetic field 
Author: Hirokazu Hosoda; Gigaphoton Inc. (Japan) 
[Paper#: 11609-52]

Technical Papers in SPIE Advanced Lithography 2021

On December 22, 2020, Gigaphoton donated automatic alcohol sprayers for preventing virus infections to all elementary and junior high schools in Oyama City as part of its 20th anniversary project to contribute to the community.
Between December 22 and 24, Gigaphoton employees visited 36 schools in the city and installed the automatic alcohol sprayers. We received many gratitude from the schools, such as, &#8220;This is very helpful in preventing infection among the students.” and a letter of appreciation was also presented by the Mayor.
Gigaphoton will continue to make every effort to contribute not only to the development of our customers and the industry, but also to the health and well-being of the people in the community.
<div id="attachment_6722" style="width: 310px" class="wp-caption aligncenter"><img loading="lazy" decoding="async" aria-describedby="caption-attachment-6722" class="wp-image-6722 size-medium" src="https://webapi.gigaphoton.global/wp-content/uploads/2021/01/8fa0d593c50be4eb8f339a14ae0233bd-scaled-1-300x210.gif" alt="Presentation of the Letter of Appreciation at the Mayor's official office" width="300" height="210" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2021/01/8fa0d593c50be4eb8f339a14ae0233bd-scaled-1-300x210.gif 300w, https://webapi.gigaphoton.global/wp-content/uploads/2021/01/8fa0d593c50be4eb8f339a14ae0233bd-scaled-1-1024x716.gif 1024w, https://webapi.gigaphoton.global/wp-content/uploads/2021/01/8fa0d593c50be4eb8f339a14ae0233bd-scaled-1-768x537.gif 768w, https://webapi.gigaphoton.global/wp-content/uploads/2021/01/8fa0d593c50be4eb8f339a14ae0233bd-scaled-1-1536x1073.gif 1536w, https://webapi.gigaphoton.global/wp-content/uploads/2021/01/8fa0d593c50be4eb8f339a14ae0233bd-scaled-1-2048x1431.gif 2048w, https://webapi.gigaphoton.global/wp-content/uploads/2021/01/8fa0d593c50be4eb8f339a14ae0233bd-scaled-1-1568x1096.gif 1568w" sizes="auto, (max-width: 300px) 100vw, 300px" />Presentation of the Letter of Appreciation at the Mayor&#8217;s official office</div>

Gigaphoton Donates Automatic alcohol sprayers to Elementary and Junior High Schools in Oyama City

On January 13, in order to avoid the spread of the new coronavirus throughout the country, the Japanese government has extended the declaration of a state of emergency to seven prefectures (from 14 January to 7 February), including Tochigi Prefecture, where Gigaphoton&#8217;s headquarters are located.
We will continue to produce, supply equipment and parts to the customers, and provide service and support to the semiconductor fabs, as we are required by the authority to continue business even under the declared emergency situation. We will also continue to carefully check the production and supply capacity of our suppliers.
＜Our countermeasures against new coronavirus infection&gt;
<ol>
<li>Mandatory hand-washing and mask wearing</li>
<li>Employee temperature check every morning</li>
<li>Distribution of the New Coronavirus Infection Response and Employee Behavior Manual</li>
<li>Prohibition of unnecessary  business trips, both domestic and overseas, except for service support.</li>
<li>Telecommuting for all employees who are able to work from remote locations</li>
<li>Recommendation of online meetings with customers and suppliers.</li>
</ol>
*If you have any questions, please contact us at the contact information below.
We offer our deepest condolences to those who have died due to the Coronavirus (COVID-19) and wish a speedy recovery of infected people and sincerely hope that the infection will be contained soon
GIGAPHOTON INC. 
President and CEO
Katsumi Uranaka
<table width="662">
<tbody>
<tr>
<td width="662">Media inquiries 
Corporate Planning Department 
Kenji Takahisa: web_info@gigaphoton.com
For inquiries regarding supply chain 
Purchasing Section 
Production Department 
Hidenobu Kameda: hidenobu_kameda@gigaphoton.com 
Rika Shimizu: rika_shimizu@gigaphoton.com
For inquiries regarding service support and distribution 
Customer Support Department 
(Japan) Takayuki Mizokami: takayuki_mizokami@gigaphoton.com 
(Overseas) Kenny Oka: kenji_oka@gigaphoton.com
For inquiries regarding business discussions 
Sales Department 
Kiyotaka Uchida: kiyotaka_uchida@gigapoton.com
For other inquiries 
Administration Department 
Mayumi Nakamura
Overseas Offices Contact Information
Gigaphoton Korea 
史承學 (Seung Hak, Sa): sh_sa@gigaphoton.com
Gigaphoton Taiwan 
Eiji Miyamoto:  eiji_miyamoto@gigaphoton.com 
呉健賢: ken_wu@gigaphoton.com
Gigaphoton China 
Daisuke Satou: daisuke_satou@komatsu.com.cn 
何胜杰: heshengjie@komatsu.com.cn
Singapore Branch 
Jason Lim: Jason_lim@gigaphoton.com
Gigaphoton USA 
Dennis Smith  dennis.s@gigaphotonusa.com 
James Graves james.g@gigaphotonusa.com
Gigaphoton Europe 
Erik de Bekker  GPE_inquiry@gigaphoton.com</td>
</tr>
</tbody>
</table>

