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<h5 style="text-align: center;">Achieving enhanced yield and tool availability with the latest technology to meet the rapid increase in demand for semiconductor</h5>
October 27, 2021
Oyama, Tochigi; October 26, 2021 &#8212; <a href="https://www.gigaphoton.com/en/">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of light sources used in semiconductor lithography, has announced that advanced ArF immersion lithography light source “GT66A” is now fully up and running at semiconductor manufacturers around the world.
In recent years, the number of digital devices and cloud facilities has increased rapidly all over the world, and the demand for semiconductors used for such devices and facilities has also increased dramatically. Furthermore, with semiconductors playing a central role in social infrastructure, such as with the widespread adoption of DX at companies, the increase in EV production toward a carbon-neutral society, and the shift to renewable energy, the demand for semiconductors has gained further traction. Increasing demand for high-end devices that combine high-speed computing with low power consumption, especially autonomous driving and high-performance servers, is further driving this acceleration in demand.
The GT66A is a model that also supports 5 nm-node and beyond manufacturing required by semiconductors for such as leading-end devices.
The GT66A providing a feature of enhancing the EPE (Edge Placement Error) performance by reducing the speckle contrast (30%).  EPE is a key process performance requirement that there is misalignment between the layout and resist exposure pattern, needed to improve toward advanced process Node  As a result of this enhancement, the LER (line edge roughness), which indicates deviations from the edge of the designed line is not completely smooth, and the LWR (line-width roughness), which indicates the variation in width caused by this unevenness, can be suppressed, and thus an improvement in yield can be expected. In addition, the introduction of highly durable components extends the maintenance cycle by 30%, thereby improving the availability of equipment run-time and providing further productivity.
Katsumi Uranaka, President &amp; CEO of Gigaphoton said, “GT66A was launched with the goal of delivering stable and high-yield production of advanced semiconductors, especially to improve the productivity of advanced process nodes. At Gigaphoton, we will continue to work to maximize the productivity of all semiconductor plants.”
 


<figure class="wp-block-table is-style-regular"><table><tbody><tr><td>About Gigaphoton As a leading company in the development and manufacture of DUV light sources used in lithography, Gigaphoton has provided many solutions that make full use of its advanced technology to semiconductor manufacturers around the world since its establishment. Gigaphoton is also engaged in developing EUV light sources. In every stage from R&amp;D to manufacture, sales, and maintenance services, as a team of experts with a wealth of knowledge, Gigaphoton will continue to provide world-class support delivered from the perspective of everyday users. For more information, please visit <a href="https://www.gigaphoton.com/en/">https://www.gigaphoton.com</a>. Media contact: Gigaphoton Inc Kenji Ohishi Tel: +81-285-37-6931 E-mail: web_info@gigaphoton.com</td></tr></tbody></table></figure>

The Latest “State-of-the Art” ArF Immersion Lithography Light Source “GT66A” Qualified into HVM

<h5 style="text-align: center;">Production Capacity to Double to Respond to a Significant Increase in Market Demand</h5>
September 15, 2021
Oyama, Tochigi; September 15, 2021 &#8212; <a href="https://gigaphoton.com">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of light sources used in semiconductor lithography, has announced that it will double its production capacity of excimer laser light sources by 2023.
In recent years, demand all over the world for semiconductors has increased significantly, and major semiconductor manufacturers in many countries are accelerating investment in semiconductor manufacturing equipment. Gigaphoton, a manufacturer of light sources used in semiconductor lithography, is also seeing increased market demand, with demand expected to remain firm in the future.
To meet this increase in demand, Gigaphoton is constructing a new facility, with its doors to open in April 2022, in order to establish a more stable supply system. Through this initiative, Gigaphoton will double its production capacity by 2023 while maximizing the use of production equipment and streamlining and optimizing its production process.
Katsumi Uranaka, President &amp; CEO of Gigaphoton said, “With demand for semiconductors on the rise around the world, we will do our utmost to meet the demand from our customers. This fiscal year, we will make full use of our existing resources for production and improve the efficiency of our production planning and lead times. Next year, the new facility will be completed and we will have a more stable supply system in place. As a manufacturer of lithography light sources, which are essential for semiconductor manufacturing, we will continue to contribute to the industrial sector by supporting the supply and operation of our products in a responsible manner.”
About GIGAPHOTON
Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of light sources. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information please visit <a href="https://www.gigaphoton.com/en/">https://www.gigaphoton.com/en/</a>
Media contact:
GIGAPHOTON Inc
Corporate Planning Division
Kenji Takahisa
TEL: +81-285-37-6931
E-mail: web_info@gigaphoton.com

