2 kHz KrF Excimer Laser for 0.18 µm Design Rule

The G20K features high energy stability (±0.4%) and a narrow spectral bandwidth (FWHM) of 0.6 pm or less to allow exposure of 0.18-µm geometries at high resolution.

Key Features

  • Repetition rate increased from 1000 Hz (G10K) to 2000 Hz to achieve higher throughput.
  • Great enhancement of laser emission stability and module durability allows further reduction of the CoO (running cost per pulse).
  • Compact size that reduces the floor footprint by 14% compared with the G10K.
  • A newly designed solid-state pulse power supply allows a 20% reduction of power consumption.

General Specifications

Wavelength248 nm
Average Output20 W
Pulse Energy10.0 mJ
Repetition Rate2,000 Hz
Bandwidth (FWHM)0.6 pm
Bandwidth (E95)2.0 pm
Energy Dose Stability0.4 %
(*) Each of the above specification values represents a typical value