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A High Output 1.5 Times Greater Than the Previous Model Thanks to a Full Model Change for the First Time in 15 Years



Oyama, Tochigi; November 4, 2020 &#8212; <a href="https://gigaphoton.com">Gigaphoton Inc.</a> (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources used in semiconductor lithography, has announced that it began shipping its new KrF light source model ‘G60K’ on October 29.



A full model change for the first time in about 15 years and the introduction of a new power supply unit has made it possible for the new KrF light source model ‘G60K’ to output 60 W, which is 1.5 times greater than that of the previous model. By this improvement, maximum 150% scanner productivity enhancement is expected. Furthermore, the body uses a new platform that also offers augmentability to support future KrF lightsource performance improvements to support further scanner productivity enhancement in the future.



Until now, conventional KrF lightsources had been presented the dilemma that although throughput increases at high output, the amount of downtime increases due to increased module replacement, and thus, the availability of the light source decreases. The new technology of the ‘G60K’ model enables to achieve both high output and high availability without increasing the amount of downtime. It also enables to achieve maximum throughput in the high dose layer.



Katsumi Uranaka, President &amp; CEO of Gigaphoton said, “Our KrF lightsources are products with compilation of our technology and experience, and have been highly regarded by our customers for a long time. We are confident that the G60K, which has undergone a full model change for the first time in 15 years, will be highly occupied in the field and further increase the productivity of our customers. We will continue to provide products and services that maximize productivity.”



About GIGAPHOTON



Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a laser supplier. In every stage from R&amp;D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information please visit <a href="https://gigaphoton.com">https://gigaphoton.com</a>



Media contact: GIGAPHOTON Inc Corporate Planning Division Kenji Takahisa TEL: +81-285-37-6931 E-mail: <a href="mailto:web_info@gigaphoton.com">web_info@gigaphoton.com</a>[:ja]

Gigaphoton Launches Its Latest KrF Light Source Model ‘G60K’

<h2 class="has-text-align-center wp-block-heading" id="director-senior-executive-officertatsuo-enami">Director Senior Executive Officer Tatsuo Enami</h2>



Since being appointed as the director in June 2017, Dr. Enami has been the head of the corporate planning department with the responsibility of production, sales, customer support and the Singapore business. He also manages the Gigaphoton business and has been exploring the future of Gigaphoton continuously. We extensively interviewed Dr. Enami on the semiconductor industry, how an organization should be, and his dreams.



Dr. Enami, you have a long experience as the head of the sales department. Did your perspective change after becoming the director and head of the corporate planning department?


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Yes, I think it changed. Earlier, my biggest concern was the expansion of the current business. I had focused on how to sell lasers and how to expand the maintenance business associated with it. I used to think that we have to make all possible efforts to bring sales and profit for the company, and this has not changed even now, but after becoming the director, I have started thinking &#8216;How to make this sustainable?&#8217;. Now, while focusing on the development of conventional lithography light sources and &#8220;expansion&#8221; of the sales business, we are also thinking about &#8220;growth&#8221; based on the development and sales of new products that are different from current products. I once again realized that safety and compliance should be our top priority to achieve this goal. The expansion and growth of an organization can only be achieved with a solid foundation, and even if a great product was developed, it may be short-lived with one mistake. I realized that this is the most important factor if Gigaphoton has to progress further.



What do you think is the future of the semiconductor industry? Also, what are your suggestions to realize that future?


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Since 2000, electronic devices such as PCs and mobile phones have been the driving force behind semiconductors, and it had been considered that the semiconductor business would reach its peak once the market for such devices is saturated. However, with the advent of concepts like IoT, the semiconductor business has recently started to grow. In IoT, semiconductors are used as sensors rather than as large electronic devices such as smartphones and PCs. The concept is to use sensors in all objects that exist in this world. In other words, applications that are entirely different from the large electronic devices, have emerged. ICT (Information and Communication Technology) has further accelerated and the application scope has expanded infinitely. &nbsp; What do you think about EUV* that is under development?