Gigaphoton to Boost Production Capacity for Excimer Laser Light Sources

2021/8/19



On August 19, to avoid the spread of the new coronavirus throughout the country, the Japanese government has extended the declaration of a state of emergency to 13 prefectures (from August 20 to September 12), including Tochigi Prefecture, where Gigaphoton&#8217;s headquarters are located.



We request our customers and suppliers to refrain from visiting our company’s headquarters as much as possible. If a visit is unavoidable, please make an appointment with our contact person and note that you will be asked to fill out a &#8220;Prior Confirmation&#8221; form.



For information about visiting our offices outside of Japan, please contact our overseas offices listed at the end.



＜Our countermeasures against new coronavirus infection&gt;



<ol><li>Mandatory handwashing and mask wearing</li><li>Employee temperature check every morning</li><li>Distribution of the New Coronavirus Infection Response and Employee Behavior Manual</li><li>Prohibition of unnecessary business trips, both domestic and overseas, except for service support.</li><li>Telecommuting for all employees who can work from remote locations</li><li>Recommendation of online meetings with customers and suppliers.</li></ol>



*If you have any questions, please contact us at the contact information below.



We offer our deepest condolences to those who have died due to the Coronavirus (COVID-19) and wish a speedy recovery of infected people and sincerely hope that the infection will be contained soon



GIGAPHOTON INC. President and CEO Katsumi Uranaka



<figure class="wp-block-table is-style-regular"><table><tbody><tr><td>Media inquiries Corporate Planning Department Kenji Takahisa:&nbsp;web_info@gigaphoton.com TEL: +81-285-37-6931 For inquiries regarding supply chain Purchasing Section, Production Department Hidenobu Kameda:&nbsp;hidenobu_kameda@gigaphoton.com Rika Shimizu:&nbsp;rika_shimizu@gigaphoton.com TEL: +81-285-28-8433 For inquiries regarding service support and distribution Customer Support Department (Japan) Takayuki Mizokami:&nbsp;takayuki_mizokami@gigaphoton.com (Overseas) Kenny Oka:&nbsp;kenji_oka@gigaphoton.com TEL: +81-285-8409/8423 For inquiries regarding business discussions Sales Department Kiyotaka Uchida:&nbsp;kiyotaka_uchida@gigapoton.com TEL: +81-285-28-8415 For other inquiries Administration Department Mayumi Nakamura TEL: +81-285-28-8410 Overseas Offices Contact InformationGigaphoton Korea 史承學 (Seung Hak, Sa): sh_sa@gigaphoton.com Gigaphoton Taiwan Eiji Miyamoto: eiji_miyamoto@gigaphoton.com Limei Cheng: limei_cheng@gigaphoton.com Gigaphoton China Tetsuya Ogawa: tetsuya_ogawa@komatsu.com.cn 何胜杰:&nbsp;heshengjie@komatsu.com.cn Singapore Branch Jason Lim:&nbsp;Jason_lim@gigaphoton.com Gigaphoton USA Dennis Smith:&nbsp;dennis.s@gigaphotonusa.com James Graves:&nbsp;james.g@gigaphotonusa.com Gigaphoton Europe Erik de Bekker: GPE_inquiry@gigaphoton.com</td></tr></tbody></table></figure>