The Impact of the Japanese Government’s Declaration of a State of Emergency (6th Report)

On January 7, in order to avoid the spread of the new coronavirus throughout the country, the Japanese government declared a second state of emergency in the Tokyo metropolitan area (Kanagawa, Chiba, and Saitama prefectures) from January 8 to February 7.
Although Tochigi Prefecture, where Gigaphoton&#8217;s headquarters is located, is not in the target area, we will continue to produce, supply equipment and parts to the customers, and provide service and support to the semiconductor fabs, as they are required by the authority to continue business even under the declared emergency situation. We will also continue to carefully check the production and supply capacity of our suppliers.
＜Our countermeasures against new coronavirus infection&gt;
<ol>
<li>Mandatory hand-washing and mask wearing</li>
<li>Employee temperature check every morning</li>
<li>Distribution of the New Coronavirus Infection Response and Employee Behavior Manual</li>
<li>Pprohibition of unnecessary  business trips, both domestic and overseas, except for service support.</li>
<li>Telecommuting for employees who use public transportation from state of emergency area or employees who have difficulty commuting due to other factors</li>
<li>Recommendation of online meetings with customers and suppliers.</li>
</ol>
We offer our deepest condolences to those who have died due to the Coronavirus (COVID-19) and wish a speedy recovery of infected people and sincerely hope that the infection will be contained soon.
GIGAPHOTON INC. 
President and CEO
Katsumi Uranaka
＊If you have any questions, please contact us at the contact information below.
<table width="662">
<tbody>
<tr>
<td width="662">Media inquiries 
Corporate Planning Department 
Kenji Takahisa:  web_info@gigaphoton.com
For inquiries regarding supply chain 
Purchasing Section 
Production Department 
Hidenobu Kameda: hidenobu_kameda@gigaphoton.com 
Rika Shimizu: rika_shimizu@gigaphoton.com
For inquiries regarding service support and distribution 
Customer Support Department 
(Japan) Takayuki Mizokami:  takayuki_mizokami@gigaphoton.com 
(Overseas) Kenny Oka:  kenji_oka@gigaphoton.com
For inquiries regarding business discussions 
Sales Department 
Kiyotaka Uchida:  kiyotaka_uchida@gigapoton.com
For other inquiries 
Administration Department 
Mayumi Nakamura
Overseas Offices Contact Information
Gigaphoton Korea 
史承學 (Seung Hak, Sa):  sh_sa@gigaphoton.com
Gigaphoton Taiwan 
Eiji Miyamoto:  eiji_miyamoto@gigaphoton.com 
呉健賢:  ken_wu@gigaphoton.com
Gigaphoton China 
Daisuke Satou:  daisuke_satou@komatsu.com.cn 
何胜杰:  heshengjie@komatsu.com.cn
Singapore Branch 
Jason Lim:  Jason_lim@gigaphoton.com
Gigaphoton USA 
Dennis Smith:  dennis.s@gigaphotonusa.com 
James Graves:  james.g@gigaphotonusa.com
Gigaphoton Europe 
Erik de Bekker:  GPE_inquiry@gigaphoton.com</td>
</tr>
</tbody>
</table>

The Impact of the Japanese Government’s Declaration of a State of Emergency (5th Report)

A High Output 1.5 Times Greater Than the Previous Model Thanks to a Full Model Change for the First Time in 15 Years



Oyama, Tochigi; November 4, 2020 &#8212; <a href="https://gigaphoton.com">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources used in semiconductor lithography, has announced that it began shipping its new KrF light source model ‘G60K’ on October 29.



A full model change for the first time in about 15 years and the introduction of a new power supply unit has made it possible for the new KrF light source model ‘G60K’ to output 60 W, which is 1.5 times greater than that of the previous model. By this improvement, maximum 150% scanner productivity enhancement is expected. Furthermore, the body uses a new platform that also offers augmentability to support future KrF lightsource performance improvements to support further scanner productivity enhancement in the future.



Until now, conventional KrF lightsources had been presented the dilemma that although throughput increases at high output, the amount of downtime increases due to increased module replacement, and thus, the availability of the light source decreases. The new technology of the ‘G60K’ model enables to achieve both high output and high availability without increasing the amount of downtime. It also enables to achieve maximum throughput in the high dose layer.



Katsumi Uranaka, President &amp; CEO of Gigaphoton said, “Our KrF lightsources are products with compilation of our technology and experience, and have been highly regarded by our customers for a long time. We are confident that the G60K, which has undergone a full model change for the first time in 15 years, will be highly occupied in the field and further increase the productivity of our customers. We will continue to provide products and services that maximize productivity.”



About GIGAPHOTON



Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a laser supplier. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information please visit <a href="https://gigaphoton.com">https://gigaphoton.com</a>



Media contact: GIGAPHOTON Inc Corporate Planning Division Kenji Takahisa E-mail: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a>[:ja]

NewsNews

Technical Papers in SPIE Advanced Lithography 2021

Gigaphoton Donates Automatic alcohol sprayers to Elementary and Junior High Schools in Oyama City

The Impact of the Japanese Government’s Declaration of a State of Emergency (6th Report)

The Impact of the Japanese Government’s Declaration of a State of Emergency (5th Report)

Gigaphoton Launches Its Latest KrF Light Source Model ‘G60K’