As there are no light sources with a shorter wavelength than EUV, it is a matter of time before EUV will become the standard light source. However, Gigaphoton has not decided on the timing to start EUV as a business. In any case, since we must contribute to the semiconductor industry through EUV, we will continue to focus on the development without giving up.



How do you think Gigaphoton will progress in the future?



There are two things that Gigaphoton can do. First is to strengthen the existing business of lithography light sources. We have formulated a specific roadmap that includes innovation through hybridization of the gas laser and solid-state laser, enhancing user support through data products and realization of EUV. The second is to utilize our excimer laser technology, which is Gigaphoton’s core competence in other fields. Starting with the development of light sources for annealing and small diameter processing, we have a long-term plan to develop an in-house system.



What do you think is essential for the company to make further progress in the future?



I would like to seek diversification. I want our company to become a group with people from various countries, whose thinking processes are different. So far, we had only Japanese people and were &#8216;happy with the status quo&#8217;, but now, nearly 90% of our customers are from overseas. In that sense, I would like to strengthen our product development and business by incorporating the opinions of people from other countries. Since the product has been globalized and can be used anywhere in the world, what Japanese people think holds good to a certain extent. However, in the case of support, it is a little different. This is because what customers expect differs depending on the country, such as whether the importance is given to &#8220;operation ratio&#8221; or &#8220;performance&#8221;. In that sense, ONE GIGAPHOTON system that started several years back, where field service engineers (FSE) of each country visits other countries, is excellent, as the FSE can experience in person what customers look for depending on the country. I think that in the future, the key will be support and development in anticipation of not only the differences in the workplace but also legal differences, etc.



Please tell us your thoughts on legal compliance and internal control, etc., as a director in charge of compliance.



In the last couple of years, compliance cases, which include internal reporting have increased throughout the Gigaphoton Group. Although this is partly due to the increase in the number of employees, I take a positive view that this is because of the increased awareness about compliance among the employees. However, if a person who has been nurtured through years of training and experience, resigns due to problems with compliance, then the company will lose a significant asset, which is very unfortunate. Therefore, the essential point is to ensure that compliance problems do not occur, for which it is necessary to have methods and mechanisms in place. I think that education is the important key to be able to keep up. We are conducting compliance workshops and plan to promote them in the future as well.



Finally, please tell us about your future dreams.


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Regarding work, as I have mentioned so far, my dream is to achieve stable growth of the company. This is because I want Gigaphoton to grow up to be a company that will be around for 50 to 100 years. I want to continue my studies in business administration, which I have been studying for many years, and publish a few papers. In our business field of lithography equipment, we have manufactured the most precise device ever made in the world, and it is said that there is no other better device. As a person involved with the device, I want to leave the legacy of this device and matters that decide the outcome of business in proper order. In my personal life, my hobbies include appreciation of paintings, and I hope to restart revisiting overseas art galleries. Earlier I used to visit them often, but now I do not have much time. I would especially like to visit the Hermitage Museum in Russia as I have never been there.



*EUV &#8211; Stands for Extreme Ultraviolet which is a lithography technology that uses light sources that emit extremely short wavelength (13.5 nm) light to achieve finer-scale processing.

Leader Interview

<h2 class="wp-block-heading" id="director-senior-executive-officertakashi-saito">Director Senior Executive Officer Takashi Saito</h2>



Director Takashi Saito took on his role as a director in June 2017. Gigaphoton was established in 2000 as a joint venture (dissolved 2011) with Ushio Inc., and Director Saito transferred from Ushio to Gigaphoton following his secondment. I talked to Mr. Saito who, following his roles as Deputy General Manager of the Development Division and General Manager of the Customer Support Division (CS), now serves as General Manager of the EUV Development Division, and also Managerial Director of Laser Development and Quality Assurance, thus acting as a keystone in technological development for the company.



―It’s been a year and a half since your appointment as director, so what sort of things would you consider to be current issues for the company?