The Impact of the Japanese Government’s Declaration of a State of Emergency (7th Report)

Gigaphoton has been selected by the Ministry of Economy, Trade and Industry (METI) as as one of the assignee for the project &#8220;Research and Development of Enhanced Infrastructures for Post 5G Information and Communications Systems&#8221; and was introduced on the Ministry&#8217;s website.
Please take a look.
Gigaphoton&#8217;s development themes are listed in the following ” 3. Adoption results “
(two PDF files).
<a href="https://www.meti.go.jp/english/press/2021/0616_001.html">Click here for the link.</a>

Gigaphoton has been selected by METI asone of the assignee for the project “Research and Development of Enhanced Infrastructures for Post 5G Information and Communications Systems”.

Gigaphoton has won The Best Supplier in WFE Subsystems Award from VLSI Research, Inc. and has been introduced on their website.
Please take a look.
<a href="https://www.vlsiresearch.com/gigaphoton-honored-with-first-the-best-award-PFEL1SE1000WJOJ#page1">Click here for the link.</a>

Gigaphoton has won The Best Supplier in WFE Subsystems Award from VLSI Research, Inc.

2021/2/15
I would like to express my heartfelt sympathy to the affected people due to the earthquake that occurred on February 13th in Fukushima as an epicenter.
I pray for restoration and revival as soon as possible.
At this time, we do not have any damage or impact on employees` lives, buildings, production facilities, stocked products, procurement parts, logistics, information systems etc. due to the disaster.
Sincerely Yours,
Kind regards,
Katsumi Uranaka, 
President 
GIGAPHOTON Inc.

Impact assessment of the Earthquakes　in Fukushima upon GIGAPHOTON’s Business

Gigaphoton will present the following papers at the &#8220;<a href="https://spie.org/search?term=gigaphoton&amp;pageSize=25&amp;pagesVisited=1&amp;sortBy=Relevance&amp;eventName=Advanced_Lithography">SPIE Advanced Lithography 2021</a>&#8221; digital forum, to be held on February 22 (Sun.) through 26 (Thu.) 2021.
This conference is one of the largest event of advanced lithography for semiconductor manufacturing.
Gigaphoton presents following 8 papers discussing advanced lightsource technology which improves yield and availability for semiconductor manufacturing.
 
<ul>
<li>Oral Presentation</li>
</ul>
February 25, 2021 • 10:50 AM PST | Session 11: EUV Source [Extreme Ultraviolet (EUV) Lithography XII] 
Update of &gt;300W High Power LPP-EUV Source Challenge III for Semiconductor HVM                 
Author: Hakaru Mizoguchi; Gigaphoton Inc. (Japan) 
[Paper#: 11609-48]
February 24, 2021 • 9:40 AM PST | Session 4: Lithography Equipment and New Applications [Optical Lithography XXXIV] 
Latest ArF light source with speckle reduction technology for immersion lithography improving chip yield               
Author: Hirotaka Miyamoto; Gigaphoton Inc. (Japan) 
[Paper#: 11613-11]
February 25, 2021 • 8:50 AM PST | Session 8: Novel Optical and ebeam/ion [Novel Patterning Technologies 2021] 
Processability of organic material for semiconductor packaging by 248 nm excimer laser               
Author: Akira Suwa; Gigaphoton Inc. (Japan) 
[Paper#: 11610-27]
<ul>
<li>Poster Presentation</li>
</ul>
February 24, 2021 • 5:30 PM PST | Poster Session [Optical Lithography XXXIV] 
ArF lightsource “GT66A” for next-generation immersion lithography enhancing EPE and CD performance                
Author: Tommy Oga; Gigaphoton Inc. (Japan) 
[Paper#: 11613-30]
February 24, 2021 • 5:30 PM PST | Poster Session [Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV] 
Study of further CD and OL performance improvement by introducing new E95% spectral bandwidth and Wavelength functionality for ArFi lithography lightsource              
Author: Tommy Oga; Gigaphoton Inc. (Japan) 
[Paper#: 11611-92]
February 24, 2021 • 5:30 PM PST | Poster Session [Optical Lithography XXXIV] 
Advanced spectral engineering: A new way of process aware laser spectra optimization for optical lithography   
Author: Koichi Fujii; Gigaphoton Inc. (Japan) 
[Paper#: 11613-33]
February 24, 2021 • 5:30 PM PST | Poster Session [Optical Lithography XXXIV] 
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi Light source         
Author: Takehiko Tomonaga; Gigaphoton Inc. (Japan) 
[Paper#: 11613-29]
February 24, 2021 • 5:30 PM PST | Poster Session [Extreme Ultraviolet (EUV) Lithography XII] 
The development progress of the High Power LPP-EUV light source using a magnetic field 
Author: Hirokazu Hosoda; Gigaphoton Inc. (Japan) 
[Paper#: 11609-52]

