* This is a product concept image and is subject to change without notice.
A cutting edge excimer laser combining the Gigaphoton GT Series and new technology
We are convinced that GIGANEX, newly created by consolidating the technology and know-how acquired by Gigaphoton from manufacturing excimer lasers as semiconductor lithography light sources, and combining that technology and know-how with the technology of its customers, can also generate new innovations in fields other than semiconductor lithography as a high performance DUV light source.
Expected Fields of Application
FPD manufacturing processes, and flexible device manufacturing processes, Semiconductor manufacturing processes
High Output Excimer Lasers
Because the GIGANEX Series was designed on Gigaphoton’s GT platform and devised for maximum universality, it can be expected to be highly reliable. Also, it has inherited the high output and high oscillating frequency that are the characteristics of the GT Series and can be expected to realize designs that deliver even higher throughput.
■ High Repetition Type Excimer Lasers
|Max Pulse Energy||75 mJ||100 mJ|
|Max Output||300 W||600 W|
|Max Repetition Frequency||4 KHz||6 KHz|
|Body Size||1975 x 800 x 1950 (mm)||2800 x 820 x 2120 (mm)|
|Body Weight||1600 kg||3400 kg|
- Please be aware that the main specifications may be changed without prior notice at the company’s discretion.
- If you are interested, please contact a representative of Gigaphoton.
- Please be aware that this may change due to market demand or at the company’s discretion.