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The issues within the company became clearer to me through my participation in the management team. Amongst short-term issues would be strengthening competitiveness in excimer lasers for lithography (DUV). Particular points would be the increase in lifespan for parts, as well as energy and wavelength stability. I also feel that the training of field service engineers (FSE) and global personnel who are capable of effective communication with our various local corporations would be a pressing task. More long-term issues would include the expansion of our next businesses and the development of EUV*. I think that as our present DUV business is running smoothly, the current time offers us an opportunity. Meanwhile, we will develop our laser business targeting annealing for flat panel displays (FPD), while concurrently making challenges in other fields. Also, there’s not only our light source business, we’ve begun sowing our seeds in the field of analysis software, such as with FABSCAPE, so we hope that this will soon become one of the pillars of our business. The extent to which we persevere with EUV will be the key. I want to demonstrate Gigaphoton’s strengths and make this work as a business as soon as possible.



―As General Manager of the EUV Development Division, please tell us your thoughts with regard to EUV.


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In the lithography world, the next generation light source will surely be EUV, so without EUV, it will no longer be possible to say that we are doing a cutting-edge business as a light source manufacturer. I’m not sure how many years it will take, but at some point, when DUV becomes commoditized and EUV becomes available worldwide, isn’t it likely that there will be a drop in motivation for any company working in the lithography industry without this? In order to avoid this situation, I’d also like to make the case for our company’s strength in the technology of debris mitigation, and to enter the business as soon as possible.



―It&#8217;s been more than 15 years since EUV development started, hasn’t it?



Yes, that’s right. However, it’s also taken about thirty years for DUV to become as profitable as it is now. EUV research began at Komatsu around 2003, but in-house research and development began after dissolving the joint venture with Ushio in 2011. Its history is long, but from the point of view of our starting development in earnest, it’s actually still quite recent. The cost of EUV compared to DUV also differs by an order of magnitude, and it is big business on our company’s scale, but for the limited research budget, I have the impression that these select few have done well to push their way this far.



―What do you consider to be the strengths of Gigaphoton?



I think it’s a good thing that, for a company founded just under 20 years ago, we still have members who have been here since our inception. Another point is that we continue with the pattern firmly established through those past successes left as company assets by these individuals. Also, as the company grew rapidly, many people from other companies have come to work with us, with some of them now active as central figures in Gigaphoton. Successfully bringing in new blood from elsewhere as the company grows in this way can also be said to be a strength of the company. I wonder if this might not be a characteristic of the free corporate style, in which there aren’t really boundaries between the top level and persons in charge. Also, I think that it is a very good thing that prominent people, considered legendary in the lithography industry, are enrolled in our company in advisory positions. There are so many things to learn from such people, so I’d particularly hope that people in research and development will absorb anything they can from them.



―Amongst your experiences so far, what kind of things have left an impression on you?



First of all, when I was a product manager for development in 2001, I developed a single chamber system ArF excimer laser for what is now the largest OEM in the industry. Unfortunately it didn’t sell very well, but I believe that the relationships we built at this time led to the sales of the subsequent twin chamber system laser, and they were also the foundation of our present good relationship with our customers. Also, I served as Deputy General Manager and General Manager of the Customer Support Division for five years from 2007. Until then I’d been exclusively concerned with development, so at the outset there were all sorts of things that I didn’t understand at all. This would be unthinkable now, but when I’d just transferred to the CS Division, we’d have stocktaking for parts, and at that time, we’d find considerable discrepancies due to inadequacies in our procedures. Nevertheless, I accepted reports saying &#8220;That’s just the nature of stocktaking isn’t it?&#8221; After realizing this was not correct, things were soon returned to a normal condition, but just after my transfer, I had no feel for inventory management at all, and didn’t pick up on the abnormality straightaway. Thanks to my experience in the CS Division, I was able to learn the workings of the company, such as in sales, services, inventory management and export control, which I think was really positive.



―Finally, may I ask you about any dreams you might have?


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Well, firstly, from the point of view of my work, I’d like Gigaphoton to become the kind of company for which future sales could reach 100 billion yen. I think EUV is the key to that of course. If our business could work as well with EUV as it currently does with DUV then I think this should be possible. With regard to my personal life, I go camping with my family and friends every year, and have done so for about 20 years now, but recently my children have grown up and they’re helping me with most of the various preparations. So, it’s got to the point where I’m thinking I’d like to take a campervan trip just with my wife, as a couple. It would also be nice to make some trips traveling on those luxury trains that they have in various places. Either way, this is still all in the future for me, but I&#8217;d like actually to try these things when I have a little more time to play with.