Technical Papers in SPIE Advanced Lithography 2021

On December 22, 2020, Gigaphoton donated automatic alcohol sprayers for preventing virus infections to all elementary and junior high schools in Oyama City as part of its 20th anniversary project to contribute to the community.
Between December 22 and 24, Gigaphoton employees visited 36 schools in the city and installed the automatic alcohol sprayers. We received many gratitude from the schools, such as, &#8220;This is very helpful in preventing infection among the students.” and a letter of appreciation was also presented by the Mayor.
Gigaphoton will continue to make every effort to contribute not only to the development of our customers and the industry, but also to the health and well-being of the people in the community.
<div id="attachment_6722" style="width: 310px" class="wp-caption aligncenter"><img aria-describedby="caption-attachment-6722" decoding="async" loading="lazy" class="wp-image-6722 size-medium" src="https://webapi.gigaphoton.global/wp-content/uploads/2021/01/8fa0d593c50be4eb8f339a14ae0233bd-scaled-1-300x210.gif" alt="Presentation of the Letter of Appreciation at the Mayor's official office" width="300" height="210" srcset="https://webapi2.gigaphoton.global/wp-content/uploads/2021/01/8fa0d593c50be4eb8f339a14ae0233bd-scaled-1-300x210.gif 300w, https://webapi2.gigaphoton.global/wp-content/uploads/2021/01/8fa0d593c50be4eb8f339a14ae0233bd-scaled-1-1024x716.gif 1024w, https://webapi2.gigaphoton.global/wp-content/uploads/2021/01/8fa0d593c50be4eb8f339a14ae0233bd-scaled-1-768x537.gif 768w, https://webapi2.gigaphoton.global/wp-content/uploads/2021/01/8fa0d593c50be4eb8f339a14ae0233bd-scaled-1-1536x1073.gif 1536w, https://webapi2.gigaphoton.global/wp-content/uploads/2021/01/8fa0d593c50be4eb8f339a14ae0233bd-scaled-1-2048x1431.gif 2048w, https://webapi2.gigaphoton.global/wp-content/uploads/2021/01/8fa0d593c50be4eb8f339a14ae0233bd-scaled-1-1568x1096.gif 1568w" sizes="(max-width: 300px) 100vw, 300px" />Presentation of the Letter of Appreciation at the Mayor&#8217;s official office</div>

Gigaphoton Donates Automatic alcohol sprayers to Elementary and Junior High Schools in Oyama City

