2 kHz KrF Excimer Laser for 0.18 µm Design Rule
The G20K features high energy stability (±0.4%) and a narrow spectral bandwidth (FWHM) of 0.6 pm or less to allow exposure of 0.18-µm geometries at high resolution.
Key Features
- Repetition rate increased from 1000 Hz (G10K) to 2000 Hz to achieve higher throughput.
- Great enhancement of laser emission stability and module durability allows further reduction of the CoO (running cost per pulse).
- Compact size that reduces the floor footprint by 14% compared with the G10K.
- A newly designed solid-state pulse power supply allows a 20% reduction of power consumption.
General Specifications
Item | Value* |
---|---|
Wavelength | 248 nm |
Average Output | 20 W |
Pulse Energy | 10.0 mJ |
Repetition Rate | 2,000 Hz |
Bandwidth (FWHM) | 0.6 pm |
Bandwidth (E95) | 2.0 pm |
Energy Dose Stability | 0.4 % |