4-kHz ArF Excimer Laser for 80-nm Technology Node

Key Features

  • Spectral bandwidth (FWHM) improved from 0.35 pm (G41A) to 0.3 pm to allow exposure of 80-nm geometries based on the G41A
  • Use of highly durable parts for each module to prolong the optical module life and further reduce CoO
  • Laser chamber: Use of highly durable parts for the electrodes
  • Line-narrowing module, monitor module, etc.: Use of highly durable materials for the optics

General Specifications

Wavelength193 nm
Average Output20 W
Pulse Energy5.0 mJ
Repetition Rate4,000 Hz
Bandwidth (FWHM)0.3 pm
Bandwidth (E95)0.75 pm
(*) Each of the above specification values represents a typical value