On January 13, in order to avoid the spread of the new coronavirus throughout the country, the Japanese government has extended the declaration of a state of emergency to seven prefectures (from 14 January to 7 February), including Tochigi Prefecture, where Gigaphoton&#8217;s headquarters are located.
We will continue to produce, supply equipment and parts to the customers, and provide service and support to the semiconductor fabs, as we are required by the authority to continue business even under the declared emergency situation. We will also continue to carefully check the production and supply capacity of our suppliers.
＜Our countermeasures against new coronavirus infection&gt;
<ol>
<li>Mandatory hand-washing and mask wearing</li>
<li>Employee temperature check every morning</li>
<li>Distribution of the New Coronavirus Infection Response and Employee Behavior Manual</li>
<li>Prohibition of unnecessary  business trips, both domestic and overseas, except for service support.</li>
<li>Telecommuting for all employees who are able to work from remote locations</li>
<li>Recommendation of online meetings with customers and suppliers.</li>
</ol>
*If you have any questions, please contact us at the contact information below.
We offer our deepest condolences to those who have died due to the Coronavirus (COVID-19) and wish a speedy recovery of infected people and sincerely hope that the infection will be contained soon
GIGAPHOTON INC. 
President and CEO
Katsumi Uranaka
<table width="662">
<tbody>
<tr>
<td width="662">Media inquiries 
Corporate Planning Department 
Kenji Takahisa: web_info@gigaphoton.com 
TEL: +81-285-37-6931
For inquiries regarding supply chain 
Purchasing Section 
Production Department 
Hidenobu Kameda: hidenobu_kameda@gigaphoton.com 
Rika Shimizu: rika_shimizu@gigaphoton.com 
TEL: +81-285-28-8433
For inquiries regarding service support and distribution 
Customer Support Department 
(Japan) Takayuki Mizokami: takayuki_mizokami@gigaphoton.com 
(Overseas) Kenny Oka: kenji_oka@gigaphoton.com 
TEL: +81-285-8409/8423
For inquiries regarding business discussions 
Sales Department 
Kiyotaka Uchida: kiyotaka_uchida@gigapoton.com 
TEL: +81-285-28-8415
For other inquiries 
Administration Department 
Mayumi Nakamura 
TEL: +81-285-28-8410
Overseas Offices Contact Information
Gigaphoton Korea 
史承學 (Seung Hak, Sa): sh_sa@gigaphoton.com
Gigaphoton Taiwan 
Eiji Miyamoto:  eiji_miyamoto@gigaphoton.com 
呉健賢: ken_wu@gigaphoton.com
Gigaphoton China 
Daisuke Satou: daisuke_satou@komatsu.com.cn 
何胜杰: heshengjie@komatsu.com.cn
Singapore Branch 
Jason Lim: Jason_lim@gigaphoton.com
Gigaphoton USA 
Dennis Smith  dennis.s@gigaphotonusa.com 
James Graves james.g@gigaphotonusa.com
Gigaphoton Europe 
Erik de Bekker  GPE_inquiry@gigaphoton.com</td>
</tr>
</tbody>
</table>

The Impact of the Japanese Government’s Declaration of a State of Emergency (6th Report)