*EUV &#8211; Stands for Extreme Ultraviolet which is a lithography technology that uses light sources that emit extremely short wavelength (13.5 nm) light to achieve finer-scale processing.

<h2 class="has-text-align-center wp-block-heading" id="president-and-ceokatsumi-uranaka">President and CEO Katsumi Uranaka</h2>



President Uranaka, who took office on 1st April 2017, spoke to us about future business prospects for Gigaphoton, his expectations for employees and his personal dreams.



<p id="with-the-slogan-challenge-for-next-growth-gigaphoton-is-calling-the-2016-fiscal-year-its-second-period-of-establishment-could-you-tell-me-about-the-vision-behind-these-words-and-the-future-prospects">With the slogan “Challenge for NEXT Growth”, Gigaphoton is calling the 2016 fiscal year its second period of establishment. Could you tell me about the vision behind these words and the future prospects?



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Yes, up until the present time, Gigaphoton’s business scheme has been concentrated on excimer lasers for semiconductor lithography (referred to below as litho-lasers). However, I think that from now on, we will not confine our activities to this but will expand into EUV (Extreme ultraviolet light sources: said to be the next generation light sources for lithography) and expand the new business “GIGANEX” which will apply excimer lasers in fields in which they have not been used before. Last year, EUV reached our long-hoped-for 250 watt output power with 5% conversion efficiency (the output produced per input) and the expectations of customers are getting higher. In 2017 we are planning opportunities to present our EUV to our customers. And, of course, with regard to the new business “GIGANEX”, in March last year we were able to ship our excimer laser for annealing, designed to be used in the new field of FPDs (flat panel displays), and shipping orders have increased since then. In this way, after setting the 2016 fiscal year as our second period of establishment, our challenge is to make litho-lasers, EUV, and GIGANEX the three pillars of the business from which we look to our future growth. Then in July 2017, a new building will be built, which will further increase production capacity. The meaning of our “Challenge for NEXT Growth” would include all these things.



So it seems you can clearly see the vision for the future. Of course the litho-laser business will be the foundation for the various upcoming challenges, so how do you see it developing now?



Over the past few years, Gigaphoton has received considerable support from customers in the field of excimer lasers for lithography, and has gained over 50% market share worldwide. However, we should not rest on our laurels here, and I’ll always want to review the current situation, repeatedly making improvements (&#8220;Kaizen&#8221;), and I want to keep doing all I can to provide better products and fast service to customers. Through repeatedly doing all this, I think the customers will come to consider us to be an “essential company”. And I think we will develop a win-win relationship with our customers in which both the company and customer base grow together.



It is said that the lithography market is moving from its growth stage to maturity, so how do you think this will develop?



There are not really any businesses which will continue to grow indefinitely. It is true that the market feels as if it is levelling out but with the IoT and the customer growth as we advance into China, whilst one may say it has reached period of maturity, there are many business chances remaining, so I plan for our company to continue growing without missing any of these opportunities.



What are your thoughts regarding expansion into China?



As I said before, there are many customers making large-scale investments in China, so it is an extremely important market for future growth. In that environment, we must not be late setting up a service foothold to match our customers’ business speed and, through thorough preparation. I hope our support will contribute to our customers achieving smooth production. The speed of business is fast in China so firstly it is important to do all we can to be able to keep up with this.



Now that you are President, what kind of company would you like Gigaphoton to become?



