2 kHz KrF Excimer Laser for 0.18 µm Design Rule
The G20K features high energy stability (±0.4%) and a narrow spectral bandwidth (FWHM) of 0.6 pm or less to allow exposure of 0.18-µm geometries at high resolution.
G20K Main Features
- Repetition rate increased from 1000 Hz (G10K) to 2000 Hz to achieve higher throughput.
- Great enhancement of laser emission stability and module durability allows further reduction of the CoO (running cost per pulse).
- Compact size that reduces the floor footprint by 14% compared with the G10K.
- A newly designed solid-state pulse power supply allows a 20% reduction of power consumption.
|Average Output||20 W|
|Pulse Energy||10.0 mj|
|Repetition Rate||2,000 Hz|
|Bandwidth (FWHM)||0.6 pm|
|Bandwidth (E95)||2.0 pm|
|Energy Dose Stability||0.4 %|
|(*) Each of the above specification values represents a typical value|