4-kHz ArF Excimer Laser for Design Rules of up to 0.10 µm

Main Features

  • Mounted with a newly designed solid-state pulse power supply that allows a repetition rate of 4000 Hz so as to achieve high throughput
  • High-reliability design inherited from our field-proven KrF excimer laser G10K/20K series

General Specifications

Wavelength193 nm
Average Output20 W
Pulse Energy5.0 mJ
Repetition Rate4,000 Hz
Bandwidth (FWHM)0.35 pm
Bandwidth (E95)0.85 pm
(*) Each of the above specification values represents a typical value