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Firstly, I want to make it a company with a feeling for speed. Whatever the situation, I’d like there to be the attitude of “Don’t get stuck thinking about things, get moving and give it a try!” That is to say, use that feeling for speed to charge ahead using trial and error. The reason being that if you move at three times the speed then things can still work even if you fail twice then have to try things over again. For example, if some problem must be cleared in six hours, and you only have one chance, then if you can address it in two hours you will have two opportunities to try things again. If you are fully confident that you can take your time and that things will work then doing it once is enough, but without that confidence it’s best to speed things up and have several attempts. Through that repetition you can say “next time we’ll fix this” or, “then we’ll do it like this”, and all the time you are gaining knowledge and making improvements. This is an important process and I think you can achieve good things as a result. Then another point is the speed of transfer of information. As an organization, the vectors should be well aligned between departments so that communication is as fast as if it were a single department. That’s essential for speedy operation. Particularly in this business world, speed is life. It is often said that “what you sold yesterday is not needed today”. I want everyone always to be aware that companies that are too slow to adapt to changes will not survive.



What is necessary to speed up the transfer of information?



Basically, it’s ensuring the speed of judgement in the managerial staff. Because making judgments is the work of managerial staff. Then when a member of managerial staff can’t make a judgement about some matter it must be quickly directed up to their superior. If that superior can still not make the judgement then it should go up to the next. It is important that this flow is smooth. The particularly important point is how fast the message that “I can’t judge this” is transmitted upwards. This is important not only in business but also from the viewpoint of compliance. Bad information can be like a fire. If a small problem is dealt with quickly in its early stages it can be resolved immediately, but while it is left unattended somewhere, the fire will gain strength rapidly and it is often the case that by the time the problem reaches the top level it has become a major issue. Even if some major problem arises, if the company is one in which information can reach the top level in maybe four hours, for example, things can always be resolved before they become serious. Having that degree of speed for the transfer of information is important. Also, the people who hold the key to this are particularly those colleagues in the managerial positions, and raising skills and awareness of this at these levels is very important.



What kind of expectations do you have for your employees?



Regarding my expectations, I would want them always to carry out their work for the customers with pride and a sense of professionalism whatever their position may be. As they work I want them always to be considering what it is that customers want and what is necessary to raise their level of satisfaction. Other than that, they should always pay attention to issues of health, safety and compliance. I want nobody ever to forget that these basic points are the most important and must come first. That way, the employees of the company can all be satisfied in their work and we can provide an environment that is easy to work in.



Finally, please let me know about your dreams.



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I want to go to Antarctica to look at the penguins (laugh). When I was young I was greatly affected by reading Eizaburo Nishibori (Vice Captain of the Primary Japanese Antarctica Survey and Captain of the Wintering Party) so I always wanted to go to the Antarctic. In the past Komatsu used to make snow vehicles for the Antarctic Survey, with staff going out to perform maintenance on them and wondering if I might be able to go along somehow was my main reason for joining them. When I said that in front of the management during my actual company entry tests they told me “Unfortunately, we already have a crew organized for that so it could be difficult” (laugh). Now this will just have to be a trip for me after my retirement but my dream would be to see tens of thousands of wild penguins at close quarters in the Antarctic one day. If I could realize that then I think I’d be taking pictures and getting them up on Facebook (laugh).

<h2 class="has-text-align-center wp-block-heading" id="senior-fellowhakaru-mizoguchi">Senior Fellow Hakaru Mizoguchi</h2>



What is currently the most important item for Gigaphoton from a technology standpoint?



I would have to say creating an fully functional, HVM (high volume manufacturing) ready EUV light source. &nbsp;But ArF lasers, of course, will still be required for mid to lower layers. &nbsp;So it’s clear we also need to focus on continuing to evolve the ArF technology as well. &nbsp;Our goal to offer the most effective HVM technology for both EUV and ArF.



What is Gigaphoton&#8217;s biggest challenge in technology development?



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Gigaphoton got its start from a hand full of people who where inspired to develop Excimer laser technology. &nbsp;But we had a team of highly motivated and capable Engineers who were able to pull it off and deliver a production quality laser to the market. &nbsp;I think one of our biggest challenge is making sure we continue to maintain and attract high level Engineers. Creating an environment where the newer generation of Engineers have the freedom to explore and develop new ideas will be key to our growth and success for the future.