On January 7, in order to avoid the spread of the new coronavirus throughout the country, the Japanese government declared a second state of emergency in the Tokyo metropolitan area (Kanagawa, Chiba, and Saitama prefectures) from January 8 to February 7.
Although Tochigi Prefecture, where Gigaphoton&#8217;s headquarters is located, is not in the target area, we will continue to produce, supply equipment and parts to the customers, and provide service and support to the semiconductor fabs, as they are required by the authority to continue business even under the declared emergency situation. We will also continue to carefully check the production and supply capacity of our suppliers.
＜Our countermeasures against new coronavirus infection&gt;
<ol>
<li>Mandatory hand-washing and mask wearing</li>
<li>Employee temperature check every morning</li>
<li>Distribution of the New Coronavirus Infection Response and Employee Behavior Manual</li>
<li>Pprohibition of unnecessary  business trips, both domestic and overseas, except for service support.</li>
<li>Telecommuting for employees who use public transportation from state of emergency area or employees who have difficulty commuting due to other factors</li>
<li>Recommendation of online meetings with customers and suppliers.</li>
</ol>
We offer our deepest condolences to those who have died due to the Coronavirus (COVID-19) and wish a speedy recovery of infected people and sincerely hope that the infection will be contained soon.
GIGAPHOTON INC. 
President and CEO
Katsumi Uranaka
＊If you have any questions, please contact us at the contact information below.
<table width="662">
<tbody>
<tr>
<td width="662">Media inquiries 
Corporate Planning Department 
Kenji Takahisa:  web_info@gigaphoton.com 
TEL: +81-285-37-6931
For inquiries regarding supply chain 
Purchasing Section 
Production Department 
Hidenobu Kameda: hidenobu_kameda@gigaphoton.com 
Rika Shimizu: rika_shimizu@gigaphoton.com 
TEL: +81-285-28-8433
For inquiries regarding service support and distribution 
Customer Support Department 
(Japan) Takayuki Mizokami:  takayuki_mizokami@gigaphoton.com 
(Overseas) Kenny Oka:  kenji_oka@gigaphoton.com 
TEL: +81-285-8409/8423
For inquiries regarding business discussions 
Sales Department 
Kiyotaka Uchida:  kiyotaka_uchida@gigapoton.com 
TEL: +81-285-28-8415
For other inquiries 
Administration Department 
Mayumi Nakamura 
TEL: +81-285-28-8410
Overseas Offices Contact Information
Gigaphoton Korea 
史承學 (Seung Hak, Sa):  sh_sa@gigaphoton.com
Gigaphoton Taiwan 
Eiji Miyamoto:  eiji_miyamoto@gigaphoton.com 
呉健賢:  ken_wu@gigaphoton.com
Gigaphoton China 
Daisuke Satou:  daisuke_satou@komatsu.com.cn 
何胜杰:  heshengjie@komatsu.com.cn
Singapore Branch 
Jason Lim:  Jason_lim@gigaphoton.com
Gigaphoton USA 
Dennis Smith:  dennis.s@gigaphotonusa.com 
James Graves:  james.g@gigaphotonusa.com
Gigaphoton Europe 
Erik de Bekker:  GPE_inquiry@gigaphoton.com</td>
</tr>
</tbody>
</table>

NewsNews

The Latest “State-of-the Art” ArF Immersion Lithography Light Source “GT66A” Qualified into HVM

Gigaphoton to Boost Production Capacity for Excimer Laser Light Sources

The Impact of the Japanese Government’s Declaration of a State of Emergency (7th Report)

Gigaphoton has been selected by METI asone of the assignee for the project “Research and Development of Enhanced Infrastructures for Post 5G Information and Communications Systems”.

Gigaphoton has won The Best Supplier in WFE Subsystems Award from VLSI Research, Inc.

Impact assessment of the Earthquakes　in Fukushima upon GIGAPHOTON’s Business

Technical Papers in SPIE Advanced Lithography 2021

Gigaphoton Donates Automatic alcohol sprayers to Elementary and Junior High Schools in Oyama City

The Impact of the Japanese Government’s Declaration of a State of Emergency (6th Report)

The Impact of the Japanese Government’s Declaration of a State of Emergency (5th Report)

NewsNews

The Latest “State-of-the Art” ArF Immersion Lithography Light Source “GT66A” Qualified into HVM

Gigaphoton to Boost Production Capacity for Excimer Laser Light Sources

The Impact of the Japanese Government’s Declaration of a State of Emergency (7th Report)

Gigaphoton has been selected by METI asone of the assignee for the project “Research and Development of Enhanced Infrastructures for Post 5G Information and Communications Systems”.

Gigaphoton has won The Best Supplier in WFE Subsystems Award from VLSI Research, Inc.

Impact assessment of the Earthquakes in Fukushima upon GIGAPHOTON’s Business

Technical Papers in SPIE Advanced Lithography 2021

Gigaphoton Donates Automatic alcohol sprayers to Elementary and Junior High Schools in Oyama City

The Impact of the Japanese Government’s Declaration of a State of Emergency (6th Report)

The Impact of the Japanese Government’s Declaration of a State of Emergency (5th Report)

Impact assessment of the Earthquakes　in Fukushima upon GIGAPHOTON’s Business