2 kHz KrF Excimer Laser for 0.13 µm Design Rule

Key Features

  • Further enhancement of the field-proven energy stability of the G20K
  • Ultra-narrow bandwidth of 0.5 pm (FWHM) achieved by improvement of the line-narrowing module to allow exposure of 0.13 µm geometries

General Specifications

Wavelength248 nm
Average Output20 W
Pulse Energy10.0 mJ
Repetition Rate2,000 Hz
Bandwidth (FWHM)0.5 pm
Bandwidth (E95)1.4 pm
Energy Dose Stability0.35 %
(*) Each of the above specification values represents a typical value