Another challenge we face is external networking. &nbsp;Today we have active partnerships with Universities and corporate research laboratories primarily within Japan to investigate new concepts and technologies. &nbsp;However, as we move forward we need to further expand our network of partnerships to other countries. &nbsp;Furthermore, we need to spend even more energy in perfecting our own unique technologies and work with global third party sources for other technologies. &nbsp;Of course we can do everything ourselves if we wanted to, but we cannot be truly competitive in both time-to-market and cost effectiveness unless we are selective of the technologies we invest our own resources in.



There are several possibilities when we talk about the next generation semiconductor manufacturing technologies. &nbsp;What are your thoughts on the future of our industry&#8217;s technology?



Over the years this industry has experienced transitions from one technology to another, but I think the next era it will be more about technologies co-existing with, rather than succeeding, each other. &nbsp;In fact you can say we&#8217;ve already stepped into such an era, but I think it will be come much more evident going forward. &nbsp;Part of the reason why is because the kinds of chips in demand today are based on a broader range of devices than in the past. &nbsp;Until recently the PC was the main driver in the industry, but today we also have a variety devices such as smartphones and tablets. &nbsp;I&#8217;m sure in the future there will be more.



What are Gigaphoton&#8217;s technical priorities?



We can&#8217;t lose focus on winning in the lithography space. &nbsp;Litho is not only important to our business, but it is also one of the the key technologies sustaining the industry. &nbsp; &nbsp;But, at the same time we have to also think ahead and prepare ourselves to win in the future. &nbsp;We&#8217;re definitely not standing still when it comes to identifying and adopting technologies that may be niche today, but one day may become main stream. &nbsp;I would say we&#8217;re quite ambitious when it comes to competing in technology.



What is Gigaphoton&#8217;s biggest technical strength?



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Gigaphoton is relatively quick when it comes to applying new ideas. &nbsp;This by itself may not distinguish us from a typical venture company, but we have a unique balance of agility and persistence that I think sets us apart from others. &nbsp;We put in a lot of care and effort into investigating, developing and maturing a new idea. &nbsp;But at the same time we are also quick to move on if we determine the idea or technology doesn&#8217;t meet our customers&#8217; needs.



For example, today we are using CO2 lasers and droplets for our EUV light source, but this wasn&#8217;t our initial choice of technologies. &nbsp;From 2002 through 2007 we spent close to 5 years trying to perfect other technologies before arriving at what we have today. &nbsp;Likewise, our current Excimer laser technology was developed back in 1998, and prior to this we also spent many years trying to develop and perfect other technologies. &nbsp;It is critical to our business that we offer unique technologies, but to be competitive in doing so, we have to be 3 to 4 times quicker and more efficient than others in validating every possible ideas. &nbsp;Gigaphoton is able to do this, and as a result we have continued to survive and grow in our industry. &nbsp;This is the key strength of Gigaphoton.



What kinds of processes did you implement to be 3 or 4 times quicker?



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We basically used our heads (laugh). &nbsp;What I mean is we&#8217;ve become quite proficient in simulating outcomes based on experience and knowledge accumulated over the years. &nbsp;This is important because we obviously don&#8217;t have the time or resources to actually experiment with every single technology we need to evaluate, so our speed and agility really depends on how well and how quickly we are able to accurately simulate outcomes in our heads.



That said,however, one other very important process we value deeply is ensuring that we create an environment where every Engineer feels comfortable expressing any opinion (good or bad) &#8211; this is very important, but often difficult to achieve in many companies/cultures. &nbsp;In order to create something new and unique, you have to be open to everyone&#8217;s thoughts and ideas, especially non-experts. &nbsp;The thing about technology is that as Engineers build up their expertise over year of experience, and many tend to loose their flexibility and can&#8217;t think outside the box. &nbsp;Often time there are little sparks of inspiration that shine from a non-expert idea or opinion. &nbsp;Our attentiveness and ability to take advantage of such moments is what make us quick and efficient in exploring new ideas.



Going forward, what do you want to appeal to people the most about Gigaphoton?



Gigaphoton is an proven expert in creating unique technologies and applying them to deliver highly efficient products for HVM. &nbsp;Today our business is centered around lithography, but if we expand our business into new laser applications with the same spirit, I believe we will be successful.

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